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61. 发明专利

JP2002134813A EXTREME REPETITION RATE GAS DISCHARGE LASER WITH IMPROVED BLOWER MOTOR 审中-公开
公开(公告)号：JP2002134813A
公开(公告)日：2002-05-10
申请号：JP2001237143
申请日：2001-06-29
申请人： CYMER INC
发明人： OLIVER I ROGER , PARTLO WILLIAM N
IPC分类号： G03F7/20 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/134 , H01S3/22 , H01S3/225 , H03K3/57 , H03K17/80
摘要： PROBLEM TO BE SOLVED: To provide a gas discharge laser capable of operating at pulse rates in the range of 4000 Hz to 6000 Hz at pulse energies in the range of 5 mJ to 10 mJ or greater. SOLUTION: Important improvements over prior art designs include (1) a squirrel cage fan for producing gas velocities of more than 67 m/s through the discharge region and capable of continuous trouble-free operation for several months, (2) a liquid-cooled driving motor having a low loss sealing member separating the motor rotor from the motor stator and protecting the motor from the laser gas and a breach detection device for detecting any breach of the sealing member, and (3) a heat exchange system capable of removing heat energy in excess of 16 kw from the laser gas.

62. 发明专利

JP2002026435A LASER WAVELENGTH CONTROLLER USING PIEZOELECTRIC DRIVER 失效
公开(公告)号：JP2002026435A
公开(公告)日：2002-01-25
申请号：JP2001185211
申请日：2001-06-19
申请人： CYMER INC
发明人： SPANGLER RONALD L , JACQUES ROBERT N , EVERAGE GEORGE J , ANDERSON STUART L , PALENSCHAT FREDERICK A , FOMENKOV IGOR V , SANDSTROM RICHARD L , PARTLO WILLIAM N , ALGOTS JOHN M , BROWN DANIEL J W
IPC分类号： H01S3/137 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/134 , H01S3/22 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a discharge laser provided with a high-speed wavelength correcting device composed of at least one piezoelectric drive, a high-speed wavelength measuring system, a high-speed feedback responding system, a relatively gentle stepper motor, and a high-speed piezoelectric driver for laser wavelength adjustment using a tuning mirror. SOLUTION: The discharge laser is provided with the high-speed wavelength correcting device containing at least one piezoelectric drive, the high-speed wavelength measuring system, and the high-speed feedback responding system. In a desirable embodiment, a device which controls laser wavelength in a low- speed temporal framework of several milliseconds, an intermediate temporal framework of about 1-3 milliseconds, and a very high-speed temporal framework of several microseconds is prepared. The used technology includes the combination of the relatively gentle stepper motor and the high-speed piezoelectric driver for laser wavelength adjustment using the tuning mirror. A preferable control technology is explained (by using very high-speed wavelength monitoring device) and, in order to bring about low-, medium-, and very high-speed (several microseconds) wavelength control, a piezoelectric load cell combined with the piezoelectric driver is provided.

63. 发明专利

JP2001308419A ELECTRIC DISCHARGE LASER WITH ACOUSTIC CHIRP CORRECTION 失效
公开(公告)号：JP2001308419A
公开(公告)日：2001-11-02
申请号：JP2001057453
申请日：2001-01-25
申请人： CYMER INC
发明人： PARTLO WILLIAM N , FOMENKOV IGOR V , HUEBER JEAN-MARC , BOR ZSOLT , ONKELS ECKEHARD D , CATES MICHAEL C , UJAZDOWSKI RICHARD C , FLEUROV VLADIMIR B , GAIDARENKO DMITRI V
IPC分类号： H01S3/03 , G03F7/20 , H01S3/036 , H01S3/038
摘要： PROBLEM TO BE SOLVED: To provide an electric discharge laser having a device for minimizing acoustic disturbance at a pulse frequency which sufficiently exceeds 1000 HZ. SOLUTION: Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rate. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers, as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure waves is determined by the temperature of the laser gas through which the wave is traveling. Solution to the problem is to moderate or disperse the pressure waves generated by discharge and to maintain the laser gas temperature as close as feasible to constant values.

64. 发明专利

JP2001298233A HIGH ENERGY GAS DISCHARGE LASER WITH HELIUM-PURGED LINE NARROWING UNIT 失效
公开(公告)号：JP2001298233A
公开(公告)日：2001-10-26
申请号：JP2000403713
申请日：2000-11-30
申请人： CYMER INC
发明人： PARTLO WILLIAM N , SANDSTROM RICHARD L , RAYMOND F SHIBURUSUKII , FOMENKOV IGOR V , ERSHOV ALEXANDER I
IPC分类号： H01S3/03 , G03F7/20 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/1055 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To meet the demand for reliable line narrowing devices and technologies for high frequency and high work coefficient gas discharge lasers. SOLUTION: Helium gas purge for a line narrowing device based on a grating for minimizing the thermal distortion in a line narrowing laser for generating high energy laser beams at high frequencies. The applicants showed substantial improvement of the efficiency with use of the helium gas purge, compared to the nitrogen gas purges in the prior art. In preferred embodiments, a helium gas flow is guided across the grating surface. In other embodiments, the purge gas pressure is reduced to lessen the optical effects of the hot gas layer.

65. 发明专利

JP2001215721A PLASMA CONVERGING LIGHT SOURCE HAVING IMPROVED PULSE POWER SOURCE SYSTEM 失效
公开(公告)号：JP2001215721A
公开(公告)日：2001-08-10
申请号：JP2000352151
申请日：2000-11-20
申请人： CYMER INC
发明人： PARTLO WILLIAM N , FOMENKOV IGOR V , OLIVER I ROGER , NESS RICHARD M , BIRX DANIEL L
IPC分类号： G21K5/00 , G03F7/20 , G21K5/02 , H01L21/027 , H05G2/00 , H05H1/06
摘要： PROBLEM TO BE SOLVED: To provide a plasma converging light source having an improved pulse power source system. SOLUTION: A pair of plasma pinch electrodes 8 are arranged within a vacuum chamber. This chamber houses a rear gas buffer groups and a working gas containing the active gas selected to impart desirable spectral rays. The pulse power source 10 provides electric pulses at voltage sufficiently higher than the voltage for forming a discharge between the electrodes in order to impart the radiation at the spectral ray of the active gas described above by forming the plasma pinch of an extremely high temperature and high density. More preferably, the electrodes are constituted coaxially with an axial anode. In a more preferable embodiment, the optimization of a capacitance value and the length and shape of the anode is provided and a more preferable active gas supply system is disclosed. The more preferable embodiment includes the pulse power source having a magnetic compression circuit provided with a charging capacitor and a pulse converter. A heat pipe cooling system for cooling the central anode is described.

66. 发明专利

JP2001211639A HIGH-SPEED MAGNETIC MODULATOR VOLTAGE AND TEMPERATURE TIMING COMPENSATION CIRCUIT 失效
公开(公告)号：JP2001211639A
公开(公告)日：2001-08-03
申请号：JP2000389053
申请日：2000-12-21
申请人： CYMER INC
发明人： NESS RICHARD M , PARTLO WILLIAM N , SANDSTROM RICHARD L , JOHNS DAVID M
IPC分类号： H01S3/097 , H01S3/038 , H01S3/225 , H02M3/00 , H02M3/155 , H02M3/157 , H03K3/45 , H03K3/57 , H03K5/13
摘要： PROBLEM TO BE SOLVED: To provide a high-speed magnetic modulator voltage and temperature timing compensation circuit. SOLUTION: Function generators that typically generate non-linear functions of voltage and provide precise non-linear compensation by pulse timing delay are interconnected, thereby improving a voltage timing compensation circuit of prior art. The compensation circuit is used to drive a timing compensation circuit to provide more precise temperature timing compensation than provided by temperature synthesization of prior art and provided so that precise temperature measurement will be accomplished, thereby improving temperature timing compensation circuits of prior art. Yet the compensation circuit is relatively simple. In some embodiment, the very high-speed timing compensation circuit combines timing compensation of voltage with that of temperature.

67. 发明专利

JP2000058944A HIGHLY RELIABLE MODULAR MANUFACTURE HIGH-QUALITY NARROW BAND HIGH REPEAT RATE F2 LASER 失效
公开(公告)号：JP2000058944A
公开(公告)日：2000-02-25
申请号：JP17729599
申请日：1999-05-20
申请人： CYMER INC
发明人： HOFMANN THOMAS , HUEBER JEAN-MARC , DAS PALASH P , ISHIHARA TOSHIHIKO , THOMAS P DAFFY , JOHN T MELCHIOR , BESAUCELE HERVE A , MORTON RICHARD G , NESS RICHARD M , NEWMAN PETER C , PARTLO WILLIAM N , ROTHWEIL DANIEL A , SANDSTROM RICHARD L
IPC分类号： H01S3/03 , G03F7/20 , H01S3/137 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a highly reliable modular high-quality narrow band F2 laser with high repeat rate. SOLUTION: A module includes a laser chamber 211, a pulse power system including three modules, an optical resonator consisting of a line band narrowing module and an output coupler module, a wave meter module, an electric control module, a cooling water module, and a gas control module. important reform is performed for the pulse power unit for making out shorter start up time and reformed pulse energy control. These reforms are performed inclusive of an increased capacity high-voltage power source 208 which is equipped with a voltage bleed down circuit related to accurate trimming; and a reformed commutator module 209 which generates high voltage pulses from a capacitor charged by a high-voltage power source, and amplifies the pulse voltage to about twenty three times with a very quick voltage transformer having secondary winding consisting of the stainless steel rod of single four segments.

68. 发明专利

JPH11340547A LASER 失效
公开(公告)号：JPH11340547A
公开(公告)日：1999-12-10
申请号：JP12069999
申请日：1999-04-27
申请人： CYMER INC
发明人： WATSON TOM A , PARTLO WILLIAM N , LARSON DONALD G , FOMENKOV IGOR V , DERUYTER ANTHONY J , DAS PALASH P
IPC分类号： H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a laser, wherein a continuous cooling air flow is introduced into a laser cabinet. SOLUTION: The inside of a cabinet is divided into three in vertical direction with two panels 210. Air guiding holes 220 are provided near the left end of the upper part panel 210 and near the right end of the lower part panel 210, respectively. One air guiding port 200 is provided on the right side surface at the top layer of a three-piece cabinet, while an air discharge pipe 170 provided on the left side surface at the bottom layer. The air coming into the top layer of the cabinet from the guiding port 200 advances left along the longitudinal direction of the upper part panel 210, then comes into a second layer of the cabinet through the guiding hole 220 of the upper part panel 210, where it advances along the longitudinal direction of the lower part panel 210, opposite to that of the top layer or rightward, and then comes in the bottom layer of the cabinet through the guiding hole 220 of the lower part panel 210. The air coming into the bottom layer of the cabinet advances in the direction opposite to that of the second layer to be exhausted from an exhaust pipe 170.

69. 发明专利

JPH10323057A METHOD AND APPARATUS FOR REMOVING REFLECTION ENERGY BY STAGE MISMATCHING IN NONLINEAR MAGNETIC COMPRESSING MODULE 失效
公开(公告)号：JPH10323057A
公开(公告)日：1998-12-04
申请号：JP3456398
申请日：1998-02-17
申请人： CYMER INC
发明人： PARTLO WILLIAM N , SANDSTROM RICHARD L , BIRX DANIEL L , NESS RICHARD MONS
IPC分类号： H01S3/097 , H01S3/0971 , H01S5/042 , H02M9/04 , H03K3/57 , H03K17/80
摘要： PROBLEM TO BE SOLVED: To remove a secondary pulse by stage mismatching of the stage of a magnetic pulse compressor circuit by discharging energy stored in the capacitor of a magnetic pulse compressor circuit because of the stage mismatching, before reverse charge is supplied by the compressor circuit. SOLUTION: Each diode D1 -Dn of a pulse generator circuit 10 becomes in continuity, while a voltage generated by a reflection energy pulse is negative. When the diode D1 for example, is in continuity, a resistor R1 discharges the negative voltage of a capacitor C1 by a speed determined by a time constant RC of the resistor R1 and the capacitor C1 . The respective resistance values of resistors R1 -Rn are selected sufficiently small, so that the voltages corresponding respectively to the capacitors C1 -Cn may be approximately discharged, after the passage of a main pulse and before the reverse saturation of relating inductors L1 -Ln respectively. Consequently, it is possible to remove a secondary pulse caused by stage mismatching of a magnetic pulse compressor circuit 16.

70. 发明专利

JP2013214772A Laser output beam wavefront splitter for bandwidth spectrum control 审中-公开
标题翻译：激光输出波束分波器用于带宽频谱控制
公开(公告)号：JP2013214772A
公开(公告)日：2013-10-17
申请号：JP2013145759
申请日：2013-07-11
申请人： Cymer Inc , サイマーインコーポレイテッド
发明人： RICHARD L SANDSTROM , DANIEL J W BROWN , ERSHOV ALEXANDER I , FOMENKOV IGOR V , PARTLO WILLIAM N
IPC分类号： H01S3/136 , G03F7/20 , H01S3/08 , H01S3/097 , H01S3/10 , H01S3/1055 , H01S3/13 , H01S3/139 , H01S3/22
CPC分类号： H01S3/0812 , G03F7/70025 , G03F7/70575 , H01S3/08059 , H01S3/097 , H01S3/1055 , H01S3/1305
摘要： PROBLEM TO BE SOLVED: To provide light sources for integrated circuit lithography illumination sources requiring spectrum processing within a pulse or from pulse to pulse within a burst.SOLUTION: An embodiment comprises: a dispersive bandwidth selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the corresponding pulse on a dispersive wavelength selection optic; and a tuning mechanism operative to select at least one angle of incidence of the laser light pulse beam containing the corresponding pulse on the dispersive center wavelength selection optic, the tuning mechanism comprising a plurality of incidence angle selection elements each defining an angle of incidence for a different spatially separated but not temporally separated portion of the laser light pulse to return from the dispersive center wavelength selection optic a laser light pulse comprising a plurality of spatially separated but not temporally separated portions, each portion having one of at least two different selected center wavelengths.
摘要翻译：要解决的问题：为集成电路光刻照明源提供光源，其需要脉冲内的频谱处理或在脉冲内的脉冲或脉冲之间。解决方案：实施例包括：色散带宽选择光学器件，用于为每个脉冲选择至少一个中心波长至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定; 以及调谐机构，用于选择在分散中心波长选择光学器件上包含相应脉冲的激光束的至少一个入射角，所述调谐机构包括多个入射角选择元件，每个入射角选择元件限定入射角激光光脉冲的不同的空间分离但不是时间上分离的部分从分散中心波长选择光学器件返回包括多个空间上分离但不时间分离的部分的激光脉冲，每个部分具有至少两个不同的选定中心波长中的一个。

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