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    • 61. 发明申请
    • METHOD FOR LOCALLY REMOVING A SURFACE LAYER, AND SOLAR CELL
    • 方法表层及太阳能电池的局部切除
    • WO2012022329A3
    • 2012-04-19
    • PCT/DE2011075152
    • 2011-06-28
    • CENTROTHERM PHOTOVOLTAICS AGKUEHN TINOTEPPE ANDREASFRIESS TOBIASESTURO-BRETON AINHOAKELLER STEFFEN
    • KUEHN TINOTEPPE ANDREASFRIESS TOBIASESTURO-BRETON AINHOAKELLER STEFFEN
    • H01L31/0224H01L31/0236H01L31/18
    • H01L29/34H01L21/268H01L31/02363H01L31/1804Y02E10/547Y02P70/521
    • The invention relates to a method for locally removing a surface layer (36) which is applied to a texture (30) of a textured substrate, wherein the texture (30) has a multiplicity of structure elements (32) with structure tips (34) and/or structure edges, having the steps of locally irradiating the texture (30) through the surface layer (36) by means of laser radiation which at least partially penetrates through the surface layer (36) and which is at least partially absorbed by the texture (30), the intensity of which laser radiation is set such that the texture (30) is locally melted by means of the laser radiation and subsequently recrystallized (16), wherein the surface layer (36) is locally opened in the region of the structure tips (34) and/or of the structure edges such that the openings around the structure tips (34) and/or the structure edges after the local irradiation of the texture (30) are completely surrounded by continuous, non-open regions of the surface layer (36), and removing (18) the recrystallized regions (38) of the texture (30) in an etching step by means of an etching medium, wherein the surface layer (36) outside the recrystallized regions (38) is used as an etching mask against the etching medium, and to a solar cell (70).
    • 一种用于局部去除的表面层(36),其被施加到织构的衬底的织构(30)的过程中,织构(30)包括多个结构元件(32),其具有结构顶部(34)和/或具有结构的边缘,其包括以下步骤 通过表面层的装置中的纹理(30)通过该表面层(36)的局部照射(36)至少部分地穿透和从纹理(30)至少部分地吸收激光辐射,其强度被设定为使得所述纹理(30)借助于 激光辐射局部熔化和下面(16)中重结晶,其特征在于,使得根据纹理(30)的局部照射到尖端的结构中的开口在结构尖端的区域中的表面层(36)(34)和/或结构边缘局部地打开的 (34)和/或围绕的表面层的连续的开放区域边缘结构(36)v 其中,从所述再结晶区域的表面层(36)远(38)用作抗蚀刻介质的蚀刻掩模通过蚀刻介质的装置在蚀刻步骤中的纹理(30)的再结晶区域(38)的包围ollständig,并除去(18),和 太阳能电池(70)。
    • 63. 发明申请
    • PROCESS FOR CONDENSATION OF CHALCOGEN VAPOUR AND APPARATUS TO CARRY OUT THE PROCESS
    • 浓缩蒸汽的方法和装置的执行过程
    • WO2012023027A1
    • 2012-02-23
    • PCT/IB2011/001892
    • 2011-08-17
    • CENTROTHERM PHOTOVOLTAICS AGKÖTSCHAU, ImmoKOCH, RaphaelBOGER, Raimund
    • KÖTSCHAU, ImmoKOCH, RaphaelBOGER, Raimund
    • C23C14/24
    • C23C14/246B01D5/0051B01D5/009C01B17/021C01B19/02C23C14/0623F28B9/08
    • Process for the condensation of chalcogen vapour (36) and re¬ circulation of condensed chalcogen (23) into an evaporation unit (1) having the process steps of the feeding of the chal- cogen vapour (36) in the condenser (9), of the condensing of at least part of the chalcogen vapour (36) fed into the con¬ denser (9) into liquid chalcogen (23), of the recirculation of the liquid chalcogen (23) into the evaporation unit (1) via a trap (35) formed as part of a return line (17) and of the pro- vision of a column (21) of liquid chalcogen in the trap (35), of the equalisation of pressure differentials between pres¬ sures prevailing in the condenser (9) and in the evaporation unit (1) by means of this column (21) of liquid chalcogen, of the at least partial melting of a solid chalcogen stopper (22) sealing off the trap (35), and of the control of the flow of liquid chalcogen (23) through the trap (35) by means of a melt valve (24), and apparatus to carry out this process.
    • 用于使硫属蒸汽(36)冷凝并将冷凝的硫属元素(23)再循环到蒸发单元(1)中的方法,所述蒸发单元具有在冷凝器(9)中进给所述共态蒸汽(36)的方法步骤, 将进料到致密器(9)的至少部分硫属元素蒸气(36)冷凝成液体硫属元素(23),通过捕集器将液态硫属元素(23)再循环到蒸发单元(1)中 (35)形成为回流管线(17)的一部分,以及在所述阱(35)中的液态硫属钢柱(21)的设计,在冷凝器中存在的压力之间的压差的均衡( 9)和在蒸发单元(1)中通过该液体硫族元素塔(21)至少部分熔化固体硫霉素阻挡物(22),密封捕集器(35),并控制 液体硫属元素(23)通过熔体阀(24)通过捕集器(35)的流动,以及用于执行该过程的装置。
    • 66. 发明申请
    • PROCESS AND DEVICE FOR THE THERMAL CONVERSION OF METALLIC PRECURSOR LAYERS INTO SEMICONDUCTING LAYERS USING A CHALCOGEN SOURCE
    • 金属前驱体层转换成半导体层的过程和器件
    • WO2010100561A1
    • 2010-09-10
    • PCT/IB2010/000472
    • 2010-03-08
    • CENTROTHERM PHOTOVOLTAICS AGKÖTSCHAU, ImmoLENZ, ReinhardSCHMID, DieterHARTUNG, Robert, Michael
    • KÖTSCHAU, ImmoLENZ, ReinhardSCHMID, DieterHARTUNG, Robert, Michael
    • C23C14/06C23C14/58
    • C23C14/0623C23C14/5866
    • The present invention relates to a process for the thermal conversion of metallic precursor layers on flat substrates into semiconducting layers with a recovery of chalcogen, as well as a device for carrying out the process. The aim of the invention is to provide a rapid and readily executable process for the thermal conversion of metallic precursor layers, as well as a device suitable for carrying out the process with as small as possible primary consumption of chalcogens..This is achieved by forming an inlet-side and outlet-side gas lock (4.1, 4.2, 4.3, 4.4) for closing a furnace chamber (1) in an oxygen-tight manner, introducing one or more substrates (6) prepared with at least one metallic precursor layer into the furnace chamber (1), introducing a chalcogen vapour /carrier gas mixture (10) above the substrates (6) at a pressure close to atmospheric pressure, said mixture being distributed as uniformly as possible over the width of the substrates (6), heating the substrates (6) in the chalcogen vapour/carrier gas atmosphere (10) to a final temperature with the metallic precursor layers being transformed into semiconducting layers, removing the chalcogen vapour that has not been consumed in the reaction, cooling the substrates (6) and removing the latter from the furnace chamber (1). It is advantageous to heat the substrates (6) in a protective gas atmosphere to a temperature at which as far as possible no condensation of chalcogens can take place.
    • 本发明涉及一种用于在平坦基板上将金属前体层热转化成具有回收硫族元素的半导体层的方法,以及用于实施该方法的装置。 本发明的目的是提供一种用于金属前体层的热转化的快速且容易执行的方法,以及适于以尽可能少的硫化氢原子消耗的方式进行该方法的装置。这是通过形成 用于以不透气的方式关闭炉室(1)的入口侧和出口侧气体锁(4.1,4.2,4.3,4.4),引入一个或多个由至少一个金属前体层制备的基底(6) 在炉室(1)中,在接近大气压的压力下在基板(6)上方引入硫属元素蒸汽/载气混合物(10),所述混合物在基板(6)的宽度上尽可能均匀地分布, ,将金属前体层转变为半导体层,将硫霉素蒸汽/载气气氛(10)中的基板(6)加热至最终温度,除去反应中未被消耗的硫属蒸汽 ,冷却基板(6)并将其从炉室(1)中取出。 将保护气体气氛中的基板(6)加热到尽可能不发生硫属元素的冷凝的温度是有利的。
    • 69. 发明申请
    • ANTIREFLECTIVE COATING ON SOLAR CELLS AND METHOD FOR THE PRODUCTION OF SUCH AN ANTIREFLECTIVE COATING
    • 太阳能电池上的抗反射涂层,以及制造这种抗反射涂层的方法
    • WO2007051457A3
    • 2007-07-05
    • PCT/DE2006001927
    • 2006-11-02
    • CENTROTHERM PHOTOVOLTAICS AGMOELLER RAINERHARTUNG ROBERT MICHAEL
    • MOELLER RAINERHARTUNG ROBERT MICHAEL
    • H01L31/0216
    • H01L31/02168Y02E10/50
    • The invention relates to an antireflective coating on solar cells made of crystalline silicon as well as a method for producing such an antireflective coating. The aim of the invention is to create an antireflective coating on solar cells made of crystalline silicon which makes it possible to optimize the optical and passivating properties thereof while making it possible to easily and economically integrate the production thereof into the production process especially of very thin crystalline silicon solar cells. Said aim is achieved by the fact that the antireflective coating is composed of successive partial layers, i.e. a lower partial layer (S1) which covers the crystalline silicon, is embodied as an antireflective coating and as passivation with a particularly great hydrogen concentration, and is covered by an upper partial layer (S2) having an increased barrier effect against hydrogen diffusion.
    • 晶体硅太阳能电池上的抗反射涂层及其制造方法技术领域本发明涉及晶体硅太阳能电池上的抗反射涂层及其制造方法。 本发明提供太阳能电池上的抗反射涂层是从晶体硅创建,无论是光学和钝化特性的最佳设计使得和它们的制备可以在生产过程中,特别是非常薄的晶体硅太阳能电池的容易和经济集成。 实现的是,连续子层的防反射涂层由其中形成低的事实,结晶硅(S),其覆盖部分层(S1)作为防反射涂层和钝化具有特别高的氢含量,顶层的(S2) 覆盖着增加的屏障效应,防止氢向外扩散。