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    • 3. 发明授权
    • Vertical MOSFET SRAM cell
    • 垂直MOSFET SRAM单元
    • US07138685B2
    • 2006-11-21
    • US10318495
    • 2002-12-11
    • Louis L. HsuOleg GluschenkovJack A. MandelmanCarl J. Radens
    • Louis L. HsuOleg GluschenkovJack A. MandelmanCarl J. Radens
    • H01L21/00
    • H01L27/11G11C11/412H01L21/84H01L27/1104H01L27/1203
    • A method of forming an SRAM cell device includes the following steps. Form pass gate FET transistors and form a pair of vertical pull-down FET transistors with a first common body and a first common source in a silicon layer patterned into parallel islands formed on a planar insulator. Etch down through upper diffusions between cross-coupled inverter FET transistors to form pull-down isolation spaces bisecting the upper strata of pull-up and pull-down drain regions of the pair of vertical pull-down FET transistors, with the isolation spaces reaching down to the common body strata. Form a pair of vertical pull-up FET transistors with a second common body and a second common drain. Then, connect the FET transistors to form an SRAM cell.
    • 形成SRAM单元装置的方法包括以下步骤。 形成栅极FET晶体管并形成一对垂直下拉FET晶体管,其具有第一共同体和第一公共源,图案化为平坦绝缘体上形成平行岛的硅层。 通过交叉耦合的反相器FET晶体管之间的上扩散来蚀刻,以形成将一对垂直下拉FET晶体管的上拉和下拉漏极区的上层平分的下拉隔离空间,隔离空间达到 到共同的身体层。 形成一对具有第二共同体和第二公共漏极的垂直上拉FET晶体管。 然后,连接FET晶体管以形成SRAM单元。
    • 5. 发明授权
    • Method for fabricating semiconductor devices with different properties using maskless process
    • 使用无掩模工艺制造具有不同特性的半导体器件的方法
    • US06355531B1
    • 2002-03-12
    • US09634225
    • 2000-08-09
    • Jack A. MandelmanLouis L. HsuCarl J. RadensWilliam R. TontiLi-Kong Wang
    • Jack A. MandelmanLouis L. HsuCarl J. RadensWilliam R. TontiLi-Kong Wang
    • H01L218236
    • H01L21/823892H01L21/823807H01L21/82385Y10S438/981
    • A method is provided for fabricating semiconductor devices having different properties on a common semiconductor substrate. The method includes the steps of (a) forming N openings on the semiconductor substrate, wherein each opening is corresponding to a channel region of each semiconductor device, (b) forming oxide layers of an ith type on surfaces of the N openings, (c) depositing gate conductor material of an ith type over structure of the semiconductor devices, the gate conductor material of the ith type having a gate conductor work-function of an ith type, (d) removing the gate conductor material of the ith type such that a predetermined amount of the gate conductor material of the ith type remains in an ith opening to form a gate conductor material layer of the ith type on top surface in the ith opening and the gate conductor material of the ith type deposited in the structure other than the ith opening is removed, (e) removing the oxide layers of the ith type from openings other than the ith opening, (f) repeating the steps of (a) through (e) from “i=1” to “i=N”, and (g) forming at least one layer on surface of each of N gate conductor material layers in the N openings to form a gate conductor, whereby the N semiconductor devices have N gate conductors, respectively, wherein the N gate conductors have N types of gate conductor work-functions. The semiconductor devices also have channel regions of which doping levels are different from each other by implanting the channel regions with different types of implants.
    • 提供了一种在公共半导体衬底上制造具有不同特性的半导体器件的方法。 该方法包括以下步骤:(a)在半导体衬底上形成N个开口,其中每个开口对应于每个半导体器件的沟道区,(b)在N个开口的表面上形成第i个类型的氧化物层,(c )沉积所述半导体器件的第i型结构的栅极导体材料,所述第i型栅极导体材料具有第i类型的栅极导体功函数,(d)去除所述第i种类型的栅极导体材料,使得 第i个类型的栅极导体材料的预定量保持在第i个开口中,以在第i个开口的顶表面上形成第i型的栅极导体材料层,并且沉积在除第 除去第i个开口,(e)从第i个开口以外的开口除去第i个类型的氧化物层,(f)重复步骤(a)至(e)从“i = 1”到“i = N “,(g)在其上形成至少一层 在N个开口中的N个栅极导体材料层中的每一个的表面形成栅极导体,由此N个半导体器件分别具有N个栅极导体,其中N个栅极导体具有N种类型的栅极导体功函数。 半导体器件还具有通过用不同类型的植入物植入沟道区域而使掺杂水平彼此不同的沟道区域。