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1. 发明申请

US20120105173A1 MEMS Device 审中-公开
标题翻译： MEMS器件
公开(公告)号：US20120105173A1
公开(公告)日：2012-05-03
申请号：US13349197
申请日：2012-01-12
申请人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
发明人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
IPC分类号： H03H9/125 , H03H9/02
CPC分类号： H03H9/2431 , H03H9/02409 , H03H9/02417 , H03H9/2463 , H03J2200/19
摘要： System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
摘要翻译：公开了一种用于微机电系统（MEMS）的系统和方法。优选实施例包括第一锚定区域，固定到第一锚定区域的振动MEMS结构，与振动MEMS结构相邻的第一电极，与振动MEMS结构相邻的第二电极，其中振动MEMS结构布置在第一和第二电极。

2. 发明授权

US07889030B2 Passive temperature compensation of silicon MEMS devices 有权
标题翻译：硅MEMS器件的被动温度补偿
公开(公告)号：US07889030B2
公开(公告)日：2011-02-15
申请号：US12187443
申请日：2008-08-07
申请人： Florian Schoen , Robert Gruenberger , Mohsin Nawaz , Bernhard Winkler
发明人： Florian Schoen , Robert Gruenberger , Mohsin Nawaz , Bernhard Winkler
IPC分类号： H03H9/24 , H01L29/84 , H01L21/00
CPC分类号： B81B3/007 , B81B3/0081 , B81B2201/0271 , B81B2203/0118 , H01L2924/0002 , H03H3/0076 , H03H9/2431 , H03H9/2452 , H03H9/2457 , H03H9/2463 , H01L2924/00
摘要： The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element comprising a semiconducting material, and at least one trench formed in the resonator element and filled with a material comprising oxide. Further embodiments comprise additional devices, systems and methods.
摘要翻译：本发明涉及MEMS装置。在一个实施例中，微机电系统（MEMS）装置包括包括半导体材料的谐振元件和形成在谐振器元件中并填充有包含氧化物的材料的至少一个沟槽。另外的实施例包括附加的装置，系统和方法。

3. 发明申请

US20100301967A1 MEMS Device 有权
标题翻译： MEMS器件
公开(公告)号：US20100301967A1
公开(公告)日：2010-12-02
申请号：US12474368
申请日：2009-05-29
申请人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
发明人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
IPC分类号： H03H9/24
CPC分类号： H03H9/2431 , H03H9/02409 , H03H9/02417 , H03H9/2463 , H03J2200/19
摘要： System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
摘要翻译：公开了一种用于微机电系统（MEMS）的系统和方法。优选实施例包括第一锚定区域，固定到第一锚定区域的振动MEMS结构，与振动MEMS结构相邻的第一电极，与振动MEMS结构相邻的第二电极，其中振动MEMS结构布置在第一和第二电极。

4. 发明申请

US20120013412A1 MEMS RESONATOR DEVICES 有权
标题翻译： MEMS谐振器器件
公开(公告)号：US20120013412A1
公开(公告)日：2012-01-19
申请号：US13241638
申请日：2011-09-23
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03B5/30
CPC分类号： H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要： Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
摘要翻译：实施例涉及微机电系统（MEMS）装置，系统和方法。在一个实施例中，MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。

5. 发明授权

US08004372B2 MEMS resonator devices with a plurality of mass elements formed thereon 有权
公开(公告)号：US08004372B2
公开(公告)日：2011-08-23
申请号：US12354029
申请日：2009-01-15
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03H9/24 , H03H9/125
摘要： The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.

6. 发明授权

US09083308B2 MEMS device 有权
标题翻译： MEMS器件
公开(公告)号：US09083308B2
公开(公告)日：2015-07-14
申请号：US13349197
申请日：2012-01-12
申请人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
发明人： Florian Schoen , Mohsin Nawaz , Mihail Sararoiu
IPC分类号： H03H9/24 , H03H9/46 , H03H9/02
CPC分类号： H03H9/2431 , H03H9/02409 , H03H9/02417 , H03H9/2463 , H03J2200/19
摘要： System and method for a microelectromechanical system (MEMS) is disclosed. A preferred embodiment comprises a first anchor region, a vibrating MEMS structure fixed to the first anchor region, a first electrode adjacent the vibrating MEMS structure, a second electrode adjacent the vibrating MEMS structure wherein the vibrating MEMS structure is arranged between the first and the second electrode.
摘要翻译：公开了一种用于微机电系统（MEMS）的系统和方法。优选实施例包括第一锚定区域，固定到第一锚定区域的振动MEMS结构，与振动MEMS结构相邻的第一电极，与振动MEMS结构相邻的第二电极，其中振动MEMS结构布置在第一和第二电极。

7. 发明授权

US08476990B2 MEMS resonator devices 有权
标题翻译： MEMS谐振器装置
公开(公告)号：US08476990B2
公开(公告)日：2013-07-02
申请号：US13241638
申请日：2011-09-23
申请人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
发明人： Bernhard Winkler , Mohsin Nawaz , Florian Schoen
IPC分类号： H03H9/24 , H03H9/125
CPC分类号： H03H9/02244 , G04C3/12 , G04F5/063 , H03B5/30 , H03H3/0072 , H03H9/02433 , H03H9/02448 , H03H9/2431
摘要： Embodiments are related to micro-electromechanical system (MEMS) devices, systems and methods. In one embodiment, a MEMS resonating device comprises a resonator element configured to provide timing; and at least one passive temperature compensation structure arranged on the resonator element.
摘要翻译：实施例涉及微机电系统（MEMS）装置，系统和方法。在一个实施例中，MEMS谐振装置包括被配置为提供定时的谐振元件; 以及布置在谐振器元件上的至少一个被动温度补偿结构。

8. 发明授权

US08461655B2 Micromechanical sound transducer having a membrane support with tapered surface 有权
标题翻译：具有带锥形表面的膜支架的微机械声换能器
公开(公告)号：US08461655B2
公开(公告)日：2013-06-11
申请号：US13077642
申请日：2011-03-31
申请人： Wolfgang Klein , Uwe Seidel , Stefan Barzen , Mohsin Nawaz , Wolfgang Friza , Xu Cheng , Alfons Dehe
发明人： Wolfgang Klein , Uwe Seidel , Stefan Barzen , Mohsin Nawaz , Wolfgang Friza , Xu Cheng , Alfons Dehe
IPC分类号： H01L29/84 , G02B26/00 , B01D1/22
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81B2203/0384 , B81C1/00103
摘要： A method for manufacturing a micromechanical sound transducer includes depositing successive layers of first and second membrane support material on a first main surface of a substrate arrangement with a first etching rate and a lower second etching rate, respectively. A layer of membrane material is then deposited. A cavity is created in the substrate arrangement from a side of the substrate arrangement opposite to the membrane support materials and the membrane material at least until the cavity extends to the layer of first membrane support material. The layers of first and second membrane support material are etched by applying an etching agent through the cavity in at least one first region located in an extension of the cavity also in a second region surrounding the first region. The etching creates a tapered surface on the layer of second membrane support material in the second region. The etching continues at least until the layer of second membrane support material has been removed in the first region to expose the layer of membrane material.
摘要翻译：微机械声换能器的制造方法包括分别在第一蚀刻速率和较低的第二蚀刻速率的基板装置的第一主表面上沉积连续的第一和第二膜支撑材料层。然后沉积一层膜材料。在衬底布置中从衬底装置的一侧与膜支撑材料和膜材料形成空腔，至少直到空腔延伸到第一膜支撑材料层。第一和第二膜支撑材料的层通过在位于腔的延伸部中的至少一个第一区域中，在围绕第一区域的第二区域中施加蚀刻剂而通过空腔施加蚀刻剂。蚀刻在第二区域中在第二膜支撑材料层上产生锥形表面。蚀刻继续至少直到第二膜支撑材料层在第一区域中被去除以暴露膜材料层。

9. 发明申请

US20130089224A1 ELECTROSTATIC LOUDSPEAKER WITH MEMBRANE PERFORMING OUT-OF-PLANE DISPLACEMENT 有权
标题翻译：具有执行平面外平面位移的膜的静电扬声器
公开(公告)号：US20130089224A1
公开(公告)日：2013-04-11
申请号：US13270613
申请日：2011-10-11
申请人： Alfons Dehe , Mohsin Nawaz , Christoph Glacer
发明人： Alfons Dehe , Mohsin Nawaz , Christoph Glacer
IPC分类号： H04R19/02 , H04R31/00
CPC分类号： H04R19/02 , H04R7/04 , H04R19/013 , H04R2201/003 , Y10T29/49005
摘要： An electrostatic loudspeaker comprises a membrane structure and an electrode structure. The membrane structure comprises a central membrane portion and a circumferential membrane portion. The electrode structure is configured to electrostatically interact with the membrane structure for causing a movement of the membrane structure along an axis of movement. The electrode structure comprises a circumferential electrode portion and an opening, the circumferential electrode portion being substantially aligned to the circumferential membrane portion and the opening being substantially aligned to the central membrane portion with respect to a direction parallel to the axis of movement. In an end position of the movement of the membrane structure, the central membrane portion is configured to extend at least partially through the opening. A method for operating an electrostatic loudspeaker and a method for manufacturing an electrostatic loudspeaker are also described.
摘要翻译：静电扬声器包括膜结构和电极结构。膜结构包括中央膜部分和周向膜部分。电极结构被配置为与膜结构静电相互作用以引起膜结构沿着运动轴线的移动。电极结构包括周向电极部分和开口，周向电极部分基本上对齐于周向膜部分，并且开口基本上与中心膜部分相对于平行于运动轴线的方向对准。在膜结构的运动的结束位置中，中心膜部分构造成至少部分延伸穿过开口。还描述了用于操作静电扬声器的方法和用于制造静电扬声器的方法。

10. 发明申请

US20120248554A1 Micromechanical Sound Transducer Having a Membrane Support with Tapered Surface 有权
标题翻译：具有锥形表面的膜支撑的微机械声音传感器
公开(公告)号：US20120248554A1
公开(公告)日：2012-10-04
申请号：US13077642
申请日：2011-03-31
申请人： Wolfgang Klein , Uwe Seidel , Stefan Barzen , Mohsin Nawaz , Wolfgang Friza , Xu Cheng , Alfons Dehe
发明人： Wolfgang Klein , Uwe Seidel , Stefan Barzen , Mohsin Nawaz , Wolfgang Friza , Xu Cheng , Alfons Dehe
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81B2203/0384 , B81C1/00103
摘要： A method for manufacturing a micromechanical sound transducer includes depositing successive layers of first and second membrane support material on a first main surface of a substrate arrangement with a first etching rate and a lower second etching rate, respectively. A layer of membrane material is then deposited. A cavity is created in the substrate arrangement from a side of the substrate arrangement opposite to the membrane support materials and the membrane material at least until the cavity extends to the layer of first membrane support material. The layers of first and second membrane support material are etched by applying an etching agent through the cavity in at least one first region located in an extension of the cavity also in a second region surrounding the first region. The etching creates a tapered surface on the layer of second membrane support material in the second region. The etching continues at least until the layer of second membrane support material has been removed in the first region to expose the layer of membrane material.
摘要翻译：微机械声换能器的制造方法包括分别以第一蚀刻速率和较低的第二蚀刻速率在衬底布置的第一主表面上沉积连续的第一和第二膜支撑材料层。然后沉积一层膜材料。在衬底布置中从衬底装置的一侧与膜支撑材料和膜材料形成空腔，至少直到空腔延伸到第一膜支撑材料层。第一和第二膜支撑材料的层通过在位于腔的延伸部中的至少一个第一区域中，在围绕第一区域的第二区域中施加蚀刻剂而通过空腔施加蚀刻剂。蚀刻在第二区域中在第二膜支撑材料层上产生锥形表面。蚀刻继续至少直到第二膜支撑材料层在第一区域中被去除以暴露膜材料层。

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