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    • 43. 发明授权
    • Electrically programmable antifuses and methods for forming the same
    • 电子可编程反熔丝及其形成方法
    • US06388305B1
    • 2002-05-14
    • US09466495
    • 1999-12-17
    • Claude L. BertinErik L. HedbergRussell J. HoughtonMax G. LevyRick L. MohlerWilliam R. TontiWayne M. Trickle
    • Claude L. BertinErik L. HedbergRussell J. HoughtonMax G. LevyRick L. MohlerWilliam R. TontiWayne M. Trickle
    • H01L2900
    • H01L21/763H01L23/5252H01L27/10861H01L27/10894H01L2924/0002H01L2924/00
    • A first one time, voltage programmable logic element is provided in a semiconductor substrate of first conductivity type that comprises a first layer beneath a surface of the substrate, the first layer having a second conductivity type; and a trench formed through the surface and passing through the first layer. The trench comprises an interior surface, a dielectric material lining the interior surface and a conductive material filling the lined trench. The first logic element is configured so that a predetermined voltage or higher applied between the conductive material and the first layer causes a breakdown within a region of the trench. A second one time, voltage programmable logic element is provided in a semiconductor substrate of first conductivity type that comprises a first layer formed in a surface of the substrate, the first layer having a second conductivity type; and a trench formed through the surface and passing through the first layer. The trench comprises an interior surface, a first dielectric material lining the interior surface and a second dielectric material filling the lined trench. The second logic element further comprises a dielectric layer formed over a portion of the first layer and contacting the first dielectric material lining the trench at a merge location; and an electrode extending over a portion of both the dielectric layer and the filled trench. The second logic element is configured so that a predetermined voltage or higher applied between the electrode and the first layer causes a breakdown near the merge location.
    • 首先,电压可编程逻辑元件设置在第一导电类型的半导体衬底中,该第一导电类型的半导体衬底包括在衬底的表面下面的第一层,第一层具有第二导电类型; 以及通过表面形成并穿过第一层的沟槽。 沟槽包括内表面,衬在内表面的电介质材料和填充衬里沟槽的导电材料。 第一逻辑元件被配置为使得施加在导电材料和第一层之间的预定电压或更高的电压导致沟槽区域内的击穿。 第二次,电压可编程逻辑元件设置在第一导电类型的半导体衬底中,该半导体衬底包括形成在衬底的表面中的第一层,第一层具有第二导电类型; 以及通过表面形成并穿过第一层的沟槽。 沟槽包括内表面,衬在内表面的第一电介质材料和填充衬里沟槽的第二电介质材料。 第二逻辑元件还包括形成在第一层的一部分上并且在合并位置处接触衬套在沟槽上的第一介电材料的电介质层; 以及在电介质层和填充沟槽的一部分上延伸的电极。 第二逻辑元件被配置为使得施加在电极和第一层之间的预定电压或更高的电压导致合并位置附近的击穿。
    • 47. 发明授权
    • Electronic fuse structure and method of manufacturing
    • 电子熔断器结构及制造方法
    • US06633055B2
    • 2003-10-14
    • US09303509
    • 1999-04-30
    • Claude L. BertinErik L. HedbergMax G. LevyTimothy D. SullivanWilliam R. Tonti
    • Claude L. BertinErik L. HedbergMax G. LevyTimothy D. SullivanWilliam R. Tonti
    • H01L2974
    • H01L23/5256H01L2924/0002H01L2924/00
    • A gap conductor structure for an integrated electronic circuit that may function as an electronic fuse device or as a low capacitance inter level signal line is integrated as part of the semi-conductor chip wiring. The gap conducting structure includes one or more air gap regions of predefined volume that fully or partially exposes a length of interlevel conductor layer in an IC. Alternately, the air gap region may wholly located within the dielectric region below a corresponding conductor and separated by insulator. When functioning as a fuse, the gap region acts to reduce thermal conductivity away from the exposed portion of the conductor enabling generation of higher heat currents in the conducting line with lower applied voltages sufficient to melt a part of the conducting line. The presence of gaps, and hence, the fuses, are scalable and may be tailored to the capacity of currents they must carry with the characteristics of the fuses defined by a circuit designer. Furthermore, conducting structures completely or partially exposed in the air gap may function as low capacitance minimum delay transmission lines.
    • 作为半导体芯片布线的一部分,集成电子电路的可用作电子熔断器件或低电容级间信号线的间隙导体结构被集成。 间隙导电结构包括一个或多个预定体积的气隙区域,其完全或部分地暴露IC中的层间导体层的长度。 或者,气隙区域可以完全位于相应导体下方的电介质区域内并被绝缘体分隔开。 当用作熔丝时,间隙区域用于降低远离导体的暴露部分的热导率,使得能够以较低的施加电压在导线中产生更高的热流,从而熔化导电线的一部分。 间隙的存在以及保险丝的存在是可扩展的,并且可以根据电路设计者定义的保险丝的特性来适应其必须携带的电流的容量。 此外,在气隙中完全或部分暴露的导电结构可用作低电容最小延迟传输线
    • 50. 发明授权
    • Carrier for test, burn-in, and first level packaging
    • 用于测试,老化和一级包装的载体
    • US07132841B1
    • 2006-11-07
    • US09588617
    • 2000-06-06
    • Claude L. BertinWayne F. EllisMark W. KelloggWilliam R. TontiJerzy M. ZalesinskiJames M. LeasWayne J. Howell
    • Claude L. BertinWayne F. EllisMark W. KelloggWilliam R. TontiJerzy M. ZalesinskiJames M. LeasWayne J. Howell
    • G01R31/26G01R31/28
    • G01R31/2867G11C5/04G11C29/06G11C29/1201G11C29/48G11C29/56016G11C29/785G11C2029/2602G11C2029/5602H01L22/22H01L22/32H01L2924/0002H01L2924/00
    • A plurality of semiconductor devices are provided on a carrier for testing or burning-in. The carrier is then cut up to provide single chip-on-carrier components or multi-chip-on-carrier components. The carrier is used as a first level package for each chip. Thus, the carrier serves a dual purpose for test and burn-in and for packaging. A lead reduction mechanism, such as a built-in self-test engine, can be provided on each chip or on the carrier and is connected to contacts of the carrier for the testing and burn-in steps. The final package after cutting includes at least one known good die and may include an array of chips on the carrier, such as a SIMM or a DIMM. The final package can also be a stack of chips each mounted on a separate carrier. The carriers of the stack are connected to each other through a substrate mounted along a side face of the stack that is electrically connected to a line of pads along an edge of each carrier. The carrier is formed of a flex material. It can also be formed of printed circuit board material. A window in the flex permits invoking redundancy on each chip after burn-in is complete, significantly improving yield as compared with present schemes that do not permit repair after burn-in.
    • 在载体上提供多个半导体器件用于测试或烧录。 然后将载体切割以提供单个芯片上载波部件或多芯片载波部件。 载体用作每个芯片的第一级封装。 因此,载体用于测试和烧录和包装的双重目的。 可以在每个芯片或载体上提供诸如内置自检引擎的引线减少机构,并且连接到载体的触点用于测试和老化步骤。 切割后的最终包装包括至少一个已知的良好的模具,并且可以包括载体上的芯片阵列,例如SIMM或DIMM。 最终的包装也可以是一堆芯片,每个芯片都安装在单独的载体上。 堆叠的载体通过沿着堆叠的侧面安装的基板彼此连接,该基板沿着每个载体的边缘电连接到焊盘一排。 载体由柔性材料形成。 它也可以由印刷电路板材料形成。 柔性窗口允许在烧坏完成后在每个芯片上调用冗余度,与不允许在老化后修复的现有方案相比,显着提高产量。