会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 6. 发明授权
    • Method for manufacturing half-metallic magnetic oxide and plasma sputtering apparatus used in the same
    • 用于制造其中使用的半金属磁性氧化物和等离子体溅射装置的方法
    • US06802949B2
    • 2004-10-12
    • US10269865
    • 2002-10-15
    • Jin Pyo HongChang Hyo LeeChae Ok KimKap Soo YoonSung Bok Lee
    • Jin Pyo HongChang Hyo LeeChae Ok KimKap Soo YoonSung Bok Lee
    • C23C1435
    • H01J37/3447C23C14/0036C23C14/085C23C14/3471H01J37/3402
    • Disclosed are a method for manufacturing a half-metallic magnetic oxide and a plasma sputtering apparatus used in the method. A conductor provided with at least one hole is disposed between a metal target and a substrate holder in the plasma sputtering apparatus, thereby improving the bonding of metal ions discharged from the metal target to oxygen ions, and a magnetic field with a coercive force larger than that of a thin film to be formed on the substrate, thereby obtaining a magnetic oxide film with excellent properties. In a preferred embodiment of the present invention, a conductor-side power supply unit is connected to the conductor, thereby additionally supplying power to the conductor and generating second plasma. The plasma sputtering apparatus supplies high power so as to decompose oxygen, and discharges metal ions with different electrovalences at a precise ratio by the additional power supply, thereby being effectively used in manufacturing a half-metallic oxide at low temperatures.
    • 公开了一种制造半金属磁性氧化物的方法和用于该方法的等离子体溅射装置。 设置有至少一个孔的导体设置在等离子体溅射装置中的金属靶和衬底保持器之间,从而改善从金属靶释放的金属离子与氧离子的结合,以及矫顽力大于 在基板上形成薄膜的薄膜,从而获得具有优异性能的磁性氧化膜。 在本发明的优选实施例中,导体侧电源单元连接到导体,从而另外向导体供电并产生第二等离子体。 等离子体溅射装置提供高功率以分解氧气,并通过附加电源以精确的比例以不同电价排出金属离子,从而有效地用于在低温下制造半金属氧化物。