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    • 3. 发明公开
    • Eliminating unwanted material from a gas flow line
    • Entfernung vonungewünschtem材料aus einer Gasleitung。
    • EP0176295A2
    • 1986-04-02
    • EP85306540.7
    • 1985-09-16
    • Mundt, Randall
    • Mundt, Randall
    • B01D53/00B01D53/34B01J19/08F04F9/06
    • H01J37/32844B01D53/00H01J37/3244Y02C20/30Y10S423/08Y10S423/10
    • An apparatus and method for eliminating unwanted materials, such as corrosive gases, from an effluent gas flow line includes a reactive trap wherein chemical reaction between the unwanted materials, a reactant gas and a reactive element takes place under induced plasma conditions. A ballast gas may be added to adjust operating pressures and to aid in creating the plasma. The reactant gas and the reactive element are selected so that relative harmless by-products are produced. The reactive element is preferably maintained at a temperature of approximately 400°C and the chemical by-products are passed through a condensation element in the reactive trap which element is maintained at approximately 30 C. Preferably, the plasma is induced by a microwave transmitter in conjunction with a waveguide inserted into a reactive trap, and a control system automatically monitors and adjusts the temperature and pressure of the reaction as well as controls the ratio of effluent gas and ballast gas.
    • 用于从流出气体流动管线消除不需要的材料(例如腐蚀性气体)的装置和方法包括反应性阱,其中不需要的材料,反应气体和反应性元素之间的化学反应在诱导的等离子体条件下进行。 可以加入压载气体以调节操作压力并有助于产生等离子体。 选择反应气体和反应性元件,以产生相对无害的副产物。 反应元件优选保持在约400℃的温度,化学副产物通过反应性阱中的缩合元件,该元素保持在约30℃。优选地,等离子体由微波 发射器与插入到反应阱中的波导相结合,并且控制系统自动监测和调节反应的温度和压力,并且控制流出气体和压载气体的比例。
    • 5. 发明授权
    • Diffusion pumps
    • 扩散泵
    • US5700134A
    • 1997-12-23
    • US609805
    • 1996-03-01
    • Graeme Huntley
    • Graeme Huntley
    • F04F9/00F04F9/06
    • F04F9/06
    • A diffusion pump is provided with an outer body and a chimney positioned within the outer body. A top cap is positioned about the top of the chimney to form an annular passageway (or an annular array of passageways) therebetween. A guard ring is positioned generally above the top cap. Coolers cool the outer body and the guard ring and working fluid present in the base of the outer body is heated to cause evaporated oil to pass up the chimney. A baffle, substantially thermally isolated from the guard ring, is contained within the outer body.
    • 扩散泵设置有外体和位于外体内的烟囱。 顶盖围绕烟囱的顶部定位,以在它们之间形成环形通道(或通道的环形阵列)。 保护环通常位于顶盖上方。 冷却器冷却外部本体,并且保护环和存在于外部本体的基部中的工作流体被加热以使蒸发的油通过烟囱。 与保护环基本上热隔离的挡板被包含在外体内。
    • 6. 发明授权
    • High vacuum pumping systems
    • 高真空泵送系统
    • US3876337A
    • 1975-04-08
    • US34141973
    • 1973-03-15
    • VARIAN ASSOCIATES
    • LANDFORS ARTHUR A
    • F04F9/06F04F9/00F16L23/00
    • F04F9/06
    • A trap assembly in a high vacuum system for intercepting back streaming liquid or suspended liquid molecules from a diffusion pump to prevent contamination of the working high vacuum chamber is disclosed. The trap assembly includes a tubular member defining a passageway between the hollow inlet means of the chamber and the inlet orifice of the pump, and a restriction means across the passageway. The tubular member includes an envelope wall physically forming the passageway in the region of the restriction means, and fastener means extending within said passageway inside the confines of said wall to interconnect said wall with said pump and with said hollow inlet means of said chamber to gain maximum internal area for a given overall outer dimensional extent of the tubular member. The fastener means includes mating flanges and a plurality of bolts around the flanges. The bolts may be sealed by sleeves that also bear at least a portion of the tightening load of the bolts and thereby assist the envelope wall in this function. The restriction means in the passageway includes a plate positioned at an angle to allow draining action of condensed liquid, and a cooling tube is effective to cool the plate and the sleeves to increase condensation. The sleeves are cylindrical and only slightly larger than the bolts to provide minimum volume displacement. The radius of the passageway has been increasaed by approximately 50 percent over prior art devices, with a consequent cross-sectional area increase in the full region of the passageway of substantially 100 percent. The retained speed of the pump is increased over the prior art capability by approximately 50 percent.
    • 10. 发明公开
    • Improvements in diffusion pumps
    • Diffusionspumpe
    • EP0730096A1
    • 1996-09-04
    • EP96301396.6
    • 1996-02-29
    • The BOC Group plc
    • Huntley, Graeme
    • F04F9/06
    • F04F9/06
    • A diffusion pump comprising

      an outer body
      means to cool the outer body
      chimney means positioned within the outer body
      a top cap positioned about the top of the chimney means to form an annular passageway (or an annular array of passageways) therebetween
      a guard ring positioned generally above the top cap
      means to cool the guard ring
      heater means to heat working fluid present in the base of the outer body and cause, in use, evaporated oil to pass up the chimney

      wherein the pump also comprises baffle means which are thermally substantially isolated from the guard ring and which are contained substantially wholly within the outer body.
    • 一种扩散泵,包括一个外部本体装置,用于冷却位于外部本体内部的外部主体烟囱装置,该顶部盖围绕烟囱装置的顶部定位,以形成环形通道(或通道的环形阵列) 在顶盖上方意味着冷却保护环加热器装置以加热存在于外部本体的基部中的工作流体,并且在使用中导致蒸发的油向上通过烟囱,其中泵还包括挡板装置,该挡板装置基本上与 保护环,其基本上完全包含在外部主体内。