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    • 6. 发明申请
    • MANUFACTURING AN IC
    • 制造IC
    • WO2004025720A1
    • 2004-03-25
    • PCT/IB2003/003770
    • 2003-08-13
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZWNGUYEN HOANG, VietDAAMEN, Roel
    • NGUYEN HOANG, VietDAAMEN, Roel
    • H01L21/321
    • H01L21/3212H01L21/7684
    • The method for manufacturing an integrated circuit according to the invention starts with providing a pre-fabricated integrated circuit (10) having a surface (11) coated with a dielectric material (12), a barrier layer (14) and a metal (15). The dielectric material (12), which is separated from the metal (15) by the barrier layer (14), has an opening (13), which is filled with the metal (15). Portions of the metal (15) outside the opening (13) are removed by a first chemical mechanical polishing step, which preferentially removes the metal (15) to locally expose the barrier layer (14). Portions of the locally exposed barrier layer (14) are removed by a second chemical mechanical polishing step, which preferentially removes the barrier layer (14). According to the invention, the first chemical mechanical polishing step is repeated after the second chemical mechanical polishing step has been carried out. The apparatus is able to perform the method. The computer program is able to control the method.
    • 根据本发明的集成电路的制造方法开始于提供具有涂覆有电介质材料(12),阻挡层(14)和金属(15)的表面(11)的预制集成电路(10) 。 通过阻挡层(14)与金属(15)分离的电介质材料(12)具有填充有金属(15)的开口(13)。 通过第一化学机械抛光步骤去除开口(13)外部的金属(15)的部分,其优先移除金属(15)以局部暴露阻挡层(14)。 通过第二化学机械抛光步骤去除局部暴露的阻挡层(14)的部分,其优先去除阻挡层(14)。 根据本发明,在进行了第二化学机械抛光步骤之后,重复第一化学机械抛光步骤。 该装置能够执行该方法。 计算机程序能够控制方法。