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1. 发明申请

US20120026317A1 Inspection Apparatus and Method for Producing Image for Inspection 有权
标题翻译：检验仪器及其检测方法
公开(公告)号：US20120026317A1
公开(公告)日：2012-02-02
申请号：US13160108
申请日：2011-06-14
申请人： Kenji NAKAHIRA , Atsushi Miyamoto , Naoki Hosoya , Minoru Yoshida
发明人： Kenji NAKAHIRA , Atsushi Miyamoto , Naoki Hosoya , Minoru Yoshida
IPC分类号： H04N7/18
CPC分类号： H04N5/265 , H04N5/217 , H04N5/2628 , H04N7/183
摘要： In order to obtain a quality image without deterioration owing to radiation noise in inspection using the optical video camera in high radiation environment, an inspection apparatus is formed of an image pick-up unit, an image obtaining unit which fetches a video image that contains a signal (noise) that is substantially independent of each frame obtained by the image pick-up unit, a local alignment unit which locally aligns frames with different time phases for forming the image fetched by the image obtaining unit, a frame synthesizing unit which synthesizes the plurality of frames aligned by the local alignment unit for generating a synthesis frame with an SN ratio higher than the SN ratio of the frame before frame synthesis, and an image output unit for displaying or recording the image formed of the synthesis frame generated by the frame synthesizing unit.
摘要翻译：为了在高辐射环境下使用光学摄像机的检查中的辐射噪声获得质量图像而不劣化，检查装置由图像拾取单元，图像获取单元，其获取包含信号（噪声），其基本上独立于由图像拾取单元获得的每个帧;局部对准单元，其对具有不同时间相位的帧进行局部对准，以形成由图像获取单元获取的图像;帧合成单元，由本地对准单元对准的多个帧，用于产生SN比高于帧合成之前的帧的SN比的合成帧;以及图像输出单元，用于显示或记录由帧生成的合成帧形成的图像合成单位。

2. 发明申请

US20120126117A1 SCANNING ELECTRON MICROSCOPE AND METHOD FOR PROCESSING AN IMAGE OBTAINED BY THE SCANNING ELECTRON MICROSCOPE 有权
标题翻译：扫描电子显微镜和扫描电子显微镜获得的图像的处理方法
公开(公告)号：US20120126117A1
公开(公告)日：2012-05-24
申请号：US13362536
申请日：2012-01-31
申请人： Kenji NAKAHIRA , Toshifumi HONDA , Atsushi MIYAMOTO
发明人： Kenji NAKAHIRA , Toshifumi HONDA , Atsushi MIYAMOTO
IPC分类号： H01J37/28
CPC分类号： G01N23/225 , G01N2223/401
摘要： In the case where a specimen is imaged by a scanning electron microscope, it is intended to acquire an image of a high quality having a noise component reduced, thereby to improve the precision of an image processing. The intensity distribution of a beam is calculated on the basis of an imaging condition or specimen information, and an image restoration is performed by using a resolving power deterioration factor other than the beam intensity distribution as a target of a deterioration mode, so that a high resolving power image can be acquired under various conditions. In the scanning electron microscope for semiconductor inspections and semiconductor measurements, the restored image is used for pattern size measurement, defect detections, defect classifications and so on, so that the measurements can be improved in precision and so that the defect detections and classifications can be made high precise.
摘要翻译：在通过扫描电子显微镜对样本进行成像的情况下，旨在获取具有降低噪声分量的高质量图像，从而提高图像处理的精度。基于成像条件或样本信息计算光束的强度分布，并且通过使用除了光束强度分布之外的分辨能力劣化因子作为劣化模式的目标来执行图像恢复，使得高可以在各种条件下获得分辨率的图像。在用于半导体检查和半导体测量的扫描电子显微镜中，恢复的图像用于图案尺寸测量，缺陷检测，缺陷分类等，从而可以提高测量精度，从而可以使缺陷检测和分类高精度。

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