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    • 79. 发明授权
    • Driving device and exposure apparatus
    • 驱动装置和曝光装置
    • US06750947B1
    • 2004-06-15
    • US09590182
    • 2000-06-09
    • Hiroyuki TomitaRyuichi EbinumaMakoto Mizuno
    • Hiroyuki TomitaRyuichi EbinumaMakoto Mizuno
    • G03B2768
    • G03F7/70825G02B7/026G02B15/14
    • A driving device includes a first member, an annular second member arranged outside the first member, an annular first plate for connecting the first and second members to each other, and an annular second plate for connecting the first and second members to each other. The first and second members are moved relative to each other by supplying or exhausting a fluid into or from a space surrounded by the first and second members and the first and second plates. Also, at least one of (i) an inner diameter a1 of a portion of the second member at which the second member is connected to the first plate is different from an inner diameter a2 of a portion of the second member at which the second member is connected to the second plate and (ii) an outer diameter b1 of a portion of the first member at which the first member is connected to the first plate is different from an outer diameter b2 of a portion of the first member at which the first member is connected to the second plate.
    • 驱动装置包括第一构件,布置在第一构件外部的环形第二构件,用于将第一构件和第二构件彼此连接的环形第一板和用于将第一构件和第二构件彼此连接的环形第二板。 通过向第一和第二构件以及第一和第二板围绕的空间供应或排出流体,第一和第二构件相对于彼此移动。 此外,(i)第二构件的与第一板连接的部分的内径a1中的至少一个与第二构件的第二构件的一部分的内径a2不同, 连接到第二板,并且(ii)第一构件与第一板连接的部分的外径b1不同于第一构件的第一构件的第一构件的一部分的外径b2 构件连接到第二板。