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    • 1. 发明授权
    • Method for aligning structures on a semiconductor substrate
    • 用于对准半导体衬底上的结构的方法
    • US06709949B2
    • 2004-03-23
    • US10277127
    • 2002-10-21
    • Holger Hübner
    • Holger Hübner
    • H01L2176
    • H01L25/50H01L25/0657H01L2225/06593H01L2924/0002Y10S438/975H01L2924/00
    • In the three-dimensional integration of integrated circuits, a thinned semiconductor substrate is arranged on a second semiconductor substrate and is mechanically and electrically connected thereto. To that end, in the second, thinned semiconductor substrate, continuous contact holes are formed proceeding from a substrate rear side as far as a first metal wiring plane on a substrate front side. In order to align the contact holes with the structures arranged on the front side, a structure is arranged on the front side of the substrate, which can be used as an alignment mark on the front side. The structure is overgrown with a useful layer and uncovered proceeding from the rear side of the substrate, so that the structure can also be used as an alignment mark from the rear side. This avoids an alignment error between the structures arranged on the front side and the rear side.
    • 在集成电路的三维集成中,减薄的半导体衬底被布置在第二半导体衬底上并机械地和电连接到其上。 为此,在第二个变薄的半导体衬底中,从衬底背面直到基片正面上的第一金属布线平面形成连续的接触孔。 为了将接触孔与布置在前侧上的结构对准,在基板的正面设置有可以用作前侧的对准标记的结构。 该结构被长满了有用的层,并且从衬底的后侧开始覆盖,使得该结构也可以用作来自后侧的对准标记。 这避免了布置在前侧和后侧的结构之间的对准误差。
    • 7. 发明授权
    • Integrated circuit arrangement with a number of structural elements and method for the production thereof
    • 具有许多结构元件的集成电路装置及其制造方法
    • US06597053B1
    • 2003-07-22
    • US09403157
    • 1999-10-15
    • Anton AnthoferHolger Hübner
    • Anton AnthoferHolger Hübner
    • H01L31113
    • H01L23/60H01L21/76264H01L21/76289H01L23/552H01L2224/16145H01L2924/1301H01L2924/1305H01L2924/00
    • An integrated circuit arrangement having a number of structural elements, at least one of which is surrounded by a metallic shielding structure. This structural element is thus protected against interference due to disturbing impulses from its environment. In particular, the structural elements of the circuit arrangement can be arranged next to or on top of one another. To produce the metallic shielding structure of a structural element of the circuit arrangement, at least one depression which surrounds the structural element is created and then lined with metal. The contacts and electrical connections of the structural element are electrically insulated from the metal of the shielding structure. To connect two structural elements within a three-dimensional circuit arrangement, the surfaces of the structural elements that face one another can be covered with two different metals, the alloy thereof having a melting point TS above the melting point T1 of at least one of the metals, so that heating to a temperature between the two melting points results in a permanent connection.
    • 一种具有多个结构元件的集成电路装置,其中至少一个由金属屏蔽结构包围。 因此,该结构元件由于来自其环境的冲击而受到防止干扰。 特别地,电路装置的结构元件可以被布置在彼此之上或之上。 为了制造电路装置的结构元件的金属屏蔽结构,产生围绕结构元件的至少一个凹陷,然后用金属衬里。 结构元件的触点和电连接与屏蔽结构的金属电绝缘。 为了连接三维电路装置中的两个结构元件,相互面对的结构元件的表面可以被两种不同的金属覆盖,其合金的熔点TS高于至少一个的熔点T1 金属,使得加热到两个熔点之间的温度导致永久连接。