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    • 55. 发明申请
    • HIGH-VOLTAGE SEMICONDUCTOR-ON-INSULATOR DEVICE
    • 高压半导体绝缘体器件
    • US20120132994A1
    • 2012-05-31
    • US12955088
    • 2010-11-29
    • William F. Clark, JR.Yun Shi
    • William F. Clark, JR.Yun Shi
    • H01L27/12H01L21/322
    • H01L21/84H01L27/1203
    • Embodiments of the present invention relate generally to semiconductor devices and, more particularly, to a structure for high-voltage (HV) semiconductor-on-insulator (SOI) devices and methods for their formation. In one embodiment, the invention provides a semiconductor-on-insulator (SOI) device comprising: a substrate; an insulator layer atop the substrate; a polysilicon layer atop the insulator layer; a device layer atop the polysilicon layer, the device layer comprising: a P-well; an N-well; and an undoped silicon region between the P-well and the N-well; and a trench isolation adjacent one of the P-well and the N-well and extending through the device layer and the polysilicon layer to the insulator layer.
    • 本发明的实施例大体上涉及半导体器件,更具体地,涉及一种用于高电压(HV)绝缘体上半导体(SOI)器件的结构及其形成方法。 在一个实施例中,本发明提供了一种绝缘体上半导体器件(SOI)器件,包括:衬底; 位于基板顶部的绝缘体层; 在绝缘体层顶上的多晶硅层; 所述多晶硅层顶部的器件层,所述器件层包括:P阱; 一个N井; 以及P阱和N阱之间的未掺杂的硅区; 以及邻近P阱和N阱中的一个的沟槽隔离并延伸穿过器件层和多晶硅层到绝缘体层。
    • 56. 发明授权
    • Semiconductor structure including a high performance FET and a high voltage FET on a SOI substrate
    • 在SOI衬底上包括高性能FET和高电压FET的半导体结构
    • US08120110B2
    • 2012-02-21
    • US12188381
    • 2008-08-08
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng LiuYun Shi
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng LiuYun Shi
    • H01L27/12
    • H01L27/088H01L21/823462H01L21/823481H01L27/1207
    • A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.
    • 第一场效应晶体管包括栅极电介质和位于绝缘体上半导体(SOI))衬底中顶部半导体层的第一部分上方的栅电极。 第二场效应晶体管包括掩埋绝缘体层的一部分和位于掩埋绝缘体层下方的源区和漏区。 在一个实施例中,第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中,第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。 第一场效应晶体管可以是高性能器件,第二场效应晶体管可以是高电压器件。 还提供了用于半导体结构的设计结构。