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    • 1. 发明专利
    • Method of manufacturing microcomponent
    • 制造微波的方法
    • JP2007247052A
    • 2007-09-27
    • JP2006110234
    • 2006-03-16
    • Toshiyuki Horiuchi敏行 堀内
    • HORIUCHI TOSHIYUKIKATAYAMA MASAHIROWATABE YUSUKENAKAMURA RYOTAKOUCHI YUUKAI
    • C25D1/00C25D1/20
    • PROBLEM TO BE SOLVED: To provide a method for easily separating a micro component from a substrate without damaging the same, wherein the microcomponent is manufactured by plating a metal on a plating die formed on the substrate.
      SOLUTION: A metal 4 having a small ionization tendency is sputtered onto a surface of the substrate 1 onto which a metal film or foil is deposited. The plating die 5 is formed on the sputtered metal 4 using a material soluble in a solvent or a peeling liquid. A plating metal 7 is plated on the plating die 5, and while dissolving and removing the plating die 5 in the solvent or the peeling liquid, the microcomponent manufactured from the plating metal 7 is separated and made independent from the substrate 1 by taking advantage of a weak adhesion between the sputtered metal film 4 and the substrate 1.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种用于容易地从基板分离微成分而不损坏微组件的方法,其中通过在形成在基板上的电镀模上镀金属来制造微组件。 解决方案:将具有小电离倾向的金属4溅射到沉积有金属膜或箔的基板1的表面上。 使用可溶于溶剂或剥离液的材料,在溅射金属4上形成电镀模5。 电镀金属7镀在电镀模5上,同时在溶剂或剥离液中溶解和除去电镀模5,由电镀金属7制成的微组件通过利用电镀金属7独立于衬底1 溅射金属膜4与基板1之间的弱粘合力。版权所有(C)2007,JPO&INPIT