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    • 7. 发明授权
    • Integrated circuit having back gating, improved isolation and reduced well resistance and method to fabricate same
    • 集成电路具有后门控,改进的隔离和降低的阱电阻以及制造相同的方法
    • US08445356B1
    • 2013-05-21
    • US13343819
    • 2012-01-05
    • Jin CaiKangguo ChengAli KhakifiroozPranita Kulkarni
    • Jin CaiKangguo ChengAli KhakifiroozPranita Kulkarni
    • H01L21/76
    • H01L29/0649H01L21/76232H01L21/76283H01L21/84H01L27/1203
    • Disclosed is a method of forming a structure and a resulting structure. The method includes providing a semiconductor substrate; forming a first opening to a first depth in the semiconductor substrate; amorphizing semiconductor sidewalls of an upper portion of the first opening leaving unamorphized semiconductor sidewalls in a lower portion of the first opening; enlarging only the lower portion of the first opening using an etch process that is selective to the unamorphized semiconductor sidewalls; filling the first opening with an insulator material to form a deep trench isolation (DTI) structure and implanting a first well region and a second well region into the semiconductor substrate. The first well and the second well are separated from one another by the enlarged lower portion of the first opening. In the structure sidewalls of a top portion of a DTI and sidewalls of an STI are formed of doped, re-crystallized silicon.
    • 公开了一种形成结构和所得结构的方法。 该方法包括:提供半导体衬底; 在所述半导体衬底中形成第一深度的第一开口; 将第一开口的上部的半导体侧壁非晶化,在第一开口的下部离开未变形的半导体侧壁; 使用对未变形的半导体侧壁具有选择性的蚀刻工艺仅扩大第一开口的下部; 用绝缘体材料填充第一开口以形成深沟槽隔离(DTI)结构,并将第一阱区域和第二阱区域注入到半导体衬底中。 第一孔和第二孔通过第一开口的扩大的下部彼此分开。 在DTI的顶部部分和STI侧壁中的结构中,由掺杂的再结晶硅形成。