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    • 86. 发明申请
    • Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
    • 压电振动陀螺元件及其制造方法以及压电振动陀螺传感器
    • US20050006988A1
    • 2005-01-13
    • US10852606
    • 2004-05-25
    • Osamu KawauchiKoji Watanabe
    • Osamu KawauchiKoji Watanabe
    • G01C19/56G01C19/5621G01C19/5628H01L41/04H01L41/08H01L41/18H01L41/22H01L41/29H01L41/311
    • G01C19/5607Y10T74/12Y10T74/1275
    • The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.
    • 本发明提供了一种压电振动陀螺元件,其包括一对检测谐振臂在其中心,连接臂位于中心的右侧和左侧,以及一对驱动谐振臂在连接臂的每个远端,这使得 可以确保共振臂的弯曲和振动的对称性,并且容易且精确地分离电极。 特别地,沿着连接臂的每个端面延伸的方向延伸的延伸部分的两个侧表面在垂直于驱动共振臂延伸的方向的方向上设置在两侧。 延伸部件的厚度方向的端面穿过连接臂的端面的表面和后表面与延伸部分的布线可以形成为将前面的每个的第一驱动电极电耦合 和驱动谐振臂的后表面。 用于电极分离的曝光可以从上述方向在垂直于延伸部分的平坦表面的方向上以与驱动谐振臂的主表面给定的角度进行,以便同时将主表面和侧表面暴露于光 。