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    • 4. 发明申请
    • BIPOLAR TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
    • 双极晶体管及其制造方法
    • WO2006008689A1
    • 2006-01-26
    • PCT/IB2005/052260
    • 2005-07-07
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.MONTREE, Andreas, H.SLOTBOOM, Jan, W.AGARWAL, PrabhatMEUNIER-BEILLARD, Philippe
    • MONTREE, Andreas, H.SLOTBOOM, Jan, W.AGARWAL, PrabhatMEUNIER-BEILLARD, Philippe
    • H01L29/73
    • H01L29/7317H01L29/1004H01L29/365H01L29/66265H01L29/735H01L2924/0002H01L2924/00
    • The invention relates to a semiconductor device (10) with a semiconductor body (12) comprising a bipolar transistor with an emitter region (1), a base region (2) and a collector region (3) of, respectively, a first conductivity type, a second conductivity type, opposite to the first conductivity type, and the first conductivity type, wherein, viewed in projection, the emitter region (1) is positioned above or below the base region (2), and the collector region (3) laterally borders the base region (2). According to the invention, the base region (2) comprises a highly doped sub­region (2A) the doping concentration of which has a delta-shaped profile in the thickness direction, and said highly doped sub-region (2A) extends laterally as far as the collector region (3). Such a lateral bipolar transistor has excellent high-frequency properties and a relatively high breakdown voltage between the base and collector regions (2, 3), implying that the device is suitable for high power applications. The doping concentration lies preferably between about 10 19 and about 10 20 at/cm 3 , and the thickness of the sub-region (2A) lies between 1 and 15 nm and preferably between 1 and 10 nm. The invention also comprises a method of manufacturing such a device (10).
    • 本发明涉及具有半导体本体(12)的半导体器件(10),该半导体器件(12)包括分别具有第一导电类型的发射极区域(1),基极区域(2)和集电极区域(3) ,与第一导电类型相反的第二导电类型和第一导电类型,其中从投影中看,发射极区域(1)位于基极区域(2)的上方或下方,并且集电极区域(3) 横向地邻接基部区域(2)。 根据本发明,基极区域(2)包括其掺杂浓度在厚度方向上具有δ形轮廓的高掺杂子区域(2A),并且所述高度掺杂子区域(2A)横向延伸至 收集器区域(3)。 这种横向双极晶体管在基极和集电极区域(2,3)之间具有优异的高频特性和较高的击穿电压,这意味着该器件适用于高功率应用。 掺杂浓度优选在约10