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    • 2. 发明授权
    • Exposure apparatus, exposure method, method of manufacturing device, program, and storage medium
    • 曝光装置,曝光方法,制造装置,程序和存储介质的方法
    • US09329496B2
    • 2016-05-03
    • US13552140
    • 2012-07-18
    • Shinji Sato
    • Shinji Sato
    • G03B27/32G03B27/52G03B27/58H02K41/02G03F7/20H01L21/68
    • G03F7/70716G03F7/70341H01L21/682
    • An exposure apparatus exposing a substrate with exposure light through liquid, including: an optical member having an emitting surface from which exposure light is emitted; a substrate holding apparatus that includes: a first holding portion holding a lower surface of substrate so that lower surface of substrate can be released, and a first member that defines an opening where substrate can be arranged, and that has an upper surface which is arranged at a vicinity of an upper surface of the substrate in a state which the substrate is held by the first holding portion; and a porous member of which at least a part is arranged at a gap between the substrate and the first member, and which has an upper surface liquid-repellent with respect to the liquid, wherein at least a part of the liquid which flows into the gap is recovered through the porous member.
    • 一种曝光装置,其中曝光光通过液体曝光,包括:具有发射曝光光的发射表面的光学构件; 一种基板保持装置,包括:第一保持部,其保持基板的下表面,使得可以释放基板的下表面;以及第一构件,其限定可以布置基板的开口,并且具有布置的上表面 在所述基板被所述第一保持部保持的状态下,在所述基板的上表面的附近; 以及多孔部件,其至少一部分配置在所述基板和所述第一部件之间的间隙处,并且具有相对于所述液体的上表面防水性,其中流入所述液体的至少一部分液体 间隙通过多孔构件回收。
    • 5. 发明授权
    • Non-volatile storage with temperature compensation based on neighbor state information
    • 基于邻居状态信息的具有温度补偿的非易失性存储
    • US09036438B2
    • 2015-05-19
    • US13486305
    • 2012-06-01
    • Gerrit Jan HeminkShinji Sato
    • Gerrit Jan HeminkShinji Sato
    • G11C7/04G11C11/56
    • G11C16/26G11C7/04G11C11/5642
    • Data is programmed into and read from a set of target memory cells. When reading the data, temperature compensation is provided. The temperature compensation is based on temperature information and the state of one or more neighbor memory cells. In one embodiment, when data is read from set of target memory cells, the system senses the current temperature and determines the differences in temperature between the current temperature and the temperature at the time the data was programmed. If the difference in temperature is greater than a threshold, then the process of reading the data includes providing temperature compensation based on temperature information and neighbor state information. In one alternative, the decision to provide the temperature compensation can be triggered by conditions other than a temperature differential.
    • 数据被编程到一组目标存储器单元中并从其读取。 读取数据时,提供温度补偿。 温度补偿基于温度信息和一个或多个相邻存储单元的状态。 在一个实施例中,当从目标存储器单元的集合读取数据时,系统感测当前温度并确定当前温度与数据编程时的温度之间的温度差。 如果温度差大于阈值,则读取数据的过程包括基于温度信息和邻近状态信息提供温度补偿。 在一个替代方案中,提供温度补偿的决定可以由温差以外的条件触发。
    • 6. 发明授权
    • Liquid immersion member
    • 液浸件
    • US08953143B2
    • 2015-02-10
    • US12765410
    • 2010-04-22
    • Shinji Sato
    • Shinji Sato
    • G03B27/52G03F7/20
    • G03F7/70341
    • A liquid immersion member is disposed around an optical member having an emergent surface from at least part of which exposure light is emitted and which holds a liquid between itself and an object opposing the emergent surface so that an optical path of exposure light between the emergent surface and the object is filled with a liquid to form an immersion space. The liquid immersion member comprises: an opening that recovers a liquid on the object with a gas; a space into which the liquid and the gas from the opening are entered; a recovery passageway into which only a liquid in the space is entered; an inner side surface that opposes at least part of a side surface of the optical member with a gap therebetween; and a recovery port that recovers at least part of a liquid in the gap.
    • 液浸部件设置在具有从出射表面的至少一部分的出射表面的光学部件的周围,其中,至少部分曝光光被发射并且在其自身与与出射表面相对的物体之间保持液体,使得在出射表面 并且物体充满液体以形成浸没空间。 液浸部件包括:用气体回收物体上的液体的开口; 从开口进入液体和气体的空间; 一个进入该空间的液体的回收通道; 与所述光学构件的侧面的至少一部分相对的内侧面,其间具有间隙; 以及恢复所述间隙中的液体的至少一部分的回收口。
    • 7. 发明授权
    • Liquid immersion member, immersion exposure apparatus, liquid recovering method, device fabricating method, program, and storage medium
    • 液浸部件,浸渍曝光装置,液体回收方法,装置制造方法,程序和存储介质
    • US08937703B2
    • 2015-01-20
    • US13180978
    • 2011-07-12
    • Shinji Sato
    • Shinji Sato
    • G03F7/20
    • G03F7/709G03F7/70341
    • A liquid immersion member is disposed inside an immersion exposure apparatus and at least partly around an optical member and around an optical path of exposure light that passes through a liquid between the optical member and an object. The liquid immersion member comprises: a first member, which has a first surface, a second surface that faces a direction other than that faced by the first surface, and a plurality of holes that connects the first surface and the second surface, that recovers at least some of the liquid from the space above the object opposing the first surface via the holes; a recovery passageway, wherethrough the liquid recovered via the holes of the first member flows; and a discharge part, which separately discharges a liquid and a gas from the recovery passageway. The first member comprises a first portion and a second portion. The second portion hinders a gas flowing from a space between the object and the first surface into the recovery passageway via the holes more than the first portion does.
    • 浸液构件设置在浸没曝光装置的内部,并且至少部分地围绕光学构件并围绕通过光学构件和物体之间的液体的曝光光的光路。 液浸构件包括:第一构件,其具有第一表面,面向除了由第一表面面对的方向的第二表面;以及多个孔,其连接第一表面和第二表面,其在 通过所述孔从所述物体上方的与所述第一表面相对的空间中的至少一些液体; 回收通道,通过第一构件的孔回收的液体流过; 以及排出部,其从回收通路分别排出液体和气体。 第一构件包括第一部分和第二部分。 第二部分阻止气体从物体和第一表面之间的空间经由多于第一部分的孔流入回收通道。