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    • 6. 发明申请
    • INTEGRATED SENSOR
    • 集成传感器
    • WO1992005432A1
    • 1992-04-02
    • PCT/EP1991001845
    • 1991-09-23
    • INTERUNIVERSITAIR MICRO ELEKTRONICA CENTRUM VZWENGICOM N.V.VAISALA OYKEMIRA OYVAN GELOVEN, Peter, MariaROGGEN, Jean, Joseph, Marie
    • INTERUNIVERSITAIR MICRO ELEKTRONICA CENTRUM VZWENGICOM N.V.VAISALA OYKEMIRA OY
    • G01N27/12
    • G01N27/12
    • A sensor (1) comprising: an insulating substrate (2) provided with a protruding portion; a heating element, arranged on said insulating substrate near the tip end of said protruding portion; first conductor paths (9) connected on one end to said heating element and extending over the protruding portion; first terminals (8) for supplying electric current to the heating element, which are located opposite the protruding portion of the substrate and which are connected to the other ends of the first conductor paths extending over said protruding portion; a sheet of insulating material provided over said heating element; a sensing element (3) arranged over said heating element near the tip end of said protruding portion; second conductor paths (4) connected on one end to the sensor element (3) and extending over said protruding portion; and second terminals (7) located opposite of said protruding portion of the substrate, and which are connected to the other ends of said second conductor paths and which are adapted for connecting one or more electronic circuits, which might be placed as a hybrid circuit in the same substrate.
    • 1.一种传感器(1),包括:绝缘基板(2),设置有突出部分; 加热元件,布置在所述绝缘基板上,靠近所述突出部分的末端; 第一导体路径(9),其一端连接到所述加热元件并在所述突出部分上延伸; 用于向加热元件提供电流的第一端子(8),它们位于与衬底的突出部分相对的位置,并且连接到延伸在所述突出部分上的第一导体路径的另一端; 设置在所述加热元件上的绝缘材料片; 布置在所述加热元件的靠近所述突出部分的末端的感测元件(3); 第二导体路径(4),其一端连接到所述传感器元件(3)并在所述突出部分上延伸; 以及与所述基板的所述突出部分相对的第二端子(7),并且连接到所述第二导体路径的另一端,并且适于连接可以作为混合电路放置的一个或多个电子电路 相同的底物。