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1. 发明公开

EP0176295A3 Eliminating unwanted material from a gas flow line 失效
标题翻译：从气体流动管线中消除未经处理的材料，从气体流动管线中消除未经处理的材料
公开(公告)号：EP0176295A3
公开(公告)日：1988-01-07
申请号：EP85306540
申请日：1985-09-16
申请人： Mundt, Randall
发明人： Mundt, Randall
IPC分类号： B01D53/00 , B01D53/34 , B01J19/08 , F04F09/06
CPC分类号： H01J37/32844 , B01D53/00 , H01J37/3244 , Y02C20/30 , Y10S423/08 , Y10S423/10
摘要： An apparatus and method for eliminating unwanted materials, such as corrosive gases, from an effluent gas flow line includes a reactive trap wherein chemical reaction between the unwanted materials, a reactant gas and a reactive element takes place under induced plasma conditions. A ballast gas may be added to adjust operating pressures and to aid in creating the plasma. The reactant gas and the reactive element are selected so that relative harmless by-products are produced. The reactive element is preferably maintained at a temperature of approximately 400°C and the chemical by-products are passed through a condensation element in the reactive trap which element is maintained at approximately 30 C. Preferably, the plasma is induced by a microwave transmitter in conjunction with a waveguide inserted into a reactive trap, and a control system automatically monitors and adjusts the temperature and pressure of the reaction as well as controls the ratio of effluent gas and ballast gas.
摘要翻译：用于从流出气体流动管线消除不需要的材料（例如腐蚀性气体）的装置和方法包括反应性阱，其中不需要的材料，反应气体和反应性元素之间的化学反应在诱导的等离子体条件下进行。可以加入压载气体以调节操作压力并有助于产生等离子体。选择反应气体和反应性元件，以产生相对无害的副产物。反应元件优选保持在约400℃的温度，化学副产物通过反应性阱中的缩合元件，该元素保持在约30℃。优选地，等离子体由微波发射器与插入到反应阱中的波导相结合，并且控制系统自动监测和调节反应的温度和压力，并且控制流出气体和压载气体的比例。

2. 发明公开

EP0176295A2 Eliminating unwanted material from a gas flow line 失效
标题翻译： Entfernung vonungewünschtem材料aus einer Gasleitung。
公开(公告)号：EP0176295A2
公开(公告)日：1986-04-02
申请号：EP85306540.7
申请日：1985-09-16
申请人： Mundt, Randall
发明人： Mundt, Randall
IPC分类号： B01D53/00 , B01D53/34 , B01J19/08 , F04F9/06
CPC分类号： H01J37/32844 , B01D53/00 , H01J37/3244 , Y02C20/30 , Y10S423/08 , Y10S423/10
摘要： An apparatus and method for eliminating unwanted materials, such as corrosive gases, from an effluent gas flow line includes a reactive trap wherein chemical reaction between the unwanted materials, a reactant gas and a reactive element takes place under induced plasma conditions. A ballast gas may be added to adjust operating pressures and to aid in creating the plasma. The reactant gas and the reactive element are selected so that relative harmless by-products are produced. The reactive element is preferably maintained at a temperature of approximately 400°C and the chemical by-products are passed through a condensation element in the reactive trap which element is maintained at approximately 30 C. Preferably, the plasma is induced by a microwave transmitter in conjunction with a waveguide inserted into a reactive trap, and a control system automatically monitors and adjusts the temperature and pressure of the reaction as well as controls the ratio of effluent gas and ballast gas.
摘要翻译：用于从流出气体流动管线消除不需要的材料（例如腐蚀性气体）的装置和方法包括反应性阱，其中不需要的材料，反应气体和反应性元素之间的化学反应在诱导的等离子体条件下进行。可以加入压载气体以调节操作压力并有助于产生等离子体。选择反应气体和反应性元件，以产生相对无害的副产物。反应元件优选保持在约400℃的温度，化学副产物通过反应性阱中的缩合元件，该元素保持在约30℃。优选地，等离子体由微波发射器与插入到反应阱中的波导相结合，并且控制系统自动监测和调节反应的温度和压力，并且控制流出气体和压载气体的比例。

3. 发明申请

WO0217030B1 METHODS AND APPARATUS FOR OBTAINING DATA FOR PROCESS OPERATION, OPTIMIZATION, MONITORING, AND CONTROL 审中-公开
标题翻译：用于获取过程操作，优化，监控和控制的数据的方法和设备
公开(公告)号：WO0217030B1
公开(公告)日：2003-03-27
申请号：PCT/US0126315
申请日：2001-08-22
申请人： ONWAFER TECHNOLOGIES INC , FREED MASON L , MUNDT RANDALL S , SPANOS COSTAS J
发明人： FREED MASON L , MUNDT RANDALL S , SPANOS COSTAS J
IPC分类号： H01L21/3065 , G05B19/418 , G05B23/02
CPC分类号： G05B19/41865 , G05B2219/32019 , G05B2219/45031 , Y02P90/02 , Y02P90/20
摘要： Data are collected for deriving response models and information required for developing and maintaining processes and process tools. Methods and apparatus for collecting the data include a sensor apparatus (100) capable of collecting data with less perturbation and fewer disruptions than is usually possible using standard methods. The sensor apparatus is capable of being loaded into a process tool. From within the process tool, one embodiment of the sensor apparatus is capable of measuring data, processing data, storing data, and transmitting data. The sensor apparatus has capabilities for near real time data collection and communication.
摘要翻译：收集数据以得出响应模型和开发和维护过程和过程工具所需的信息。用于收集数据的方法和装置包括能够采用标准方法通常可能采集的扰动少且中断少的传感器装置（100）。传感器装置能够被加载到处理工具中。从处理工具中，传感器装置的一个实施例能够测量数据，处理数据，存储数据和发送数据。传感器装置具有接近实时数据收集和通信的能力。

4. 发明申请

WO0217030A3 METHODS AND APPARATUS FOR OBTAINING DATA FOR PROCESS OPERATION, OPTIMIZATION, MONITORING, AND CONTROL 审中-公开
标题翻译：获取过程操作，优化，监测和控制数据的方法和设备
公开(公告)号：WO0217030A3
公开(公告)日：2003-01-09
申请号：PCT/US0126315
申请日：2001-08-22
申请人： ONWAFER TECHNOLOGIES INC , FREED MASON L , MUNDT RANDALL S , SPANOS COSTAS J
发明人： FREED MASON L , MUNDT RANDALL S , SPANOS COSTAS J
IPC分类号： H01L21/3065 , G05B19/418 , G05B23/02
CPC分类号： G05B19/41865 , G05B2219/32019 , G05B2219/45031 , Y02P90/02 , Y02P90/20
摘要： Data are collected for deriving response models and information required for developing and maintaining processes and process tools. Methods and apparatus for collecting the data include a sensor apparatus (100) capable of collecting data with less perturbation and fewer disruptions than is usually possible using standard methods. The sensor apparatus is capable of being loaded into a process tool. From within the process tool, one embodiment of the sensor apparatus is capable of measuring data, processing data, storing data, and transmitting data. The sensor apparatus has capabilities for near real time data collection and communication.
摘要翻译：收集数据用于推导开发和维护过程和过程工具所需的响应模型和信息。用于收集数据的方法和设备包括传感器设备（100），其能够以比通常使用标准方法可能的更少的扰动和更少的中断收集数据。传感器装置能够被装载到处理工具中。从处理工具内部，传感器设备的一个实施例能够测量数据，处理数据，存储数据和传输数据。传感器设备具有近实时数据收集和通信的能力。

5. 发明申请

WO2002077628A1 DATA COLLECTION METHODS AND APPARATUS 审中-公开
标题翻译：数据采集方法和装置
公开(公告)号：WO2002077628A1
公开(公告)日：2002-10-03
申请号：PCT/US2002/011154
申请日：2002-03-21
申请人： ONWAFER TECHNOLOGIES, INC. , MUNDT, Randall, S.
发明人： MUNDT, Randall, S.
IPC分类号： G01N27/00
CPC分类号： H01L21/67253
摘要： Information transfer is effected using a network of electrical signal conductors (25) and sensors (30) forming crosspoint connections. The sensors are capable of representing a measurement parameter as an electrical impedance. One embodiment of the present invention includes output electrical conductors, input electrical conductors, and sensors. Each of the sensors is connected with one of the output electrical conductors and one of the input electrical conductors so as to form an array of crosspoint connections. Application of electrical signals to the sensors and measurement of electrical signals from the sensors provide sufficient information to derive relative information from each sensor using algorithms based on equations for combining impedance. The embodiment may further include one or more reference elements connected with the output electrical conductors and with the input electrical conductors so as to form crosspoint connections. The reference elements have predetermined impedances and may be used to determine the impedance values for particular sensors.
摘要翻译：使用形成交叉点连接的电信号导体（25）和传感器（30）的网络实现信息传送。传感器能够将测量参数表示为电阻抗。本发明的一个实施例包括输出电导体，输入电导体和传感器。每个传感器与输出电导体中的一个和输入电导体中的一个连接，以形成交叉点连接的阵列。将电信号应用于传感器，并从传感器测量电信号提供足够的信息，从而使用基于组合阻抗的方程的算法从每个传感器得出相关信息。该实施例还可以包括与输出电导体和输入电导体连接以形成交叉点连接的一个或多个参考元件。参考元件具有预定的阻抗，并且可以用于确定特定传感器的阻抗值。

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