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1. 发明申请

US20120025861A1 TEST SOCKET AND TEST DEVICE HAVING THE SAME 审中-公开
标题翻译：测试插座及其测试装置
公开(公告)号：US20120025861A1
公开(公告)日：2012-02-02
申请号：US13196380
申请日：2011-08-02
申请人： Hwan Wook PARK , Woo Seop KIM , Sung Bum CHO
发明人： Hwan Wook PARK , Woo Seop KIM , Sung Bum CHO
IPC分类号： G01R31/00
CPC分类号： G01R1/045 , G01R1/0466
摘要： A test device is provided. The test device includes a first via which transmits a supply voltage, a second via which transmits a ground voltage, a test board including a plurality of test signal vias for transmitting a plurality of test signals, a capacitor disposed on an upper part of the test board and connected between the first via and the second via, and a test socket which electrically connects a device under test (DUT) with the test board. The test socket includes a first region including a flat lower surface bordering the test board, a second region including an uneven lower surface, a plurality of first contactors which are disposed in the first region and which are connected to the plurality of vias, and two second contactors which are disposed in the second region and which are connected to two terminals of the capacitor.
摘要翻译：提供测试设备。测试装置包括发送电源电压的第一通孔，发送接地电压的第二通孔，包括用于发送多个测试信号的多个测试信号通孔的测试板，设置在测试的上部的电容器并连接在第一通孔和第二通孔之间，以及将被测器件（DUT）与测试板电连接的测试插座。测试插座包括：第一区域，包括与测试板邻接的平坦的下表面，包括不平坦的下表面的第二区域;多个第一接触器，其布置在第一区域中并连接到多个通孔;以及两个第二接触器，其布置在第二区域中并且连接到电容器的两个端子。

2. 发明授权

US07222273B2 Apparatus and method for testing semiconductor memory devices, capable of selectively changing frequencies of test pattern signals 失效
标题翻译：用于测试半导体存储器件的装置和方法，能够选择性地改变测试图形信号的频率
公开(公告)号：US07222273B2
公开(公告)日：2007-05-22
申请号：US10886074
申请日：2004-07-07
申请人： Sung-bum Cho
发明人： Sung-bum Cho
IPC分类号： G11C29/00 , G11C7/00
CPC分类号： G11C29/56004 , G11C29/56 , G11C29/56012
摘要： There are provided an apparatus and method for testing semiconductor memory devices, in which the frequencies of test pattern signals can be selectively changed. The test apparatus includes a main tester, an input frequency converter, and an output frequency converter. The main tester generates first input test signals with a first frequency, a first program control signal, and a second program control signal, receives first output test pattern signals with the first frequency, and determines an operating performance of a semiconductor memory device. The input frequency converter converts the first input test pattern signals into second input test pattern signals with a second frequency in response to the first program control signal, and applies the second input test pattern signals to the semiconductor memory device. The output frequency converter converts the second output test pattern signals with the second frequency received from the semiconductor memory device into the first output test pattern signals in response to the second program control signal and outputs the first output test pattern signals. The test apparatus and method can test semiconductor memory devices with a high operating frequency by selectively changing the frequencies of test pattern signals.
摘要翻译：提供了一种用于测试半导体存储器件的装置和方法，其中可以选择性地改变测试图案信号的频率。测试装置包括主测试器，输入变频器和输出变频器。主测试仪产生具有第一频率，第一编程控制信号和第二编程控制信号的第一输入测试信号，接收具有第一频率的第一输出测试图形信号，并确定半导体存储器件的操作性能。输入频率转换器响应于第一编程控制信号将第一输入测试码信号转换成具有第二频率的第二输入测试码信号，并将第二输入测试码信号施加到半导体存储器件。输出频率转换器响应于第二编程控制信号，将从半导体存储器件接收到的第二频率的第二输出测试图形信号转换成第一输出测试图形信号并输出第一输出测试图形信号。测试装置和方法可以通过选择性地改变测试图形信号的频率来测试具有高工作频率的半导体存储器件。

3. 发明申请

US20070018637A1 Apparatus and method for testing circuit characteristics by using eye mask 有权
标题翻译：使用眼罩测试电路特性的装置和方法
公开(公告)号：US20070018637A1
公开(公告)日：2007-01-25
申请号：US11490984
申请日：2006-07-21
申请人： Woo-Seop Kim , Jun-Young Park , Sung-Je Hong , Sung-Bum Cho , Byung-Se So , Hyun-Chul Kang
发明人： Woo-Seop Kim , Jun-Young Park , Sung-Je Hong , Sung-Bum Cho , Byung-Se So , Hyun-Chul Kang
IPC分类号： G01R31/28
CPC分类号： G01R31/3171 , G11C29/02 , G11C29/022 , G11C29/50012 , G11C29/56
摘要： A test apparatus capable of detecting input/output (I/O) circuit characteristics of a semiconductor device by analyzing an eye mask generated in the test apparatus and the waveform of a test signal output from the I/O circuit of the semiconductor device. The test apparatus includes an eye mask generator that generates an eye mask in synchronization with one or more clock signals of opposite phase to each other, an error detector that receives the eye mask from the eye mask generator and compares the test signal with the eye mask to determine whether an error occurs in the semiconductor device, and an error signal output unit that receives an error detection signal from the error detector and generates an error signal in response to the error detection signal. In particular, the eye mask generator includes a sine wave generator that generates one or more sine waves of opposite phase to each other in synchronization with one or more clock signals, and a limiter circuit that receives the sine waves and generates the eye mask by adjusting the amplitudes of the sine waves.
摘要翻译：一种能够通过分析在测试装置中产生的眼罩和从半导体器件的I / O电路输出的测试信号的波形来检测半导体器件的输入/输出（I / O）电路特性的测试装置。所述测试装置包括与彼此相反相位的一个或多个时钟信号同步地生成眼罩的眼罩发生器，从眼罩发生器接收眼罩并将测试信号与眼罩相比较的误差检测器以确定半导体器件中是否发生错误;以及误差信号输出单元，其接收来自误差检测器的误差检测信号，并响应于误差检测信号产生误差信号。特别地，眼罩发生器包括正弦波发生器，其与一个或多个时钟信号同步地产生彼此相反相位的一个或多个正弦波，以及限制器电路，其接收正弦波并通过调整产生眼罩正弦波的幅度。

4. 发明授权

US06797109B2 Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates 失效
标题翻译：用于制造半导体器件的处理室，能够减少微粒污染
公开(公告)号：US06797109B2
公开(公告)日：2004-09-28
申请号：US10235976
申请日：2002-09-06
申请人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
发明人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
IPC分类号： H05H100
CPC分类号： H01J37/32431 , C23C16/4583 , C23C16/4585 , C23C16/54 , H01J37/32623 , H01J37/32642 , H01L21/32136 , H01L21/6831 , H01L21/68735 , Y10T117/10
摘要： A process chamber used in the manufacture of a semiconductor device for etching a material layer on a semiconductor wafer includes an electrostatic chuck for holding the semiconductor wafer, and an annular edge ring which surrounds the side of the semiconductor wafer on the electrostatic chuck to prevent the semiconductor wafer from departing from its original position. The annular edge ring has a first side which faces the side of the semiconductor wafer and contacts firmly with the side of the semiconductor wafer.
摘要翻译：用于制造用于蚀刻半导体晶片上的材料层的半导体器件的处理室包括用于保持半导体晶片的静电卡盘和围绕静电卡盘上的半导体晶片侧的环形边缘环，以防止半导体晶片从其原始位置脱离。环形边缘环具有面向半导体晶片的侧面并与半导体晶片的侧面牢固接触的第一侧。

5. 发明授权

US06464794B1 Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates 失效
标题翻译：用于制造半导体器件的处理室，能够减少微粒污染
公开(公告)号：US06464794B1
公开(公告)日：2002-10-15
申请号：US09404631
申请日：1999-09-23
申请人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
发明人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
IPC分类号： C23C1600
CPC分类号： H01J37/32431 , C23C16/4583 , C23C16/4585 , C23C16/54 , H01J37/32623 , H01J37/32642 , H01L21/32136 , H01L21/6831 , H01L21/68735 , Y10T117/10
摘要： A process chamber used in the manufacture of a semiconductor device for etching a material layer on a semiconductor wafer includes an electrostatic chuck for holding the semiconductor wafer, and an annular edge ring which surrounds the side of the semiconductor wafer on the electrostatic chuck to prevent the semiconductor wafer from departing from its original position. The annular edge ring has a first side which faces the side of the semiconductor wafer and contacts firmly with the side of the semiconductor wafer.
摘要翻译：用于制造用于蚀刻半导体晶片上的材料层的半导体器件的处理室包括用于保持半导体晶片的静电卡盘和围绕静电卡盘上的半导体晶片侧的环形边缘环，以防止半导体晶片从其原始位置脱离。环形边缘环具有面向半导体晶片的侧面并与半导体晶片的侧面牢固接触的第一侧。

6. 发明申请

US20060278341A1 Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates 审中-公开
公开(公告)号：US20060278341A1
公开(公告)日：2006-12-14
申请号：US11506833
申请日：2006-08-21
申请人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
发明人： Jeong-hyuck Park , Hee-duk Kim , Jung-hun Cho , Jong-wook Choi , Sung-bum Cho , Young-koo Lee , Jin-sung Kim , Jang-eun Lee , Ju-hyuck Chung , Sun-hoo Park , Jae-hyun Lee , Shin-woo Nam
IPC分类号： H01L21/306
CPC分类号： H01J37/32431 , C23C16/4583 , C23C16/4585 , C23C16/54 , H01J37/32623 , H01J37/32642 , H01L21/32136 , H01L21/6831 , H01L21/68735 , Y10T117/10
摘要： A process chamber used in the manufacture of a semiconductor device for etching a material layer on a semiconductor wafer includes an electrostatic chuck for holding the semiconductor wafer, and an annular edge ring which surrounds the side of the semiconductor wafer on the electrostatic chuck to prevent the semiconductor wafer from departing from its original position. The annular edge ring has a first side which faces the side of the semiconductor wafer and contacts firmly with the side of the semiconductor wafer.

7. 发明申请

US20050097410A1 Memory device and input signal control method of a memory device 失效
标题翻译：存储器件的存储器件和输入信号控制方法
公开(公告)号：US20050097410A1
公开(公告)日：2005-05-05
申请号：US10975006
申请日：2004-10-28
申请人： Sang-Gyu Lim , Sung-Bum Cho
发明人： Sang-Gyu Lim , Sung-Bum Cho
IPC分类号： G11C7/10 , G11C29/48 , G11C29/00
CPC分类号： G11C29/1201 , G11C29/48
摘要： A memory device and a method of controlling an input signal of the memory device. In the method of controlling an input signal according to test modes, it is determined whether the input signal is in a first test mode or a second test mode. If the memory device is in the first test mode, in response to a control signal, an input signal is received through input pins. In response to a mode signal, the input signal is separated into data and an address. The separated data and address is applied to the core of a memory device. If the memory device is in the second test mode, an input signal is received through input pins and inverting input pins. In response to a mode signal, an address is separated from the input signal received through the input pins and the data is separated from the input signal received through the inverting input pins. The separated data and address are applied to the core of a memory device.
摘要翻译：存储装置和控制存储装置的输入信号的方法。在根据测试模式控制输入信号的方法中，确定输入信号是处于第一测试模式还是第二测试模式。如果存储器件处于第一测试模式，则响应于控制信号，通过输入引脚接收输入信号。响应于模式信号，输入信号被分成数据和地址。分离的数据和地址被应用于存储器件的核心。如果存储器件处于第二测试模式，则通过输入引脚和反相输入引脚接收输入信号。响应于模式信号，地址与通过输入引脚接收的输入信号分离，数据与通过反相输入引脚接收的输入信号分离。分离的数据和地址被应用于存储器件的核心。

8. 发明申请

US20050050409A1 Apparatus and method for testing semiconductor memory devices, capable of selectively changing frequencies of test pattern signals 失效
标题翻译：用于测试半导体存储器件的装置和方法，能够选择性地改变测试图形信号的频率
公开(公告)号：US20050050409A1
公开(公告)日：2005-03-03
申请号：US10886074
申请日：2004-07-07
申请人： Sung-bum Cho
发明人： Sung-bum Cho
IPC分类号： G11C29/00 , G11C29/56
CPC分类号： G11C29/56004 , G11C29/56 , G11C29/56012
摘要： There are provided an apparatus and method for testing semiconductor memory devices, in which the frequencies of test pattern signals can be selectively changed. The test apparatus includes a main tester, an input frequency converter, and an output frequency converter. The main tester generates first input test signals with a first frequency, a first program control signal, and a second program control signal, receives first output test pattern signals with the first frequency, and determines an operating performance of a semiconductor memory device. The input frequency converter converts the first input test pattern signals into second input test pattern signals with a second frequency in response to the first program control signal, and applies the second input test pattern signals to the semiconductor memory device. The output frequency converter converts the second output test pattern signals with the second frequency received from the semiconductor memory device into the first output test pattern signals in response to the second program control signal and outputs the first output test pattern signals. The test apparatus and method can test semiconductor memory devices with a high operating frequency by selectively changing the frequencies of test pattern signals.
摘要翻译：提供了一种用于测试半导体存储器件的装置和方法，其中可以选择性地改变测试图案信号的频率。测试装置包括主测试器，输入变频器和输出变频器。主测试仪产生具有第一频率，第一编程控制信号和第二编程控制信号的第一输入测试信号，接收具有第一频率的第一输出测试模式信号，并确定半导体存储器件的操作性能。输入频率转换器响应于第一编程控制信号将第一输入测试码信号转换成具有第二频率的第二输入测试码信号，并将第二输入测试码信号施加到半导体存储器件。输出频率转换器响应于第二编程控制信号，将从半导体存储器件接收到的第二频率的第二输出测试图形信号转换成第一输出测试图形信号并输出第一输出测试图形信号。测试装置和方法可以通过选择性地改变测试图形信号的频率来测试具有高工作频率的半导体存储器件。

9. 发明授权

US06596087B2 Method of cleaning conditioning disk 失效
公开(公告)号：US06596087B2
公开(公告)日：2003-07-22
申请号：US09776733
申请日：2001-02-06
申请人： Sung-bum Cho , Baik-soon Choi , Jin-sung Kim , Kyue-sang Choi
发明人： Sung-bum Cho , Baik-soon Choi , Jin-sung Kim , Kyue-sang Choi
IPC分类号： G23G102
CPC分类号： B24B53/017 , B24B53/12 , B24D3/06 , B24D7/06 , B24D18/0072 , Y10S438/959
摘要： A conditioning disk and a conditioner for a chemical mechanical polishing (CMP) pad, and a method of fabricating, reworking, and cleaning the conditioning disk, are utilized to improve conditioning efficiency, and to reduce production expenses. The conditioning disk for a CMP pad is divided into regions defined by a size difference of abrasive grains formed on the body surface in each region of the conditioning disk. The method of fabricating the conditioning disk is performed by forming adhesive films for attaching the abrasive grains onto the body surface multiple times. In addition, a used conditioning disk may be reworked by detaching the abrasive grains from the body, and attaching new abrasive grains. A used conditioning disk can also be cleaned of by-products of the conditioning process by a cleaning method using a HF solution or BOE (buffered oxide etch) solution.

10. 发明授权

US5285664A Automatic washing machines 失效
标题翻译：自动洗衣机
公开(公告)号：US5285664A
公开(公告)日：1994-02-15
申请号：US15635
申请日：1993-02-09
申请人： Suk-Kyu Chang , Sung-Bum Cho , Yong-Bum Shim
发明人： Suk-Kyu Chang , Sung-Bum Cho , Yong-Bum Shim
IPC分类号： D06F39/08 , D06F39/10 , D06F38/09
CPC分类号： D06F39/083
摘要： An automatic washing machine having an improved structure. The sprinkling member for repeatedly sprinkling the washing water into the dehydrating tub comprises a removable washing tub lid, an adapter for permitting the washing water to be fed therethrough and a guide member forming, in cooperation with the washing tub lid, a sprinkling nozzle through which the washing water is sprinkled into the dehydrating tub. The lint filter filters off lints generated in the washing cycle and permits the filtered lints to be automatically removed therefrom so as to be drained off the washing machine along with the drained water. The circulation pump circulates the washing water and is connected to the washing tub and the sprinkling member in such a manner that it permits the washing water in the washing cycle to be drawn up to the sprinkling member through the lint filter and also permits the used washing water in the draining cycle to downwardly pass through the filter so as to be drained off the washing machine. This washing machine thus causes the detergent particles to be finely ground by the rotation of the pump impeller so as to be completely dissolved in the washing water and permits the lints generated in the washing to be filtered off and in turn automatically discharged therefrom.
摘要翻译：一种具有改进结构的自动洗衣机。用于将洗涤水重复地喷洒到脱水槽中的喷洒构件包括可移除的洗涤桶盖，用于允许洗涤水被供给的适配器，以及与洗涤桶盖一起形成的喷洒喷嘴，引导构件将洗涤水喷入脱水桶中。棉绒过滤器过滤掉在洗涤循环中产生的棉绒，并且允许自动从其中除去过滤的棉绒，以便与排出的水一起从洗衣机中排出。循环泵循环洗涤水，并且以这样的方式连接到洗涤桶和喷洒构件，使得洗涤循环中的洗涤水通过棉绒过滤器被吸引到喷洒构件，并且还允许使用洗涤排水循环中的水向下通过过滤器，以便从洗衣机中排出。因此，这种洗衣机通过泵叶轮的旋转使洗涤剂颗粒细磨，以便完全溶解在洗涤水中，并且允许洗涤中产生的棉绒被过滤掉，从而自动排出。

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