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41. 发明授权

US06570207B2 Structure and method for creating vertical capacitor and anti-fuse in DRAM process employing vertical array device cell complex 失效
标题翻译：在使用垂直阵列器件单元复合体的DRAM工艺中创建垂直电容器和反熔丝的结构和方法
公开(公告)号：US06570207B2
公开(公告)日：2003-05-27
申请号：US09736496
申请日：2000-12-13
申请人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
发明人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
IPC分类号： H01L27108
CPC分类号： H01L27/10897 , H01L23/5252 , H01L27/10841 , H01L27/10864 , H01L27/10894 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit chip is provided having both a conventional DRAM vertical transfer device and an integrated vertical storage capacitor or anti-fuse that can be accessed directly without having to turn on a transfer gate. The mechanism for accessing the integrated capacitor or anti-fuse directly can be a modified doping profile within the vertical cell that provides a low resistance punch-through FET. Alternatively, the mechanism can be a pair of overlapping or nearly overlapping diffusions within the vertical cell.
摘要翻译：提供一种集成电路芯片，其具有常规DRAM垂直传送装置和可以直接访问的集成垂直存储电容器或反熔丝，而不必打开传输门。直接访问集成电容器或反熔丝的机构可以是垂直单元内的修改的掺杂分布，其提供低电阻穿通FET。或者，机构可以是垂直单元内的一对重叠或几乎重叠的扩散。

42. 发明授权

US06538295B1 Salicide device with borderless contact 有权
标题翻译：自杀式装置与无边界接触
公开(公告)号：US06538295B1
公开(公告)日：2003-03-25
申请号：US09645499
申请日：2000-08-25
申请人： Gary B. Bronner , Jeffrey P. Gambino , Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
发明人： Gary B. Bronner , Jeffrey P. Gambino , Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
IPC分类号： H01L2976
CPC分类号： H01L21/76897 , H01L27/10873 , H01L29/665
摘要： A method and structure for a field effect transistor structure for dynamic random access memory integrated circuit devices has a gate conductor, salicide regions positioned along sides of the gate conductor, a gate cap positioned above the gate conductor and at least one self-aligned contact adjacent the gate conductor.
摘要翻译：用于动态随机存取存储器集成电路器件的场效应晶体管结构的方法和结构具有栅极导体，沿着栅极导体的侧面定位的自对准硅化物区域，位于栅极导体上方的栅极帽和邻近的至少一个自对准接触门导体。

43. 发明授权

US06174762B1 Salicide device with borderless contact 失效
标题翻译：自杀式装置与无边界接触
公开(公告)号：US06174762B1
公开(公告)日：2001-01-16
申请号：US09260311
申请日：1999-03-02
申请人： Gary B. Bronner , Jeffrey P. Gambino , Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
发明人： Gary B. Bronner , Jeffrey P. Gambino , Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , William R. Tonti
IPC分类号： H01L218234
CPC分类号： H01L21/76897 , H01L27/10873 , H01L29/665
摘要： A method and structure for a field effect transistor structure for dynamic random access memory integrated circuit devices has a gate conductor, salicide regions positioned along sides of the gate conductor, a gate cap positioned above the gate conductor and at least one self-aligned contact adjacent the gate conductor.
摘要翻译：用于动态随机存取存储器集成电路器件的场效应晶体管结构的方法和结构具有栅极导体，沿着栅极导体的侧面定位的自对准硅化物区域，位于栅极导体上方的栅极帽和邻近的至少一个自对准接触门导体。

44. 发明授权

US07312529B2 Structure and method for producing multiple size interconnections 有权
标题翻译：用于生产多尺寸互连的结构和方法
公开(公告)号：US07312529B2
公开(公告)日：2007-12-25
申请号：US11160669
申请日：2005-07-05
申请人： Lawrence Clevenger , Mukta G. Farooq , Louis L. Hsu , William F. Landers , Donna S. Zupanski-Nielsen , Carl J. Radens , Chih-Chao Yang
发明人： Lawrence Clevenger , Mukta G. Farooq , Louis L. Hsu , William F. Landers , Donna S. Zupanski-Nielsen , Carl J. Radens , Chih-Chao Yang
IPC分类号： H01L23/48 , H01L23/52 , H01L23/40
CPC分类号： H05K3/3436 , H01L23/13 , H01L23/49811 , H01L23/49816 , H01L23/49838 , H01L24/11 , H01L24/12 , H01L24/17 , H01L24/49 , H01L24/73 , H01L24/81 , H01L2224/0401 , H01L2224/0603 , H01L2224/06102 , H01L2224/13099 , H01L2224/131 , H01L2224/13111 , H01L2224/1403 , H01L2224/49109 , H01L2224/81801 , H01L2924/00013 , H01L2924/00014 , H01L2924/01006 , H01L2924/01029 , H01L2924/01047 , H01L2924/0105 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H05K2201/094 , H05K2201/09736 , H05K2201/09845 , Y02P70/613 , H01L2224/29099 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： An electrical structure and method comprising a first substrate electrically and mechanically connected to a second substrate. The first substrate comprises a first electrically conductive pad and a second electrically conductive pad. The second substrate comprises a third electrically conductive pad, a fourth electrically conductive pad, and a first electrically conductive member. The fourth electrically conductive pad comprises a height that is different than a height of the first electrically conductive member. The electrically conductive member is electrically and mechanically connected to the fourth electrically conductive pad. A first solder ball connects the first electrically conductive pad to the third electrically conductive pad. The first solder ball comprises a first diameter. A second solder ball connects the second electrically conductive pad to the first electrically conductive member. The second solder ball comprises a second diameter. The first diameter is greater than said second diameter.
摘要翻译：一种电结构和方法，包括电和机械地连接到第二衬底的第一衬底。第一基板包括第一导电焊盘和第二导电焊盘。第二基板包括第三导电焊盘，第四导电焊盘和第一导电部件。第四导电焊盘包括与第一导电构件的高度不同的高度。导电构件电连接和机械地连接到第四导电垫。第一焊球将第一导电焊盘连接到第三导电焊盘。第一焊球包括第一直径。第二焊球将第二导电焊盘连接到第一导电构件。第二焊球包括第二直径。第一直径大于所述第二直径。

45. 发明授权

US07214910B2 On-chip power supply regulator and temperature control system 失效
标题翻译：片上电源调节器和温度控制系统
公开(公告)号：US07214910B2
公开(公告)日：2007-05-08
申请号：US10884933
申请日：2004-07-06
申请人： Howard Hao Chen , William J. Ferrante , Louis L. Hsu , Carl J. Radens
发明人： Howard Hao Chen , William J. Ferrante , Louis L. Hsu , Carl J. Radens
IPC分类号： H05B1/02
CPC分类号： G05D23/20 , G05D23/1931 , Y10T307/469
摘要： An on-chip temperature control system includes a temperature sensor, which monitors a temperature of a chip, and a hysteresis comparator which checks whether the temperature is in an acceptable range. A reference adjustment circuit is responsive to the hysteresis comparator to adjust an on-chip voltage to control the temperature locally by adjusting a local supply voltage, if the temperature is out of range.
摘要翻译：片上温度控制系统包括监测芯片温度的温度传感器和检查温度是否在可接受范围内的滞后比较器。如果温度超出范围，参考调节电路响应于迟滞比较器来调节片上电压以局部地调节局部电源电压来控制温度。

46. 发明授权

US07138685B2 Vertical MOSFET SRAM cell 失效
标题翻译：垂直MOSFET SRAM单元
公开(公告)号：US07138685B2
公开(公告)日：2006-11-21
申请号：US10318495
申请日：2002-12-11
申请人： Louis L. Hsu , Oleg Gluschenkov , Jack A. Mandelman , Carl J. Radens
发明人： Louis L. Hsu , Oleg Gluschenkov , Jack A. Mandelman , Carl J. Radens
IPC分类号： H01L21/00
CPC分类号： H01L27/11 , G11C11/412 , H01L21/84 , H01L27/1104 , H01L27/1203
摘要： A method of forming an SRAM cell device includes the following steps. Form pass gate FET transistors and form a pair of vertical pull-down FET transistors with a first common body and a first common source in a silicon layer patterned into parallel islands formed on a planar insulator. Etch down through upper diffusions between cross-coupled inverter FET transistors to form pull-down isolation spaces bisecting the upper strata of pull-up and pull-down drain regions of the pair of vertical pull-down FET transistors, with the isolation spaces reaching down to the common body strata. Form a pair of vertical pull-up FET transistors with a second common body and a second common drain. Then, connect the FET transistors to form an SRAM cell.
摘要翻译：形成SRAM单元装置的方法包括以下步骤。形成栅极FET晶体管并形成一对垂直下拉FET晶体管，其具有第一共同体和第一公共源，图案化为平坦绝缘体上形成平行岛的硅层。通过交叉耦合的反相器FET晶体管之间的上扩散来蚀刻，以形成将一对垂直下拉FET晶体管的上拉和下拉漏极区的上层平分的下拉隔离空间，隔离空间达到到共同的身体层。形成一对具有第二共同体和第二公共漏极的垂直上拉FET晶体管。然后，连接FET晶体管以形成SRAM单元。

47. 发明授权

US06355531B1 Method for fabricating semiconductor devices with different properties using maskless process 失效
标题翻译：使用无掩模工艺制造具有不同特性的半导体器件的方法
公开(公告)号：US06355531B1
公开(公告)日：2002-03-12
申请号：US09634225
申请日：2000-08-09
申请人： Jack A. Mandelman , Louis L. Hsu , Carl J. Radens , William R. Tonti , Li-Kong Wang
发明人： Jack A. Mandelman , Louis L. Hsu , Carl J. Radens , William R. Tonti , Li-Kong Wang
IPC分类号： H01L218236
CPC分类号： H01L21/823892 , H01L21/823807 , H01L21/82385 , Y10S438/981
摘要： A method is provided for fabricating semiconductor devices having different properties on a common semiconductor substrate. The method includes the steps of (a) forming N openings on the semiconductor substrate, wherein each opening is corresponding to a channel region of each semiconductor device, (b) forming oxide layers of an ith type on surfaces of the N openings, (c) depositing gate conductor material of an ith type over structure of the semiconductor devices, the gate conductor material of the ith type having a gate conductor work-function of an ith type, (d) removing the gate conductor material of the ith type such that a predetermined amount of the gate conductor material of the ith type remains in an ith opening to form a gate conductor material layer of the ith type on top surface in the ith opening and the gate conductor material of the ith type deposited in the structure other than the ith opening is removed, (e) removing the oxide layers of the ith type from openings other than the ith opening, (f) repeating the steps of (a) through (e) from “i=1” to “i=N”, and (g) forming at least one layer on surface of each of N gate conductor material layers in the N openings to form a gate conductor, whereby the N semiconductor devices have N gate conductors, respectively, wherein the N gate conductors have N types of gate conductor work-functions. The semiconductor devices also have channel regions of which doping levels are different from each other by implanting the channel regions with different types of implants.
摘要翻译：提供了一种在公共半导体衬底上制造具有不同特性的半导体器件的方法。该方法包括以下步骤：（a）在半导体衬底上形成N个开口，其中每个开口对应于每个半导体器件的沟道区，（b）在N个开口的表面上形成第i个类型的氧化物层，（c ）沉积所述半导体器件的第i型结构的栅极导体材料，所述第i型栅极导体材料具有第i类型的栅极导体功函数，（d）去除所述第i种类型的栅极导体材料，使得第i个类型的栅极导体材料的预定量保持在第i个开口中，以在第i个开口的顶表面上形成第i型的栅极导体材料层，并且沉积在除第除去第i个开口，（e）从第i个开口以外的开口除去第i个类型的氧化物层，（f）重复步骤（a）至（e）从“i = 1”到“i = N “，（g）在其上形成至少一层在N个开口中的N个栅极导体材料层中的每一个的表面形成栅极导体，由此N个半导体器件分别具有N个栅极导体，其中N个栅极导体具有N种类型的栅极导体功函数。半导体器件还具有通过用不同类型的植入物植入沟道区域而使掺杂水平彼此不同的沟道区域。

48. 发明授权

US07087948B2 Forming electronic structures having dual dielectric thicknesses and the structure so formed 失效
公开(公告)号：US07087948B2
公开(公告)日：2006-08-08
申请号：US10995444
申请日：2004-11-23
申请人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , Richard A. Strub , William R. Tonti
发明人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , Richard A. Strub , William R. Tonti
IPC分类号： H01L27/108 , H01L29/76 , H01L29/94 , H01L31/119
CPC分类号： H01L29/66181 , H01L21/823462 , H01L27/10861 , H01L27/10894 , H01L29/945
摘要： A structure including a first device and a second device, wherein the second device has a dielectric thickness greater than the dielectric thickness of the first device, and the method of so forming the structure.

49. 发明授权

US07023528B2 Hybrid electronic mask 有权
标题翻译：混合电子面具
公开(公告)号：US07023528B2
公开(公告)日：2006-04-04
申请号：US10167327
申请日：2002-06-10
申请人： Louis L. Hsu , Carl J. Radens , Li-Kong Wang , Kwong Hon Wong
发明人： Louis L. Hsu , Carl J. Radens , Li-Kong Wang , Kwong Hon Wong
IPC分类号： G03B27/72 , G03B27/54 , G03B27/42
CPC分类号： G03F1/26 , G03F7/2014 , G03F7/70291
摘要： An electronically programmable mask for lithography has an array of individually controllable light sources aligned with an array of individually controllable liquid crystals, so that individual pixels may be turned on or off and phase-shifted to provide a desired light intensity distribution on a wafer. The mask may be used in a contact printing mode or in a reduction projection mode.
摘要翻译：用于光刻的电子可编程掩模具有与独立可控液晶阵列对准的独立可控光源的阵列，使得各个像素可以被导通或截止并相移以在晶片上提供期望的光强分布。掩模可以以接触印刷模式或缩小投影模式使用。

50. 发明授权

US06869846B2 Forming electronic structures having dual dielectric thicknesses and the structure so formed 失效
标题翻译：形成具有双介电厚度的电子结构和如此形成的结构
公开(公告)号：US06869846B2
公开(公告)日：2005-03-22
申请号：US10411850
申请日：2003-04-10
申请人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , Richard A. Strub , William R. Tonti
发明人： Louis L. Hsu , Jack A. Mandelman , Carl J. Radens , Richard A. Strub , William R. Tonti
IPC分类号： H01L21/8239 , H01L21/334 , H01L21/8234 , H01L21/8242 , H01L29/94
CPC分类号： H01L29/66181 , H01L21/823462 , H01L27/10861 , H01L27/10894 , H01L29/945
摘要： A structure including a first device and a second device, wherein the second device has a dielectric thickness greater than the dielectric thickness of the first device, and the method of so forming the structure.
摘要翻译：一种包括第一装置和第二装置的结构，其中所述第二装置的电介质厚度大于所述第一装置的电介质厚度，以及形成所述结构的方法。

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