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41. 发明申请

US20050199811A1 Image evaluation method and microscope 失效
标题翻译：图像评估方法和显微镜
公开(公告)号：US20050199811A1
公开(公告)日：2005-09-15
申请号：US11124252
申请日：2005-05-09
申请人： Tohru Ishitani , Mitsugu Sato , Hideo Todokoro , Tadashi Otaka , Takashi Iizumi , Atsushi Takane
发明人： Tohru Ishitani , Mitsugu Sato , Hideo Todokoro , Tadashi Otaka , Takashi Iizumi , Atsushi Takane
IPC分类号： H01J37/04 , H01J37/22 , H01J37/26 , H01J37/28 , G21K7/00
CPC分类号： H01J37/28 , H01J37/222 , H01J37/263 , H01J2237/2823
摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.
摘要翻译：能够客观评价显微镜图像的图像分辨率的图像评价方法。图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化，建立平均值作为图像的整个区域或图像的部分的分辨率评估值。该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。

42. 发明授权

US06936818B2 Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US06936818B2
公开(公告)日：2005-08-30
申请号：US10681116
申请日：2003-10-09
申请人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
发明人： Atsushi Takane , Haruo Yoda , Hideo Todokoro , Fumio Mizuno , Shoji Yoshida , Mitsuji Ikeda , Mitsugu Sato , Makoto Ezumi
IPC分类号： G01Q10/00 , G01Q30/04 , G01Q30/02 , H01J37/22 , H01J37/21
CPC分类号： G06T5/002 , G06T5/003 , G06T5/20 , G06T5/50 , G06T7/13 , G06T7/62 , G06T2207/10061 , G06T2207/30148 , H01J37/21 , H01J37/222 , H01J37/28 , H01J2237/21 , H01J2237/216 , H01J2237/221 , H01J2237/226 , H01J2237/281 , H01J2237/2815 , H01J2237/2817
摘要： It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.
摘要翻译：本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器，发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

43. 发明授权

US06875984B2 Bio electron microscope and observation method of specimen 失效
标题翻译：生物电子显微镜和样品观察方法
公开(公告)号：US06875984B2
公开(公告)日：2005-04-05
申请号：US10621444
申请日：2003-07-18
申请人： Hiroshi Kakibayashi , Shigeyuki Hosoki , Yuji Takagi , Ryo Miyake , Kuniyasu Nakamura , Mitsugu Sato , Hiroyuki Kobayashi
发明人： Hiroshi Kakibayashi , Shigeyuki Hosoki , Yuji Takagi , Ryo Miyake , Kuniyasu Nakamura , Mitsugu Sato , Hiroyuki Kobayashi
IPC分类号： G01N23/04 , G01N1/28 , G01N23/225 , G01N33/483 , G01N37/00 , H01J37/20 , H01J37/22 , H01J37/26 , H01J37/28 , H01J49/44
CPC分类号： H01J37/22 , H01J37/26 , H01J2237/05 , H01J2237/2809 , H01J2237/2813
摘要： A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.
摘要翻译：一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

44. 发明授权

US06864493B2 Charged particle beam alignment method and charged particle beam apparatus 有权
标题翻译：带电粒子束对准方法和带电粒子束装置
公开(公告)号：US06864493B2
公开(公告)日：2005-03-08
申请号：US10082288
申请日：2002-02-26
申请人： Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
发明人： Mitsugu Sato , Tadashi Otaka , Makoto Ezumi , Atsushi Takane , Shoji Yoshida , Satoru Yamaguchi , Yasuhiko Ozawa
IPC分类号： H01J37/147 , H01J37/28 , H01J37/04
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/1501 , H01J2237/153
摘要： An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
摘要翻译：本发明的目的是提供一种带电粒子束装置和带电粒子束装置的对准方法，其使得即使当带电粒子束的状态改变时也能够容易地对准带电粒子束的光轴。本发明包括用于计算对物镜执行轴对准的对准偏转器的偏转量的计算装置，用于计算偏转量的多种计算方法被存储在计算装置中，以及选择装置，用于至少选择提供了一种计算方法。

45. 发明授权

US06855931B2 Scanning electron microscope and sample observation method using the same 有权
标题翻译：扫描电子显微镜和使用其的样品观察方法
公开(公告)号：US06855931B2
公开(公告)日：2005-02-15
申请号：US10815817
申请日：2004-04-02
申请人： Tetsuya Sawahata , Mitsugu Sato
发明人： Tetsuya Sawahata , Mitsugu Sato
IPC分类号： H01J37/22 , G01N23/225 , G01Q30/02 , G01Q30/20 , G21K7/00 , H01J37/141 , H01J37/21 , H01J37/256 , G01N23/00 , H01J37/28
CPC分类号： H01J37/256 , G01N23/2252 , H01J37/141 , H01J2237/2561
摘要： According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.
摘要翻译：根据本发明，在具有透镜系统的扫描电子显微镜中，新提供将物镜的电流设定为零或弱激励状态的第一低倍率模式，将物镜的电流设定为与加速电压的平方根成比例地变化的值的倍率模式。扫描电子显微镜具有在第一低倍率模式下进行正常的样本图像（二次电子图像）观察的结构，并且当执行X射线分析时，将第一低倍率模式切换到第二低倍率模式。结果，可以以低倍率模式进行样本图像（二次电子图像）观察和X射线分析。

46. 发明授权

US06838667B2 Method and apparatus for charged particle beam microscopy 失效
标题翻译：带电粒子束显微镜的方法和装置
公开(公告)号：US06838667B2
公开(公告)日：2005-01-04
申请号：US09983898
申请日：2001-10-26
申请人： Ruriko Tsuneta , Masanari Koguchi , Mari Nozoe , Muneyuki Fukuda , Mitsugu Sato
发明人： Ruriko Tsuneta , Masanari Koguchi , Mari Nozoe , Muneyuki Fukuda , Mitsugu Sato
IPC分类号： H01J37/04 , G01Q30/04 , H01J37/153 , H01J37/21 , H01J37/22 , H01J37/28 , G01N23/225
CPC分类号： H01J37/21 , H01J37/226 , H01J37/28 , H01J2237/1501 , H01J2237/216 , H01J2237/2482 , H01J2237/31745 , H01J2237/31749
摘要： By use of charged particle beam images picked up in different conditions, a positional displacement caused by parallax is analyzed, and an optics of an apparatus for charged particle beam microscopy is corrected automatically. An analysis method using phase difference of Fourier transform images and having analytic accuracy lower than that for one pixel is adopted for the displacement analysis. In addition, a degree of coincidence between images calculated in this analysis method is used as a criterion for evaluating the reliability of an analysis result. Since the analysis method based on parallax is low in specimen dependency, the operation range is expanded. In addition, by adopting a high-accuracy displacement analysis method, the apparatus correction accuracy is improved by one digit. A malfunction preventing flow is added using the degree of coincidence as a judgement criterion. Thus, the apparatus can deal with unmanned operation. In addition, the degree of coincidence can be used as a monitor of inspection states or a record of states in an inspection apparatus.

47. 发明授权

US6043491A Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US6043491A
公开(公告)日：2000-03-28
申请号：US133667
申请日：1998-08-12
申请人： Yoichi Ose , Kiyomi Yoshinari , Hideo Todokoro , Mitsugu Sato
发明人： Yoichi Ose , Kiyomi Yoshinari , Hideo Todokoro , Mitsugu Sato
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/026 , H01J2237/0475
摘要： A scanning electron microscope in the present invention, by employing a retarding method and suppressing interferences between an electron beam and secondary electrons or back scattered electrons, makes it possible to obtain a clearer SEM image with a higher resolution. In the scanning electron microscope in the present invention, a shield electrode 117 is provided for shielding the electron beam 104 from electric fields of an energy analyzer 118 and a detector 121, and the energy analyzer 118 and the detector 121 are located in contact with an electron beam aperture 115 and the shield electrode 117.
摘要翻译：本发明的扫描型电子显微镜，通过采用延迟方法，抑制电子束与二次电子或背散射电子之间的干扰，能够得到更清晰的具有更高分辨率的SEM图像。在本发明的扫描型电子显微镜中，设有屏蔽电极117，用于将电子束104与能量分析器118和检测器121的电场进行屏蔽，能量分析器118和检测器121位于与电子束孔115和屏蔽电极117。

48. 发明授权

US5677530A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US5677530A
公开(公告)日：1997-10-14
申请号：US668177
申请日：1996-06-21
申请人： Mitsugu Sato , Ryuji Hoya , Yoichi Ose
发明人： Mitsugu Sato , Ryuji Hoya , Yoichi Ose
IPC分类号： H01J37/141 , G01R31/305 , H01J37/147 , H01J37/153 , H01J37/244 , H01J37/28
CPC分类号： G01R31/305 , H01J37/153 , H01J37/28
摘要： A scanning electron microscope comprising an objective lens for forming lens magnetic field on the sample side, and observing the image of the sample after detecting the secondary electrons from the sample on the upper side of the objective lens is disclosed. The accelerating electrode is arranged along the electron beam passage of the objective lens, and an positive potential is applied thereto. The electric field correction electrode is disposed outside the accelerating electrode or to the sample side. A negative potential is applied to the electric field correction electrode. An image observation with high resolution also is realized even when the sample is inclined.
摘要翻译：公开了一种扫描电子显微镜，其包括用于在样品侧形成透镜磁场的物镜，并且在从物镜的上侧的样品检测到二次电子之后观察样品的图像。加速电极沿物镜的电子束通路配置，向其施加正电位。电场校正电极设置在加速电极或样品侧的外侧。对电场校正电极施加负电位。即使样品倾斜，也可以实现高分辨率的图像观察。

49. 发明授权

US5668372A Scanning electron microscope and its analogous device 失效
标题翻译：扫描电子显微镜及其类似装置
公开(公告)号：US5668372A
公开(公告)日：1997-09-16
申请号：US615650
申请日：1996-03-13
申请人： Yuko Iwabuchi , Mitsugu Sato , Yoichi Ose
发明人： Yuko Iwabuchi , Mitsugu Sato , Yoichi Ose
IPC分类号： H01J37/20 , H01J37/12 , H01J37/153 , H01J37/244 , H01J37/28
CPC分类号： H01J37/153 , H01J37/28 , H01J2237/15
摘要： A device enables high resolution observation even when a sample is tiled. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tiled is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.
摘要翻译：即使在样品被平铺时，该装置也能够进行高分辨率观察。在物镜和样品之间设置用于产生具有与物镜的中心轴（光轴）垂直的方向的分量的电场的偏转电极装置。根据样品台的倾斜来控制施加到偏转电极装置的电压。当采样台平铺时在光轴上产生的横向电场分量由偏转电极装置产生的偏转电场来校正。这有效地抑制散光的产生，并且允许二次电子在位于比物镜更靠近电子源侧的位置处的二次电子检测器的有效到达。

50. 发明授权

US08604430B2 Method and an apparatus of an inspection system using an electron beam 有权
标题翻译：使用电子束的检查系统的方法和装置
公开(公告)号：US08604430B2
公开(公告)日：2013-12-10
申请号：US13366874
申请日：2012-02-06
申请人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
发明人： Yuko Iwabuchi , Hideo Todokoro , Hiroyoshi Mori , Mitsugu Sato , Yasutsugu Usami , Mikio Ichihashi , Satoru Fukuhara , Hiroyuki Shinada , Yutaka Kaneko , Katsuya Sugiyama , Atsuko Takafuji , Hiroshi Toyama
IPC分类号： H01J37/28
CPC分类号： H01J37/28 , G01N23/20 , G01N23/2251 , G03F7/7065 , G06T7/001 , G06T2207/10056 , G06T2207/30148 , H01J37/04 , H01J37/20 , H01J37/265 , H01J2237/04756 , H01J2237/20221 , H01J2237/2444 , H01J2237/24592 , H01J2237/2817 , H01J2237/31766
摘要： The inspection apparatus disclosed generates an electron beam, an acceleration electrode accelerates the electron beam, a convergence lens converges the electron beam, an electron beam deflector scans the beam over a sample, an objective lens converges the electron beam on the sample, a detector located between the sample and the objective lens detects charged particles emitted from the sample, a power supply applies a retarding voltage to the sample for decelerating the electron beam to the sample, an electrode is disposed between the objective lens and the sample, and a voltage is generated between the sample and the electrode by said electrode, the voltage being determined depending on the sample. The apparatus solves problems encountered in conventional inspection systems.
摘要翻译：所公开的检查装置产生电子束，加速电极加速电子束，会聚透镜会聚电子束，电子束偏转器扫描样品上的光束，物镜会将电子束会聚在样品上，检测器位于在样品和物镜之间检测从样品发射的带电粒子，电源向样品施加延迟电压以将电子束减速到样品，电极设置在物镜和样品之间，电压为通过所述电极在样品和电极之间产生，电压根据样品确定。该装置解决了常规检测系统遇到的问题。

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