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    • 63. 发明授权
    • MOSFETS comprising source/drain recesses with slanted sidewall surfaces, and methods for fabricating the same
    • 包括具有倾斜侧壁表面的源极/漏极凹部的MOSFET,及其制造方法
    • US07816261B2
    • 2010-10-19
    • US11928356
    • 2007-10-30
    • Huilong ZhuHong Lin
    • Huilong ZhuHong Lin
    • H01L21/44
    • H01L29/66636H01L29/045H01L29/665H01L29/66772H01L29/7843H01L29/78618Y10S257/902
    • The present invention relates to improved metal-oxide-semiconductor field effect transistor (MOSFET) devices with stress-inducing structures located at the source and drain (S/D) regions. Specifically, each MOSFET comprises source and drain regions located in a semiconductor substrate. Such source and drain regions comprise recesses with one or more sidewall surfaces that are slanted in relation to an upper surface of the semiconductor substrate. A stress-inducing dielectric layer is located over the slanted sidewall surfaces of the recesses at the source and drain regions. Such MOSFETs can be readily formed by crystallographic etching of the semiconductor substrate to form the recesses with the slanted sidewall surfaces, followed by deposition of a stress-inducing dielectric layer thereover.
    • 本发明涉及具有位于源极和漏极(S / D)区域处的应力诱导结构的改进的金属氧化物半导体场效应晶体管(MOSFET)器件。 具体地,每个MOSFET包括位于半导体衬底中的源区和漏区。 这种源极和漏极区域包括具有相对于半导体衬底的上表面倾斜的一个或多个侧壁表面的凹部。 应力诱导电介质层位于源极和漏极区域的凹部的倾斜侧壁表面上。 这样的MOSFET可以通过半导体衬底的晶体刻蚀容易地形成,以形成具有倾斜侧壁表面的凹部,然后在其上沉积应力诱导介电层。
    • 64. 发明授权
    • MOSFETs comprising source/drain recesses with slanted sidewall surfaces, and methods for fabricating the same
    • 包括具有倾斜侧壁表面的源极/漏极凹部的MOSFET及其制造方法
    • US07560758B2
    • 2009-07-14
    • US11427491
    • 2006-06-29
    • Huilong ZhuHong Lin
    • Huilong ZhuHong Lin
    • H01L29/80
    • H01L29/66636H01L29/045H01L29/665H01L29/66772H01L29/7843H01L29/78618Y10S257/902
    • The present invention relates to improved metal-oxide-semiconductor field effect transistor (MOSFET) devices with stress-inducing structures located at the source and drain (S/D) regions. Specifically, each MOSFET comprises source and drain regions located in a semiconductor substrate. Such source and drain regions comprise recesses with one or more sidewall surfaces that are slanted in relation to an upper surface of the semiconductor substrate. A stress-inducing dielectric layer is located over the slanted sidewall surfaces of the recesses at the source and drain regions. Such MOSFETs can be readily formed by crystallographic etching of the semiconductor substrate to form the recesses with the slanted sidewall surfaces, followed by deposition of a stress-inducing dielectric layer thereover.
    • 本发明涉及具有位于源极和漏极(S / D)区域处的应力诱导结构的改进的金属氧化物半导体场效应晶体管(MOSFET)器件。 具体地,每个MOSFET包括位于半导体衬底中的源区和漏区。 这种源极和漏极区域包括具有相对于半导体衬底的上表面倾斜的一个或多个侧壁表面的凹部。 应力诱导电介质层位于源极和漏极区域的凹部的倾斜侧壁表面上。 这样的MOSFET可以通过半导体衬底的晶体刻蚀容易地形成,以形成具有倾斜侧壁表面的凹部,然后在其上沉积应力诱导介电层。
    • 66. 发明授权
    • Damascene replacement metal gate process with controlled gate profile and length using Si1-xGex as sacrificial material
    • 使用Si1-xGex作为牺牲材料的具有受控栅极轮廓和长度的镶嵌金属栅极工艺
    • US07365015B2
    • 2008-04-29
    • US10889901
    • 2004-07-13
    • Hong LinWai LoSey-Shing SunRichard Carter
    • Hong LinWai LoSey-Shing SunRichard Carter
    • H01L29/76
    • H01L29/66545H01L21/28079H01L21/28123H01L21/32134H01L21/32137
    • A method of forming a metal gate in a wafer. PolySi1-xGex and polysilicon are used to form a tapered groove. Gate oxide, PolySi1-xGex, and polysilicon is deposited on a wafer. A resist pattern is formed. A portion of the polysilicon, PolySi1-xGex, and gate oxide is removed to provide a tapered profile. The resist is removed; a dielectric liner is deposited, and then at least a portion of the dielectric liner is removed, thereby exposing the polysilicon and leaving the dielectric liner in contact with the polysilicon, PolyS1-xGex, and gate oxide. A dielectric is deposited, and a portion is removed thereby exposing the polysilicon. The polysilicon, PolySi1-xGex, and gate oxide is removed from inside the dielectric liner, thereby leaving a tapered gate groove. Metal is then deposited in the groove.
    • 一种在晶片中形成金属栅极的方法。 多晶硅1-x x Ge x S和多晶硅用于形成锥形槽。 栅极氧化物,多晶硅1-x x Ge x,并且多晶硅沉积在晶片上。 形成抗蚀剂图案。 去除多晶硅的一部分,多晶硅1-x N x N x N和栅极氧化物以提供锥形轮廓。 去除抗蚀剂; 沉积电介质衬垫,然后去除电介质衬垫的至少一部分,从而暴露多晶硅并使电介质衬垫与多晶硅接触,PolyS 1-x Ge x 和/或栅极氧化物。 沉积电介质,一部分被去除,从而暴露多晶硅。 从电介质衬垫的内部去除多晶硅,多晶硅1 x x Ge x x和栅极氧化物,从而留下锥形栅极沟槽。 然后将金属沉积在凹槽中。
    • 67. 发明授权
    • Superconductor wires for back end interconnects
    • 用于后端互连的超导线
    • US07341978B2
    • 2008-03-11
    • US11072158
    • 2005-03-04
    • Shiqun GuWai LoHong Lin
    • Shiqun GuWai LoHong Lin
    • H01L33/00
    • H01L21/76838H01L21/76834H01L23/53285H01L2924/0002H01L2924/00
    • An improvement to an integrated circuit, of electrically conductive interconnects formed of a superconducting material. In this manner, the electrically conductive interconnects can be made very small, and yet still have adequate conductively. In various embodiments, all of the electrically conductive interconnects are formed of the superconducting material. In some embodiments, the electrically conductive interconnects are formed of a variety of different superconducting materials. In one embodiment, only the backend electrically conductive interconnects are formed of the superconducting material. In some embodiments no vias are formed of the superconducting material. The interconductor dielectric layers are preferably formed of silicon oxide, and sometimes all of the interconductor dielectric layers are formed of silicon oxide. The superconducting material is in some embodiments at least one of an organic compound such as a potassium doped buckminsterfullerene, a cesium doped buckminsterfullerene, and other carbon containing compounds, a metallic material such as an inter-metallic material like Nb—Ti alloys and other substances formed by alloying metals, and an inorganic compound such as YBa2Cu3O7-x, (Pb,Bi)2Sr2Ca2Cu3O10-x and its derivatives, HgBaCaCuO and its derivatives, and TI—Ba—Ca—Cu—O and its derivatives.
    • 对由超导材料形成的导电互连的集成电路的改进。 以这种方式,可以使导电互连非常小,但仍然具有足够的导电性。 在各种实施例中,所有导电互连由超导材料形成。 在一些实施例中,导电互连由各种不同的超导材料形成。 在一个实施例中,只有后端导电互连由超导材料形成。 在一些实施例中,没有由超导材料形成通孔。 互导体电介质层优选由氧化硅形成,并且有时所有的互导电介质层均由氧化硅形成。 在一些实施方案中,超导材料是有机化合物,例如掺杂钾的巴克敏斯特富勒烯,掺杂铯的德克敏斯特富勒烯和其它含碳化合物中的至少一种,金属材料如诸如Nb-Ti合金的金属间材料和其它物质 由金属合金化而形成的无机化合物,例如YBa 2 N 3 O 7-x X,(Pb,Bi)2 Sr 2 O 2和其衍生物HgBaCaCuO及其衍生物 和TI-Ba-Ca-Cu-O及其衍生物。
    • 70. 发明授权
    • Plasma passivation
    • 等离子体钝化
    • US06806038B2
    • 2004-10-19
    • US10190954
    • 2002-07-08
    • Shiqun GuHong LinRyan Tadashi Fujimoto
    • Shiqun GuHong LinRyan Tadashi Fujimoto
    • G03F700
    • H01L21/02071
    • A method for forming a conductive trace on a substrate. The conductive trace is patterned with a photoresist mask and etched, thereby forming a polymer layer on a top surface and sidewalls of the photoresist mask and on sidewalls of the conductive trace. The polymer layer contains entrained chlorine gas. The substrate is heated on a chuck in a reaction chamber. A remote plasma is generated from ammonia gas and oxygen gas. The substrate is contacted with the ammonia and oxygen plasma, thereby withdrawing a substantial portion of the entrained chlorine gas from the polymer layer. A radio frequency potential is applied to the chuck on which the substrate resides, thereby creating a reactive ion etchant from the ammonia and oxygen plasma in the reaction chamber and removing the polymer layer from the top surface of the photoresist mask. The photoresist mask is thus exposed, and then removed in an ashing process.
    • 一种在衬底上形成导电迹线的方法。 导电迹线用光致抗蚀剂掩模图案化并被蚀刻,从而在光致抗蚀剂掩模的顶表面和侧壁以及导电迹线的侧壁上形成聚合物层。 聚合物层含有夹带的氯气。 基板在反应室中的卡盘上加热。 从氨气和氧气产生远程等离子体。 基板与氨和氧等离子体接触,从而从聚合物层中取出大部分夹带的氯气。 将射频电势施加到其上存在基板的卡盘,从而在反应室中从氨和氧等离子体产生反应离子蚀刻剂,并从光致抗蚀剂掩模的顶表面除去聚合物层。 因此曝光光致抗蚀剂掩模,然后在灰化过程中去除。