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    • 52. 发明授权
    • Inspection apparatus and method for producing image for inspection
    • 用于检查图像的检查装置和方法
    • US08730318B2
    • 2014-05-20
    • US13160108
    • 2011-06-14
    • Kenji NakahiraAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • Kenji NakahiraAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • H04N9/47H04N5/235G06K9/00
    • H04N5/265H04N5/217H04N5/2628H04N7/183
    • In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    • 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化,检查装置由图像拾取单元,图像获取单元,其获取包含 信号(噪声),其基本上独立于由图像拾取单元获得的每个帧;局部对准单元,其对具有不同时间相位的帧进行局部对准,以形成由图像获取单元获取的图像;帧合成单元, 由本地对准单元对准的多个帧,用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元,用于显示或记录由帧生成的合成帧形成的图像 合成单位。
    • 57. 发明申请
    • Inspection Apparatus and Method for Producing Image for Inspection
    • 检验仪器及其检测方法
    • US20120026317A1
    • 2012-02-02
    • US13160108
    • 2011-06-14
    • Kenji NAKAHIRAAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • Kenji NAKAHIRAAtsushi MiyamotoNaoki HosoyaMinoru Yoshida
    • H04N7/18
    • H04N5/265H04N5/217H04N5/2628H04N7/183
    • In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
    • 为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化,检查装置由图像拾取单元,图像获取单元,其获取包含 信号(噪声),其基本上独立于由图像拾取单元获得的每个帧;局部对准单元,其对具有不同时间相位的帧进行局部对准,以形成由图像获取单元获取的图像;帧合成单元, 由本地对准单元对准的多个帧,用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元,用于显示或记录由帧生成的合成帧形成的图像 合成单位。
    • 60. 发明授权
    • Apparatus for detecting defects using multiple coordinate systems
    • 使用多坐标系检测缺陷的装置
    • US08045149B2
    • 2011-10-25
    • US12946555
    • 2010-11-15
    • Minoru YoshidaShunji Maeda
    • Minoru YoshidaShunji Maeda
    • G01N21/00
    • G01N21/9501G01N21/4738
    • An apparatus is disclosed for detecting defects on a sample inspected by different inspection apparatuses. A data processing unit receives position information of a first defects group in a first coordinate system, based on inspection of the sample under a first condition using a first defect inspection apparatus. The data processing unit receives position information of a second defects group in a second coordinate system, after least one processing step has been performed on the sample. Position information of the second defects group is obtained by inspecting the sample under a second condition using a second defect inspection apparatus which is different from the first defect inspection apparatus. A position correction unit corrects error of relative position information on the first defects group and the second defects group, and the first and second defects groups are checked.
    • 公开了一种用于检测由不同检查装置检查的样品上的缺陷的装置。 数据处理单元使用第一缺陷检查装置,基于第一条件下的样本检查,接收第一坐标系中的第一缺陷组的位置信息。 在对样本进行了至少一个处理步骤之后,数据处理单元接收第二坐标系中的第二缺陷组的位置信息。 使用与第一缺陷检查装置不同的第二缺陷检查装置,在第二条件下检查样品,获得第二缺陷组的位置信息。 位置校正单元校正第一缺陷组和第二缺陷组的相对位置信息的误差,并且检查第一和第二缺陷组。