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    • 6. 发明申请
    • Enhanced separation process for (76Br, 77Br and 124I) preparation and recovery of each
    • (76Br,77Br和124I)的分离过程加强了每个的准备和回收
    • US20050201505A1
    • 2005-09-15
    • US10913950
    • 2004-08-07
    • Michael WelchLucie TangDouglas Rowland
    • Michael WelchLucie TangDouglas Rowland
    • B01D20060101G21G1/06
    • H05H6/00G21G1/10
    • An automated process for preparing and recovering 76Br, 77Br and 124I comprises (I) bombarding enriched 76 or 77Se or enriched 124Te with a beam of protons on a targeted disk respectively to produce 76Br, 77Br and 124I respectively wherein the target is selected from (a) a round tungsten disk with a depression at its center and (b) an inclined target having about a 20° inclination with respect to the beam direction and (II) recovering the 76Br, 77Br and 124I in an automated process comprising by placing the irradiated target face up in a quartz tube in the center of a high temperature furnace utilizing a target holder and heating the irradiated target sufficient to release and recover 76Br, 77Br and 124I therefrom.
    • 用于制备和回收76 Br,76 Br和124的自动化方法包括(I)轰击富集的76或77 / 在目标盘上分别具有一束质子束的SUP> Se或富集的124 Te,以产生76 Br Br,以及< 其目标选自(a)在其中心具有凹陷的圆形钨盘,(b)相对于光束方向具有大约20度倾斜的倾斜目标,(II)回收 在自动化过程中包括通过将照射的目标物体朝上放置在石英管的中心位置的自动化过程中,将76 Br,77 Br和124 I 高温炉利用目标保持器并加热照射的靶足以释放并从其中回收和/或从其中回收和/或从其中回收。
    • 8. 发明授权
    • Clock skew measurement circuit on a microprocessor die
    • 微处理器芯片上的时钟偏移测量电路
    • US06671652B2
    • 2003-12-30
    • US10036889
    • 2001-12-26
    • Richard B. Watson, Jr.Sean Michael WelchOscar MendozaDavid F. Bertucci
    • Richard B. Watson, Jr.Sean Michael WelchOscar MendozaDavid F. Bertucci
    • G04F100
    • H03K5/19G01R31/31725G06F1/10H03K5/1534
    • A structure and related method for determining the uncertainty window associated with clock signals on a microprocessor using circuitry on the microprocessor die itself and external software. A target clock signal of interest is compared to a series of reference clock signals having the same frequency, but differing in phase relationship. Where the target clock signal makes state transitions with respect to the various reference clock signals over the course of several thousand comparisons is indicative of the uncertainty window for that target clock. By adjusting the phase relationship between the reference clock signals, and thereby adjusting the width of the time windows defined by corresponding features of the reference clock signals, the uncertainty window for the target clock signal may be iteratively determined.
    • 一种结构和相关方法,用于确定与使用微处理器上的电路的微处理器上的时钟信号相关联的不确定性窗口本身和外部软件。 感兴趣的目标时钟信号与具有相同频率但相位关系不同的一系列参考时钟信号进行比较。 在几千次比较的过程中,目标时钟信号相对于各种参考时钟信号进行状态转换的指示该目标时钟的不确定性窗口。 通过调整参考时钟信号之间的相位关系,从而调整由参考时钟信号的相应特征定义的时间窗口的宽度,可以迭代地确定目标时钟信号的不确定性窗口。
    • 9. 发明授权
    • Dual independent robot blades with minimal offset
    • 双独立机器人刀片,最小偏移
    • US06267549B1
    • 2001-07-31
    • US09088965
    • 1998-06-02
    • William BrownMichael Welch
    • William BrownMichael Welch
    • B25J1804
    • B25J9/107H01L21/67742
    • A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are supported and positioned at the outer ends (78) of the upper and lower blades (18, 26). The upper robot blade (18) keeps an upper wafer (28) at a level just above the level at which the lower robot blade (26) keeps a lower wafer (32). Because the wafers are virtually at the same level, the same wafer lift mechanism can be used in the wafer chamber to lift and remove or replace the wafers on the two blades. By offsetting the height of the wafers by minimal amounts, the throughput of the system can be increased by up to a factor of two over a single robot blade system, particularly if the robot is the limiting factor on throughput. This throughput enhancement represents a substantial gain with a relatively simple and inexpensive addition to the equipment.
    • 晶片处理机器人系统(10)在晶片室(40)中操作并且包括两个独立的机器人刀片,上部刀片(18),其覆盖下部刀片(26)。 一对晶片(28,32)被支撑并定位在上和下叶片(18,26)的外端(78)处。 上部机器人刀片(18)将上部晶片(28)保持在刚好在下部机器人刀片(26)保持下部晶片(32)的水平面上方的水平面上。 因为晶片实际上处于相同的水平,所以可以在晶片室中使用相同的晶片提升机构来提升和移除或更换两个叶片上的晶片。 通过将晶片的高度最小化,通过单个机器人刀片系统可以将系统的吞吐量提高高达2倍,特别是如果机器人是吞吐量的限制因素。 这种吞吐量增加代表了相当大的增益,相对简单和便宜的设备添加。
    • 10. 发明授权
    • High selectivity etch using an external plasma discharge
    • US6074514A
    • 2000-06-13
    • US20959
    • 1998-02-09
    • Claes BjorkmanHongching ShanMichael Welch
    • Claes BjorkmanHongching ShanMichael Welch
    • H05H1/46H01J37/32H01L21/302H01L21/3065C23F1/02
    • H01J37/32871
    • An apparatus and method for scavenging etchant species from a plasma formed of etchant gas prior to the etchant gas entering a primary processing chamber of a plasma reactor. There is at least one scavenging chamber, each of which is connected at an inlet thereof to an etchant gas source and at an outlet thereof to a gas distribution device of the primary processing chamber. Each scavenging chamber has a radiation applicator that irradiates the interior of the scavenging chamber and creates a plasma therein from etchant gas flowing through the chamber from the etchant gas source to the gas distribution apparatus of the primary processing chamber. The applicator uses either an inductive discharge, capacitive discharge, direct current (DC) discharge or microwave discharge to irradiate the interior of the scavenging chamber and ignite the plasma. An etchant species scavenging source is also disposed within the scavenging chamber. This source provides scavenging material that interacts with the plasma to scavenge etchant species created by the dissociation of the etchant gas in the plasma and form etch by-products comprised of substances from both the etchant species and the scavenging source. The scavenging chambers can be employed, as is or in a modified form, as excitation chambers to excite gases at optimal conditions and feed the modified gases into the primary chamber. The scavenging chamber is modified by removing its scavenging source if this source would adversely interact with the gas being excited.