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51. 发明授权

US08198613B2 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device 有权
标题翻译：极紫外镜，极紫外镜的制造方法，以及远紫外光源装置
公开(公告)号：US08198613B2
公开(公告)日：2012-06-12
申请号：US12469140
申请日：2009-05-20
申请人： Masato Moriya , Osamu Wakabayashi , Georg Soumagne
发明人： Masato Moriya , Osamu Wakabayashi , Georg Soumagne
IPC分类号： G21K5/04 , G21K1/06
CPC分类号： G02B5/1838 , G02B5/0891 , G02B5/1857 , G03F7/70575 , G21K1/065 , G21K2201/064
摘要： The EUV light source device eliminates radiation other than EUV radiation from the light which it emits, and supplies only the EUV radiation to an exposure device. A composite layer consisting of a plurality of Mo/Si pair layers is provided upon the front surface of an EUV collector mirror, and blazed grooves are formed in this composite layer. Radiation emitted from a plasma is incident upon this EUV collector mirror, and is reflected or diffracted. The reflected EUV radiation (including diffracted EUV) proceeds towards an intermediate focal point IF. The radiation of other wavelengths proceeds towards some position other than this focal point IF, because its reflection angle or diffraction angle is different. A SPF shield having an aperture portion is provided at the focal point IF. Accordingly, only the EUV radiation passes through the aperture portion and is supplied to the exposure device, while the other radiation is intercepted by the shield.
摘要翻译： EUV光源装置除去其发射的光之外的EUV辐射以外的辐射，并且仅将EUV辐射提供给曝光装置。在EUV收集镜的前表面上设置由多个Mo / Si对层构成的复合层，在该复合层中形成闪耀槽。从等离子体发射的辐射入射到该EUV收集镜上，并被反射或衍射。反射的EUV辐射（包括衍射的EUV）进行到中间焦点IF。由于其反射角或衍射角不同，其他波长的辐射进入除了该焦点IF之外的某个位置。具有开口部分的SPF屏蔽设置在焦点IF处。因此，只有EUV辐射通过开口部分并被提供给曝光装置，而另一辐射被屏蔽件遮挡。

52. 发明授权

US07923705B2 Extreme ultra violet light source apparatus 有权
标题翻译：极紫外光源装置
公开(公告)号：US07923705B2
公开(公告)日：2011-04-12
申请号：US12385835
申请日：2009-04-21
申请人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani , Osamu Wakabayashi
发明人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani , Osamu Wakabayashi
IPC分类号： G21G4/00
CPC分类号： G03F7/70891 , G03F7/70033 , G03F7/7085 , G03F7/70883 , H05G2/008
摘要： An EUV light source apparatus capable of easily detecting deterioration etc. of a window of an EUV light generating chamber. The EUV light source apparatus includes a driver laser, an EUV light generating chamber, a window which passes the laser beam into the EUV light generating chamber, an EUV light collector mirror, laser beam focusing optics which focuses a laser beam onto a trajectory of a target material, a temperature sensor which detects a temperature of the window, and a laser beam optics deterioration determination processing unit which determines deterioration of the window based on the temperature of the window detected by the temperature sensor when extreme ultra violet light is generated.
摘要翻译： EUV光源装置，能够容易地检测EUV光产生室的窗口的劣化等。 EUV光源装置包括驱动激光器，EUV光产生室，将激光束通入EUV光产生室的窗口，EUV聚光镜，激光束聚焦光学器件，其将激光束聚焦到目标材料，检测窗口的温度的温度传感器，以及激光束光学劣化判定处理单元，其基于当产生极紫外光时由温度传感器检测到的窗口的温度来确定窗口的劣化。

53. 发明申请

US20100078580A1 Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device 有权
标题翻译：极紫外光源装置，用于极紫外光源装置的激光光源装置及用于极紫外光源装置的可饱和吸收器的控制方法
公开(公告)号：US20100078580A1
公开(公告)日：2010-04-01
申请号：US12566865
申请日：2009-09-25
申请人： Akira Endo , Krzysztof Nowak , Hideo Hoshino , Tatsuya Ariga , Masato Moriya , Osamu Wakabayashi
发明人： Akira Endo , Krzysztof Nowak , Hideo Hoshino , Tatsuya Ariga , Masato Moriya , Osamu Wakabayashi
IPC分类号： G02B26/02 , G21K1/00
CPC分类号： H05G2/003 , H01S3/005 , H01S3/0064 , H01S3/2316 , H05G2/008
摘要： An EUV light source of the present invention is capable of using a saturable absorber stably and continuously in a high heat load state. A saturable absorber (SA) device is disposed on a laser beam line to absorb feeble light, such as self-excited oscillation light, parasitic oscillation light or return light. SA gas from an SA gas cylinder and buffer gas from a buffer gas cylinder are mixed to be a mixed gas. The mixed gas is supplied to an SA gas cell via a supply pipeline, and absorbs the feeble light included in the laser beam. The mixed gas is exhausted via an exhaust pipeline, and is sent to a heat exchanger. The mixed gas, cooled down by a heat exchanger, is sent back to the SA gas cell by a circulation pump.
摘要翻译：本发明的EUV光源能够在高热负荷状态下稳定且连续地使用饱和吸收体。可饱和吸收体（SA）装置设置在激光束线上以吸收诸如自激振荡光，寄生振荡光或返回光的微弱光。来自SA气瓶的SA气体和来自缓冲气瓶的缓冲气体混合成混合气体。混合气体经由供给管路供给到SA气室，吸收激光束中包含的微弱光。混合气体通过排气管道排出，并被送到热交换器。由热交换器冷却的混合气体通过循环泵送回到SA气室。

54. 发明申请

US20100078577A1 Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method of adjusting laser light source device for extreme ultraviolet light source device 有权
标题翻译：极紫外光源装置，用于极紫外光源装置的激光光源装置以及用于极紫外光源装置调整激光光源装置的方法
公开(公告)号：US20100078577A1
公开(公告)日：2010-04-01
申请号：US12560864
申请日：2009-09-16
申请人： Masato Moriya , Hideo Hoshino , Osamu Wakabayashi , Hakaru Mizoguchi
发明人： Masato Moriya , Hideo Hoshino , Osamu Wakabayashi , Hakaru Mizoguchi
IPC分类号： G21K5/00 , H01S3/10
CPC分类号： H01S3/10 , H01S3/005 , H01S3/0064 , H01S3/034 , H01S3/1061 , H01S3/1307 , H01S3/136 , H01S3/2232 , H01S3/2316 , H05G2/003 , H05G2/005 , H05G2/008
摘要： An EUV light source device properly compensates the wave front of laser beam which is changed by heat. A wave front compensator and a sensor are provided in an amplification system which amplifies laser beam. The sensor detects and outputs changes in the angle (direction) of laser beam and the curvature of the wave front thereof. A wave front compensation controller outputs a signal to the wave front compensator based on the measurement results from the sensor. The wave front compensator corrects the wave front of the laser beam to a predetermined wave front according to an instruction from the wave front compensation controller.
摘要翻译： EUV光源装置适当地补偿由热量改变的激光束的波前。在放大激光束的放大系统中提供波前补偿器和传感器。传感器检测并输出激光束的角度（方向）和其波前的曲率的变化。波前补偿控制器根据传感器的测量结果向波前补偿器输出信号。波前补偿器根据波前补偿控制器的指令将激光束的波前校正到预定的波前。

55. 发明申请

US20100025231A1 Method for cleaning optical element of EUV light source device and optical element cleaning device 有权
标题翻译：用于清洁EUV光源装置和光学元件清洁装置的光学元件的方法
公开(公告)号：US20100025231A1
公开(公告)日：2010-02-04
申请号：US12148969
申请日：2008-04-24
申请人： Masato Moriya , Yoshifumi Ueno , Tamotsu Abe , Akira Sumitani
发明人： Masato Moriya , Yoshifumi Ueno , Tamotsu Abe , Akira Sumitani
IPC分类号： C23C14/34 , B08B7/00
CPC分类号： H05G2/001 , G03F7/70033 , H05G2/005
摘要： A method for cleaning an optical element of an extreme ultraviolet light source device for removing, from the optical element in a chamber, scattered matter generated together with extreme ultraviolet light by plasma formed through laser beam excitation of a target in the chamber, the method which comprises: making the scattered matter generated by the plasma no larger than nanosize by using solid tin as the target and using a CO2 laser as an excitation source of the solid tin; and imparting, to the scattered matter no larger than the nanosize adhered to the optical element, an effect of overcoming the adherence of the scattered matter.
摘要翻译：一种用于清除极紫外光源装置的光学元件的方法，用于从腔室中的光学元件除去通过室中的靶的激光束激发而形成的等离子体与极紫外光一起产生的散射物质，包括：通过使用固体锡作为目标并使用CO 2激光器作为固体锡的激发源，使由等离子体产生的散射物质不大于纳米尺寸; 并且对不大于粘附到光学元件的纳米尺度的散射物质赋予克服散射物质的粘附的效果。

56. 发明申请

US20090301517A1 METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GENERATOR 有权
标题翻译： EUV光发生器清洗收集器镜的方法和装置
公开(公告)号：US20090301517A1
公开(公告)日：2009-12-10
申请号：US12478083
申请日：2009-06-04
申请人： Takeshi Asayama , Hiroshi Someya , Masato Moriya , Hideo Hoshino , Tamotsu Abe
发明人： Takeshi Asayama , Hiroshi Someya , Masato Moriya , Hideo Hoshino , Tamotsu Abe
IPC分类号： B08B7/00
CPC分类号： B08B7/00 , B08B7/0035 , B08B13/00
摘要： A method for cleaning collector mirrors in an EUV light generator in which a target is made into a plasma state and EUV light generated is collected by a collector mirror, the method being adopted to the EUV light generator for cleaning contaminants adhering thereto, the method comprising: preparing at least two collector mirrors; locating one of the mirrors at an EUV light condensing position while locating the other mirror at a cleaning position; determining whether the mirror at the cleaning position is cleaned while determining whether the mirror at the light condensing position requires cleaning; and once determined that the mirror at the cleaning position is cleaned and the mirror at the light condensing position requires cleaning, conveying the mirror at the light condensing position and requiring cleaning to the cleaning position while conveying the mirror at the cleaning position and having been cleaned to the light condensing position.
摘要翻译：一种在EUV光发生器中清洁收集反射镜的方法，其中靶产生等离子体状态，并且通过集光镜收集产生的EUV光，该方法被用于EUV发光器，用于清除附着在其上的污染物，该方法包括：准备至少两个收集镜; 将其中一个反射镜定位在EUV聚光位置，同时将另一个反射镜定位在清洁位置; 确定在清洁位置处的反射镜是否被清洁，同时确定在聚光位置处的反射镜是否需要清洁; 并且一旦确定在清洁位置处的反射镜被清洁并且聚光位置处的反射镜需要清洁，则在反射镜处于聚光位置并且在将反射镜输送到清洁位置并且被清洁时需要清洁到清洁位置到聚光位置。

57. 发明申请

US20090159222A1 HOLDING MEMBER FOR WINDOW SCREEN 审中-公开
标题翻译：控制会员窗口窗口
公开(公告)号：US20090159222A1
公开(公告)日：2009-06-25
申请号：US12096391
申请日：2007-08-03
申请人： Masato Moriya , Fumio Sasaki
发明人： Masato Moriya , Fumio Sasaki
IPC分类号： E06B9/24
CPC分类号： E06B9/52 , E06B2009/527 , F16B5/0692
摘要： [Object] To provide a holding member for a net for a screen door effective for fixing a net for a screen door having fine filaments and a fine mesh compared with a known insect protection net to a frame body for use in a screen door.[Solving Means] A holding member 14 is constructed by providing a pair of elastically deformable leg ridges 16 being fitted into a latch groove 18 under a condition of being in pressure contact with an inward projecting edge 19 thereof, to a cover plate 15 for covering the latch groove 18. A soft pressure-contact portion 15a being in pressure contact with the net 12 sandwiched between the same and an outer surface 19a of the inward projecting edge 19 of the latch groove 18 is integrally formed at an outer side of the leg ridge 16 of the cover plate 15. In the pressure-contact portion 15a, an acute head-shaped projecting ridge 15b being elastically in pressure contact with the net sandwiched between the same and the outer surface of the inward projecting edge 19 of the latch groove 18 is projected and the projecting ridge has elasticity so as to be deformed by unevenness of the net surface.
摘要翻译：本发明提供一种用于筛网门的保持构件，其有效地固定具有细丝的筛网的网和与已知的防虫网相比较的细筛网到用于筛网门的框体。 [解决方案]保持构件14通过在与其向内突出的边缘19压力接触的状态下设置一对可弹性变形的腿脊16而构成，并将其嵌入到闩锁槽18中，以覆盖盖板15 闩锁槽18.与被夹在其间的网12压力接触的软压接部15a和闩锁槽18的向内突出的边缘19的外表面19a一体地形成在腿的外侧在压接部分15a中，与夹在其间的网与弹性槽的向内突出的边缘19的外表面弹性地压接的尖锐的头部形状的突出脊15b 18突出并且突出的脊具有弹性，以便由于网表面的不平坦而变形。

58. 发明授权

US07472738B2 Screen device 有权
标题翻译：屏幕设备
公开(公告)号：US07472738B2
公开(公告)日：2009-01-06
申请号：US10562660
申请日：2004-06-29
申请人： Yoji Kamosawa , Hirotsugu Toda , Mitsuhiko Chino , Masato Moriya
发明人： Yoji Kamosawa , Hirotsugu Toda , Mitsuhiko Chino , Masato Moriya
IPC分类号： A47H5/00 , A47H1/00 , A47G5/02
CPC分类号： E06B9/52 , E06B9/522 , E06B2009/543
摘要： A screen device including a screen guide that has a simple structure, stably operates, and, in a guided-out state, can be formed in a straight rail-like shape. A screen guide of the screen device includes a large number of guide pieces, each formed in an approximately U-shape by a bottom and standing walls respectively extending along the end of a screen and the external side surfaces of the screen, and having a structure in which passage holes are formed along the tops of the standing walls, two strings of wire members are exerted through the respective passage holes, and, when the screen guide is guided out along the end of the screen, the serial contact surfaces of the adjacent guide pieces abut against each other.
摘要翻译：包括具有简单结构，稳定操作并且在导出状态下的屏幕引导件的屏幕装置可以形成为直轨形。屏幕装置的屏幕引导件包括大量的引导件，每个引导件通过底部形成为大致U形，并且分别沿着屏幕的端部和屏幕的外侧表面延伸，并且具有结构其中沿着立壁的顶部形成通道孔，通过相应的通孔施加两串线构件，并且当屏幕导向件沿着屏幕的端部被引出时，相邻的连接件的串联接触表面引导件相互抵靠。

59. 发明申请

US20070068633A1 Sliding screen door 有权
标题翻译：滑动筛门
公开(公告)号：US20070068633A1
公开(公告)日：2007-03-29
申请号：US10576261
申请日：2004-10-20
申请人： Mitsuhiko Chino , Hirotsugu Toda , Masato Moriya , Yoji Kamosawa
发明人： Mitsuhiko Chino , Hirotsugu Toda , Masato Moriya , Yoji Kamosawa
IPC分类号： A47H1/00
CPC分类号： E06B9/52 , E06B2009/543
摘要： The present invention is constructed such that in a sliding screen door in which a net is formed to be capable of expansion and contraction by being alternately folded back in a reverse direction, and is formed to be capable of freely opening and closing by horizontal pulling, a net guide for guiding the aforementioned net is formed to be able to form the net guide into a straight line-shape in a condition of being led out from a frame member, and a movement of a net-holding member that follows the net guide is made smooth, and many of the guiding elements form the net guide 12 for guiding the lower end of the net, which is moved out from and into an interior of a vertical frame member 6, from the lower end of the vertical frame member 6 that is attached to both ends of the net in an open and close direction in response to the open-and-close movement of the net, into an approximately U-shape composed of a bottom portion and rising wall portions, and are mutually and flexibly connected by means of inserting a series of wire members 16 into through holes that follow a tip end portions of the rising wall portions, and are formed into a series of guide rail that is serially in contact with each other by means of rising wall portions of the adjoining guiding elements, and that in the sliding screen door, a net-holding member 20 which is engaged with the aforementioned guide rail in a manner so as to be movable along the guide rail, and which suppresses an end portion of the net to be disengaged from the net guide by means of directly or indirectly holding the end portion of the net is provided in the aforementioned guide rail.
摘要翻译：本发明构造成使得在其中网被形成为能够通过相反方向交替地折叠而能够膨胀和收缩的滑动筛门中，并且通过水平拉动形成为能够自由地打开和关闭，形成用于引导上述网的网状导向件，能够在从框架件引出的状态下将网状引导件形成为直线状，并且使网状部件沿着网状引导件并且许多引导元件形成网引导件12，用于引导从垂直框架构件6的下端移出和垂直框架构件6的内部的网的下端其响应于网的开启和关闭运动而沿打开和关闭的方向附接到网的两端，形成由底部和上升壁部分组成的大致U形，并且彼此相互和灵活地连接的通过将一系列线构件16插入到沿着上升壁部分的尖端部分的通孔中，并且形成为一系列导轨，该导轨通过上升的壁部分的上升部分彼此串联接触相邻的引导元件，并且在滑动筛门中具有网状保持构件20，其以能够沿着导轨移动的方式与上述导轨接合，并且将网的端部抑制为通过直接或间接地保持网的端部而与网导向件脱离设置在上述导轨中。

60. 发明授权

US6144397A Laser marking method and an apparatus thereof 失效
标题翻译：激光打标方法及其装置
公开(公告)号：US6144397A
公开(公告)日：2000-11-07
申请号：US982431
申请日：1997-12-02
申请人： Teiichirou Chiba , Masato Moriya , Akihiko Souda
发明人： Teiichirou Chiba , Masato Moriya , Akihiko Souda
IPC分类号： B23K26/00 , B23K26/06 , B23K26/067 , B23K26/08 , G02B27/12 , H01L21/02 , H01L23/544 , B41J27/00
CPC分类号： B23K26/0608 , B23K26/066 , B23K26/067 , B23K26/08 , B23K26/082 , B23K26/0821 , G02B27/126 , H01L23/544 , H01L2223/54406 , H01L2223/54473 , H01L2924/0002
摘要： A laser marking method and an apparatus thereof which realize stamp processing with a beautiful appearance and a high precision, without reducing the manufacturing efficiency. The laser marking method comprises a step of sequentially displaying divisional patterns each corresponding to one scanning line of a first deflector, a step of sequentially scanning the divisional patterns with a laser beam from a laser oscillator by the first deflector, and a step of moving a stamp position on a work surface for every one of scanning transmission beams respectively transmitted through the divisional patterns, in a direction perpendicular to a scanning direction, by a second deflector, thereby to synthesize and stamp the divisional patterns. The laser beam from the laser oscillator is divided into two or more sections in a direction perpendicular to an optical axis of the laser beam, and the two or more sections of the laser beam divided are partially superposed to equalize an energy distribution at least in one direction perpendicular to the scanning direction of the laser beam transmitted through the mask.
摘要翻译：一种激光打标方法及其装置，其在不降低制造效率的情况下实现具有美观和高精度的印模处理。激光打标方法包括依次显示与第一偏转器的一条扫描线相对应的分割图案的步骤，通过第一偏转器用来自激光振荡器的激光束顺序扫描分割图案的步骤，以及移动通过第二偏转器在与扫描方向垂直的方向上分别透过分割图案的每一个扫描透射光束的工作表面上的印模位置，从而合成和印模分割图案。来自激光振荡器的激光束在与激光束的光轴垂直的方向上被分成两个或更多个部分，并且分割的激光束的两个或多个部分被部分地重叠以至少在一个等于一个的能量分布方向垂直于透过掩模的激光束的扫描方向。

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