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    • 51. 发明授权
    • Method for improved die release of a semiconductor device from a wafer
    • 用于从晶片改进半导体器件脱模的方法
    • US06544898B2
    • 2003-04-08
    • US09891105
    • 2001-06-25
    • Bruce PolsonNan ZhangHoward P. Wilson
    • Bruce PolsonNan ZhangHoward P. Wilson
    • H01L2100
    • B81C1/00873B81C2201/014
    • A microelectromechanical (MEMS) device and a method of fabricating a MEMS device are provided. The method of fabricating the MEMS device includes the steps of: etching a die release trench in a primary handle layer of a wafer having the handle layer, an etch-stop layer disposed on the primary handle layer, and a device layer disposed on the etch-stop layer; patterning a release trench in the device layer that is aligned with the release trench in the primary handle layer; temporarily attaching an additional handle layer to the primary handle layer; etching the device layer to define a structure in the device layer; removing the etch-stop layer; and removing the additional handle layer to release the die.
    • 提供了一种微机电(MEMS)器件和MEMS器件的制造方法。 制造MEMS器件的方法包括以下步骤:蚀刻具有手柄层的晶片的主手柄层中的裸片释放沟槽,设置在主手柄层上的蚀刻停止层以及设置在蚀刻上的器件层 停留层 图案化在与主手柄层中的释放沟槽对准的器件层中的释放沟槽; 临时附加手柄层到主手柄层; 蚀刻器件层以限定器件层中的结构; 去除蚀刻停止层; 并移除附加手柄层以释放模具。
    • 54. 发明授权
    • Providing variable cell density and sizes in a radiation detector
    • 在辐射检测器中提供可变细胞密度和尺寸
    • US08791514B2
    • 2014-07-29
    • US13540079
    • 2012-07-02
    • Debora HenselerRonald GraziosoNan Zhang
    • Debora HenselerRonald GraziosoNan Zhang
    • H01L27/146G01T1/24
    • G01T1/248H01L27/14658
    • An apparatus and method to decrease light saturation in a photosensor array and increase detection efficiency uses a light distribution profile from a scintillator-photodetector geometry to configure the photosensor array to have a non-uniform sensor cell pattern, with varying cell density and/or varying cell size and shape. A solid-state photosensor such as a SiPM sensor having such a non-uniform cell structure realizes improved energy resolution, higher efficiency and increased signal linearity. In addition the non-uniform sensor cell array can have improved timing resolution due to improvements in statistical fluctuations. A particular embodiment for such photosensors is in PET medical imaging.
    • 降低光传感器阵列中的光饱和度并提高检测效率的装置和方法使用来自闪烁体 - 光电检测器几何形状的光分布分布来配置光传感器阵列具有不均匀的传感器单元图案,具有变化的单元密度和/或变化 细胞大小和形状。 诸如具有这种非均匀单元结构的SiPM传感器的固态光电传感器实现了改进的能量分辨率,更高的效率和更高的信号线性度。 此外,由于统计波动的改善,非均匀传感器单元阵列可以改善时序分辨率。 这种感光器的特定实施例是在PET医学成像中。