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1. 发明授权

US09608589B2 Method of forming acoustic resonator using intervening seed layer 有权
公开(公告)号：US09608589B2
公开(公告)日：2017-03-28
申请号：US12911986
申请日：2010-10-26
申请人： Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
发明人： Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
IPC分类号： H03H3/02 , H01L41/314 , H01L41/317 , H03H9/17
CPC分类号： H03H3/02 , H01L41/314 , H01L41/317 , H01L41/319 , H03H9/173 , H03H9/175 , H03H2003/021 , H03H2003/025 , Y10T29/42
摘要： A method of forming an acoustic resonator includes forming a seed layer on a first electrode layer, forming a piezoelectric layer directly on a surface of the seed layer, and forming a second electrode layer on the piezoelectric layer. The piezoelectric layer includes multiple crystals of piezoelectric material, and the seed layer causes crystal axis orientations of the crystals to be substantially perpendicular to the surface of the seed layer.

2. 发明申请

US20130193808A1 FILM BULK ACOUSTIC RESONATOR WITH MULTI-LAYERS OF DIFFERENT PIEZOELECTRIC MATERIALS AND METHOD OF MAKING 有权
标题翻译：具有多层不同压电材料的薄膜聚合声波谐振器及其制造方法
公开(公告)号：US20130193808A1
公开(公告)日：2013-08-01
申请号：US13362321
申请日：2012-01-31
申请人： Chris FENG , John CHOY , Kevin J. GRANNEN , Phil NIKKEL , Tom YEH
发明人： Chris FENG , John CHOY , Kevin J. GRANNEN , Phil NIKKEL , Tom YEH
IPC分类号： H01L41/04 , H01L41/22 , H01L41/047
CPC分类号： H03H9/173 , H03H9/02149 , H03H9/171 , H03H9/178 , H03H9/585 , Y10T29/42
摘要： A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.
摘要翻译：薄膜体声波谐振器（FBAR）包括第一电极，具有第一c轴取向的第一压电层，在第一电极上具有在第一压电层上具有第二c轴取向的第二压电层，以及第二电极在第二压电层上。第一和第二压电层由各自的不同压电材料制成。通过选择第一和第二c轴取向分别相同或不同，可以将FBAR设置为具有不同的谐振频率。因此可以扩展FBAR的高低频范围。

3. 发明申请

US20100327701A1 Piezoelectric resonator structures having temperature compensation 有权
标题翻译：具有温度补偿的压电谐振器结构
公开(公告)号：US20100327701A1
公开(公告)日：2010-12-30
申请号：US12494886
申请日：2009-06-30
申请人： Kevin J. Grannen , Carrie A. Rogers , John Choy
发明人： Kevin J. Grannen , Carrie A. Rogers , John Choy
IPC分类号： H01L41/04 , H01L41/22
CPC分类号： H03H9/02102 , H01L41/18 , H03H3/04 , H03H9/173 , H03H9/583 , H03H9/587 , H03H2003/021 , H03H2003/0407 , H03H2003/0442 , Y10T29/42
摘要： An electrical resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate glass (BSG).
摘要翻译：电谐振器包括包括空腔的基板。电谐振器包括悬挂在空腔上的谐振器堆叠。谐振器堆叠包括第一电极; 第二电极; 压电层; 和包含硼硅酸盐玻璃（BSG）的温度补偿层。

4. 发明授权

US06312798B1 Magnetic recording medium having a nitrogen-doped hydrogenated carbon protective overcoat 失效
标题翻译：具有氮掺杂氢化碳保护外涂层的磁记录介质
公开(公告)号：US06312798B1
公开(公告)日：2001-11-06
申请号：US09400187
申请日：1999-09-21
申请人： Xiaoding Ma , Kevin J. Grannen , Jing Gui , Jeffrey A. McCann , Mark A. Shows
发明人： Xiaoding Ma , Kevin J. Grannen , Jing Gui , Jeffrey A. McCann , Mark A. Shows
IPC分类号： G11B572
CPC分类号： G11B5/72 , Y10T428/265 , Y10T428/30
摘要： Ion beam-deposited, nitrogen-doped C:H films having substantially lower resistivities than undoped ion beam-deposited C:H films and suitable for use as hard, abrasion-resistant overcoat layers for magnetic recording media, such as hard disks, are formed by supplying a mixture of hydrocarbon and nitrogen gases to an ion beam generator. Nitrogen atom content of the films is controlled to within from about 5 to about 25 at. % by appropriate selection of the ratio of hydrocarbon gas flow to nitrogen gas flow. The resultant IBD i-C:HN films exhibit a reduced tendency for charge build-up thereon during hard disk operation by virtue of their lower resistivity vis-à-vis conventional a-C:H materials.
摘要翻译：离子束沉积的氮掺杂的C：H膜具有比未掺杂的离子束沉积的C：H膜具有显着更低的电阻率，并且适合用作硬记录介质（例如硬盘）的硬的，耐磨损的外涂层通过向离子束发生器提供烃和氮气的混合物。将膜的氮原子含量控制在约5至约25at。通过适当选择碳氢化合物气体流量与氮气流量的比例来确定。所得到的IBD i-C：HN膜在硬盘操作期间由于其相对于常规a-C：H材料的较低电阻率而在其上积累电荷降低的倾向。

5. 发明申请

US20130106248A1 BULK ACOUSTIC RESONATOR COMPRISING PIEZOELECTRIC LAYER AND INVERSE PIEZOELECTRIC LAYER 有权
标题翻译：包含压电层和反向压电层的大容量谐振谐振器
公开(公告)号：US20130106248A1
公开(公告)日：2013-05-02
申请号：US13286051
申请日：2011-10-31
申请人： Dariusz BURAK , Kevin J. GRANNEN , John D. LARSON, III , Alexandre SHIRAKAWA
发明人： Dariusz BURAK , Kevin J. GRANNEN , John D. LARSON, III , Alexandre SHIRAKAWA
IPC分类号： H01L41/083 , H01L41/187
CPC分类号： H03H9/587 , H03H9/02015 , H03H9/132 , H03H9/173 , H03H9/584
摘要： In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction; a second electrode disposed over the first piezoelectric layer; and a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, wherein the second piezoelectric layer has a second c-axis oriented in a second direction that is substantially antiparallel to the first direction.
摘要翻译：在代表性实施例中，体声波（BAW）谐振器包括：设置在基板上的第一电极; 设置在所述第一电极上的第一压电层，所述第一压电层具有沿着第一方向取向的第一c轴; 设置在所述第一压电层上的第二电极; 以及第二压电层，其设置在所述第一电极上并且邻近所述第一压电层，其中所述第二压电层具有在与所述第一方向基本上反平行的第二方向上定向的第二c轴。

6. 发明申请

US20120096697A1 METHOD OF FORMING ACOUSTIC RESONATOR USING INTERVENING SEED LAYER 有权
标题翻译：使用干涉种子层形成声学谐振器的方法
公开(公告)号：US20120096697A1
公开(公告)日：2012-04-26
申请号：US12911986
申请日：2010-10-26
申请人： Kevin J. GRANNEN , Chris FENG , Phil NIKKEL , John CHOY
发明人： Kevin J. GRANNEN , Chris FENG , Phil NIKKEL , John CHOY
IPC分类号： H01L41/22
CPC分类号： H03H3/02 , H01L41/314 , H01L41/317 , H01L41/319 , H03H9/173 , H03H9/175 , H03H2003/021 , H03H2003/025 , Y10T29/42
摘要： A method of forming an acoustic resonator includes forming a seed layer on a first electrode layer, forming a piezoelectric layer directly on a surface of the seed layer, and forming a second electrode layer on the piezoelectric layer. The piezoelectric layer includes multiple crystals of piezoelectric material, and the seed layer causes crystal axis orientations of the crystals to be substantially perpendicular to the surface of the seed layer.
摘要翻译：形成声谐振器的方法包括在第一电极层上形成种子层，在种子层的表面上直接形成压电层，在压电层上形成第二电极层。压电层包括多个压电材料晶体，种晶层使晶体的晶轴取向基本上垂直于晶种层的表面。

7. 发明授权

US07561009B2 Film bulk acoustic resonator (FBAR) devices with temperature compensation 有权
标题翻译：具有温度补偿的薄膜体声波谐振器（FBAR）器件
公开(公告)号：US07561009B2
公开(公告)日：2009-07-14
申请号：US11291674
申请日：2005-11-30
申请人： John D. Larson, III , John Choy , Donald E. Lee , Kevin J. Grannen , Hongjun Feng , Carrie A. Rogers , Urupattur C. Sridharan
发明人： John D. Larson, III , John Choy , Donald E. Lee , Kevin J. Grannen , Hongjun Feng , Carrie A. Rogers , Urupattur C. Sridharan
IPC分类号： H03H9/15 , H03H9/205 , H01L41/083
CPC分类号： H03H3/04 , H03H9/02102 , H03H9/131 , H03H9/132 , H03H9/173 , H03H9/584 , H03H9/587 , H03H9/605 , H03H2003/021 , H03H2003/0407
摘要： The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack that comprises an FBAR characterized by a resonant frequency having a temperature coefficient and a temperature-compensating layer comprising doped silicon dioxide. The FBAR comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency of the FBAR depends at least in part.
摘要翻译：温度补偿膜体声波谐振器（FBAR）装置包括FBAR堆叠，其包括以具有温度系数的谐振频率和包含掺杂二氧化硅的温度补偿层为特征的FBAR。 FBAR包括相对的平面电极和电极之间的压电元件。压电元件具有温度系数，FBAR的谐振频率的温度系数至少部分地取决于该温度系数。

8. 发明授权

US07345410B2 Temperature compensation of film bulk acoustic resonator devices 有权
标题翻译：薄膜体声波谐振器器件的温度补偿
公开(公告)号：US07345410B2
公开(公告)日：2008-03-18
申请号：US11386372
申请日：2006-03-22
申请人： Kevin J. Grannen , John Choy , Carrie A. Rogers
发明人： Kevin J. Grannen , John Choy , Carrie A. Rogers
IPC分类号： H01L41/047
CPC分类号： H03H9/02102 , H03H3/04 , H03H9/131 , H03H9/173 , H03H2003/021 , H03H2003/0407
摘要： A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.
摘要翻译：谐振器。谐振器包括覆盖基板的至少一部分的底部电极，覆盖底部电极的至少一部分的复合结构和覆盖复合结构的至少一部分的顶部电极。复合结构包括压电层和补偿层，补偿层包括与硼结合的二氧化硅。

9. 发明授权

US06500488B1 Method of forming fluorine-bearing diamond layer on substrates, including tool substrates 失效
标题翻译：在基材上形成含氟金刚石层的方法，包括工具基材
公开(公告)号：US06500488B1
公开(公告)日：2002-12-31
申请号：US07924901
申请日：1992-08-04
申请人： R. P. H. Chang , Kevin J. Grannen
发明人： R. P. H. Chang , Kevin J. Grannen
IPC分类号： C23C1626
CPC分类号： C23C16/274 , C23C16/278
摘要： A method of forming a fluorine-bearing diamond layer on non-diamond substrates, especially on tool substrates comprising a metal matrix and hard particles, such as tungsten carbide particles, in the metal matrix. The substrate and a fluorine-bearing plasma or other gas are then contacted under temperature and pressure conditions effective to nucleate fluorine-bearing diamond on the substrate. A tool insert substrate is treated prior to the diamond nucleation and growth operation by etching both the metal matrix and the hard particles using suitable etchants.
摘要翻译：在非金刚石基底上形成含氟金刚石层的方法，特别是在金属基质中包含金属基体和硬质颗粒（例如碳化钨颗粒）的工具基底上。然后在有效使含氟金刚石在基材上成核的温度和压力条件下接触衬底和含氟等离子体或其它气体。在金刚石成核和生长操作之前，通过使用合适的蚀刻剂蚀刻金属基体和硬质粒子来处理工具插入物基底。

10. 发明授权

US06441999B1 Wear durability using high wear-resistant slip pads 失效
标题翻译：使用高耐磨滑垫耐磨耐用
公开(公告)号：US06441999B1
公开(公告)日：2002-08-27
申请号：US09645231
申请日：2000-08-24
申请人： Huan H. Tang , Jing Gui , Zine Eddine Boutaghou , Jason W. Riddering , Kevin J. Grannen
发明人： Huan H. Tang , Jing Gui , Zine Eddine Boutaghou , Jason W. Riddering , Kevin J. Grannen
IPC分类号： G11B560
CPC分类号： G11B21/21 , G11B5/255 , G11B5/40
摘要： A disc drive includes a base and a disc rotatably attached to the base. The disc drive also includes an actuator assembly rotatably attached to said base and a device for moving the actuator assembly. The actuator assembly carries a slider. A slider for a disc drive adapted to interface with the surface of the disc. The surface of the disc is provided with an overcoat having a specific hardness. The slider has a leading edge, a trailing edge, and an air bearing surface positioned between the leading edge and the trailing edge. The slider includes a plurality of slider integrated pads, at least some of the slider integrated pads having a hardness which is greater than the hardness of the disc surface. All the slider integrated pads may be harder than the hardness of the disc surface or at least a group of slider integrated pads located near the trailing edge of the slider are harder than the hardness of the disc surface.
摘要翻译：盘驱动器包括基座和可旋转地附接到基座的盘。盘驱动器还包括可旋转地附接到所述基座的致动器组件和用于移动致动器组件的装置。致动器组件带有滑块。用于适于与盘的表面接合的盘驱动器的滑块。盘的表面设置有具有特定硬度的外涂层。滑块具有前缘，后缘和位于前缘和后缘之间的空气支承表面。滑块包括多个滑块集成垫，至少一些滑块集成垫的硬度大于盘表面的硬度。所有滑块集成垫可能比盘表面的硬度更硬，或者位于滑块后缘附近的至少一组滑块集成垫比盘表面的硬度更硬。

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