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    • 84. 发明申请
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US20060063309A1
    • 2006-03-23
    • US11229497
    • 2005-09-20
    • Eiji SugiyamaKyosuke Ito
    • Eiji SugiyamaKyosuke Ito
    • H01L21/50H01L21/78H01L21/00
    • H01L27/1266H01L21/7806H01L27/1214
    • In the case where an integrated circuit formed of a thin film is formed over a substrate and peeled from the substrate, a fissure (also referred to as crack) is generated in the integrated circuit in some cases. The present invention is to restrain the generation of a fissure by fixing the proceeding direction of etching in one direction to make a peeled layer warp in one direction in accordance with the proceeding of etching. For example, the proceeding of etching can be controlled by utilizing the fact that a portion where a substrate is in contact with a base insulating layer is not etched in the case of patterning a peeling layer provided over the substrate, then forming the base insulating layer, and then fixing a peeled layer by the portion where the substrate is in contact with the base insulating layer.
    • 在由薄膜形成的集成电路形成在基板上并从基板剥离的情况下,在某些情况下,在集成电路中产生裂缝(也称为裂纹)。 本发明是通过在一个方向上固定前进方向的蚀刻来抑制裂缝的产生,以便根据蚀刻的进行使剥离层在一个方向上翘曲。 例如,可以通过利用以下事实来控制蚀刻的进行:在图案化设置在基板上的剥离层的情况下,基板与基底绝缘层接触的部分不被蚀刻,然后形成基底绝缘层 ,然后通过基板与基底绝缘层接触的部分固定剥离层。
    • 87. 发明授权
    • Master-slave type flip-flop circuit
    • 主从型触发电路
    • US4779009A
    • 1988-10-18
    • US886828
    • 1986-07-18
    • Hiroyuki TsunoiEiji SugiyamaMotohiro Seto
    • Hiroyuki TsunoiEiji SugiyamaMotohiro Seto
    • G11C11/40H03K3/289H03K3/284H03K19/00
    • H03K3/289
    • In a master-slave type flip-flop circuit including a normal function in a normal mode for flip/flop operation and a scanning function in a scanning mode for testing an integrated circuit, the master-slave type flip-flop circuit comprises: a master stage having a first pair of differential transistors for taking in data, a second pair of differential transistors for latching data taken in to the first pair of differential transistors, a third pair of differential transistors for taking in scanning data, and a fourth pair of differential transistors for activating the second and third pair of differential transistors in the scanning mode; and a slave stage having a first pair of differential transistors for taking in data from the master stage, a second pair of differential transistors for latching data taken in to the first pair of differential transistors, a third pair of differential transistors for latching scanning data, and a fourth pair of differential transistors for activating the first and third pair of differential transistors in the scanning mode.
    • 主从型触发电路包括:主从触发器电路,包括用于触发/翻转操作的正常模式的正常功能和用于测试集成电路的扫描模式的扫描功能,主从触发器电路包括:主器件 阶段具有用于接收数据的第一对差分晶体管,用于锁存取入第一对差分晶体管的数据的第二对差分晶体管,用于接收扫描数据的第三对差分晶体管和第四对差分 用于在扫描模式下激活第二和第三对差分晶体管的晶体管; 以及具有用于从主级接收数据的第一对差分晶体管的子级,用于锁存取入第一对差分晶体管的数据的第二对差分晶体管,用于锁存扫描数据的第三对差分晶体管, 以及第四对差分晶体管,用于在扫描模式下激活第一和第三对差分晶体管。