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    • 81. 发明授权
    • Complementary bipolar SRAM
    • 互补双极型SRAM
    • US09336860B1
    • 2016-05-10
    • US14717218
    • 2015-05-20
    • International Business Machines Corporation
    • Tak H. Ning
    • G11C11/00G11C11/411H01L27/11
    • G11C11/416G11C11/411G11C11/4116H01L21/8228H01L21/8229H01L27/1025H01L27/11
    • A complementary lateral bipolar SRAM device. The device includes: a first set and second set of lateral bipolar transistors forming a respective first inverter device and second inverter device, the first and second inverter devices being cross-coupled for storing a logic state. In each said first and second set, a first bipolar transistor is an PNP type bipolar transistor, and a second bipolar transistor is an NPN type bipolar transistor, each said NPN type bipolar transistor having a base terminal, a first emitter terminal, a second emitter terminal, and a collector terminal. Emitter terminals of the PNP type transistors of each first and second inverter devices are electrically coupled together and receive a first applied wordline voltage. The first emitter terminals of each said NPN transistors of said first inverter and second inverter devices are electrically coupled together and receive a second applied voltage. 'The second emitter terminal of one NPN bipolar transistor of said first inverter is electrically coupled to a first bit line conductor, and the second emitter terminal of the NPN bipolar transistor of said second inverter device is electrically coupled to a second bit line.
    • 互补横向双极型SRAM器件。 该器件包括:第一组和第二组横向双极晶体管,形成相应的第一反相器器件和第二反相器器件,第一和第二反相器器件交叉耦合以存储逻辑状态。 在每个所述第一和第二组中,第一双极晶体管是PNP型双极晶体管,第二双极晶体管是NPN型双极晶体管,每个所述NPN型双极晶体管具有基极端子,第一发射极端子,第二发射极 端子和集电极端子。 每个第一和第二逆变器装置的PNP型晶体管的发射极端子电耦合在一起并接收第一施加的字线电压。 所述第一反相器和第二反相器装置的每个所述NPN晶体管的第一发射极端子电耦合在一起并接收第二施加电压。 “所述第一反相器的一个NPN双极晶体管的第二发射极端子电耦合到第一位线导体,并且所述第二逆变器器件的NPN双极晶体管的第二发射极端子电耦合到第二位线。
    • 86. 发明授权
    • Method for manufacturing a semiconductor structure
    • 半导体结构的制造方法
    • US08853094B2
    • 2014-10-07
    • US13401537
    • 2012-02-21
    • Thomas ScharnaglBerthold Staufer
    • Thomas ScharnaglBerthold Staufer
    • H01L21/302H01L27/082H01L21/8228H01L29/66
    • H01L29/66272H01L21/8228H01L27/082
    • A method for manufacturing a semiconductor structure comprising complementary bipolar transistors, wherein for manufacture of a PNP-type structure, an emitter layer having a surface oxide layer is present on top of an NPN-type structure, the emitter layer comprising lateral and vertical surfaces, and wherein for removal of the oxide layer, an ion etching step is applied, wherein for the on etching step a plasma for providing ions is generated in a vacuum chamber by RF coupling and the generated ions are accelerated by an acceleration voltage between the plasma and a wafer comprising the semiconductor structure, and wherein the plasma generation and the ion acceleration are controlled independently from each other.
    • 一种用于制造包括互补双极晶体管的半导体结构的方法,其中为了制造PNP型结构,具有表面氧化物层的发射极层位于NPN型结构的顶部,发射极层包括横向和垂直表面, 并且其中为了去除氧化物层,应用离子蚀刻步骤,其中对于上蚀刻步骤,通过RF耦合在真空室中产生用于提供离子的等离子体,并且所产生的离子通过等离子体和 包括半导体结构的晶片,并且其中等离子体产生和离子加速彼此独立地被控制。
    • 87. 发明授权
    • Forming bipolar transistor through fast EPI-growth on polysilicon
    • 通过在多晶硅上快速EPI生长形成双极晶体管
    • US08581347B2
    • 2013-11-12
    • US12841275
    • 2010-07-22
    • Der-Chyang YehLi-Weng ChangHua-Chou TsengChih-Ping Chao
    • Der-Chyang YehLi-Weng ChangHua-Chou TsengChih-Ping Chao
    • H01L29/66
    • H01L21/8249H01L21/8228H01L27/0623H01L27/0826
    • Provided is a semiconductor device that includes a first transistor and a second transistor that are formed on the same substrate. The first transistor includes a first collector, a first base, and a first emitter. The first collector includes a first doped well disposed in the substrate. The first base includes a first doped layer disposed above the substrate and over the first doped well. The first emitter includes a doped element disposed over a portion of the first doped layer. The second transistor includes a second collector, a second base, and a second emitter. The second collector includes a doped portion of the substrate. The second base includes a second doped well disposed in the substrate and over the doped portion of the substrate. The second emitter includes a second doped layer disposed above the substrate and over the second doped well.
    • 提供了一种半导体器件,其包括形成在同一衬底上的第一晶体管和第二晶体管。 第一晶体管包括第一集电极,第一基极和第一发射极。 第一集电器包括设置在衬底中的第一掺杂阱。 第一基底包括设置在衬底上方和第一掺杂阱上方的第一掺杂层。 第一发射器包括设置在第一掺杂层的一部分上的掺杂元件。 第二晶体管包括第二集电极,第二基极和第二发射极。 第二集电体包括衬底的掺杂部分。 第二基底包括设置在衬底中并在衬底的掺杂部分上方的第二掺杂阱。 第二发射器包括设置在衬底上方和第二掺杂阱上方的第二掺杂层。
    • 90. 发明申请
    • METHODS FOR FORMING ELECTROSTATIC DISCHARGE PROTECTION CLAMPS WITH INCREASED CURRENT CAPABILITIES
    • 形成具有增加的电流能力的静电放电保护夹的方法
    • US20130157433A1
    • 2013-06-20
    • US13770548
    • 2013-02-19
    • Rouying ZhanAmaury GendronChai Ean Gill
    • Rouying ZhanAmaury GendronChai Ean Gill
    • H01L29/66
    • H01L21/8228H01L27/0259H01L29/66234
    • Methods for forming an electrostatic discharge protection (ESD) clamps are provided. In one embodiment, the method includes forming at least one transistor having a first well region of a first conductivity type extending into a substrate. At least one transistor is formed having another well region of a second opposite conductivity type, which extends into the substrate to partially form a collector. The lateral edges of the transistor well regions are separated by a distance D, which at least partially determines a threshold voltage Vt1 of the ESD clamp. A base contact of the first conductivity type is formed in the first well region and separated from an emitter of the second conductivity type by a lateral distance Lbe. The first doping density and the lateral distance Lbe are selected to provide a parasitic base-emitter resistance Rbe in the range of 1
    • 提供了形成静电放电保护(ESD)夹具的方法。 在一个实施例中,该方法包括形成至少一个具有延伸到衬底中的第一导电类型的第一阱区的晶体管。 至少一个晶体管形成有具有第二相反导电类型的另一阱区,其延伸到衬底中以部分地形成集电极。 晶体管阱区的横向边缘被隔开距离D,距离D至少部分地确定ESD钳位的阈值电压Vt1。 第一导电类型的基极接触形成在第一阱区中,并且与第二导电类型的发射极分开横向距离Lbe。 选择第一掺杂密度和横向距离Lbe以在1