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41. 发明申请

US20070145302A1 Method and apparatus for specimen fabrication 有权
标题翻译：用于样品制造的方法和装置
公开(公告)号：US20070145302A1
公开(公告)日：2007-06-28
申请号：US11701415
申请日：2007-02-02
申请人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
发明人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
IPC分类号： H01J37/08
CPC分类号： G01N1/32 , G01N1/28 , G01N2001/028 , G01N2001/045 , G01N2001/282 , H01J37/20 , H01J37/302 , H01J37/3056 , H01J2237/2007 , H01J2237/201 , H01J2237/202 , H01J2237/31732 , H01J2237/31745 , H01J2237/31749
摘要： A system for analyzing a semiconductor device, including: a first specimen fabricating apparatus including: a vacuum chamber in which a sample substrate is placed, an ion beam irradiating optical system for forming a specimen on the sample substrate, a specimen holder to mount the specimen, and a probe for removing the specimen from the sample substrate; a second specimen fabricating apparatus, and an analyzer to analyze the specimen, wherein said first specimen fabrication apparatus has a function to separate the specimen mounted on the specimen holder and the probe in a vacuum condition.
摘要翻译：一种用于分析半导体器件的系统，包括：第一试样制造装置，包括：放置样品基板的真空室，用于在样品基板上形成试样的离子束照射光学系统，用于安装试样的试样保持器以及用于从样品基板除去试样的探针; 第二试样制造装置和分析器，其中所述第一试样制造装置具有在真空条件下分离安装在试样架上的试样和探针的功能。

42. 发明授权

US06828566B2 Method and apparatus for specimen fabrication 有权
标题翻译：用于样品制造的方法和装置
公开(公告)号：US06828566B2
公开(公告)日：2004-12-07
申请号：US10395237
申请日：2003-03-25
申请人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
发明人： Satoshi Tomimatsu , Kaoru Umemura , Yuichi Madokoro , Yoshimi Kawanami , Yasunori Doi
IPC分类号： H01J3720
CPC分类号： G01N1/32 , G01N1/28 , G01N2001/028 , G01N2001/045 , G01N2001/282 , H01J37/20 , H01J37/302 , H01J37/3056 , H01J2237/2007 , H01J2237/201 , H01J2237/202 , H01J2237/31732 , H01J2237/31745 , H01J2237/31749
摘要： A specimen fabrication apparatus including a movable sample stage on which a specimen substrate is mounted, a probe connector for firmly joining a tip of a probe to a portion of the specimen substrate in a vicinity of an area on the specimen substrate to be observed in an observation apparatus, a micro-specimen separator for separating from the specimen substrate a micro-specimen to which the tip of the probe is firmly joined, the micro-specimen including the area on the specimen substrate to be observed and the portion of the specimen substrate to which the tip of the probe is firmly joined, a micro-specimen fixer for fixing the micro-specimen separated from the specimen substrate to a specimen holder of the observation apparatus, and a probe separator for separating the tip of the probe from the micro-specimen fixed to the specimen holder.
摘要翻译：一种试样制造装置，包括：安装有试样基板的可动试样台;探针连接器，用于将探针的前端牢固地接合到试样基板的一部分附近，以在待观察的样品基板上的区域观察装置，用于从试样基板分离与探针的前端牢固接合的微型试样的微量试样分离体，包括待观察的试样基板上的区域的微量试样和试样基板的一部分探针的尖端牢固地接合到其上的微型试样固定器，用于将从试样基板分离的微量样品固定到观察装置的试样支架上的探针分离器和用于将探针的尖端从微型固定在样品架上。

43. 发明授权

US5910871A Magnetic head having track width specified by grooves formed with projection ion beam 失效
标题翻译：磁头具有由投影离子束形成的槽指定的轨道宽度
公开(公告)号：US5910871A
公开(公告)日：1999-06-08
申请号：US837218
申请日：1997-04-22
申请人： Yoshimi Kawanami , Hisashi Takano , Kaoru Umemura , Yuichi Madokoro , Satoshi Tomimatsu
发明人： Yoshimi Kawanami , Hisashi Takano , Kaoru Umemura , Yuichi Madokoro , Satoshi Tomimatsu
IPC分类号： G11B5/187 , G11B5/31 , G11B5/39 , G11B5/40 , G11B5/127
CPC分类号： G11B5/3967 , G11B5/1871 , G11B5/3106 , G11B5/3116 , G11B5/3163 , G11B5/40 , Y10S977/949
摘要： The track width of a magnetic head is specified by the interval between a pair of grooves in the slider surface that are formed by a projection ion beam. Specifically, the grooves are processed by projecting a mask having the pattern of the pair of grooves with a projection ion beam with reduction to a magnification of 1/10, for example. Although the peripheral strain of the pattern thus formed is large and the current distortion is not uniform when the projection ion beam batch irradiation area is limited, the increase in depth of the grooves formed at the periphery of the grooves does not affect the track narrowing process at the center portion of the projection ion beam since the strain thereof is negligibly small. As a result, a narrow track width is processed with high precision.
摘要翻译：磁头的磁道宽度由滑块表面中由突出离子束形成的一对凹槽之间的间隔来确定。具体地说，例如，通过将具有一对凹槽的图案的掩模用投影离子束投射到+ E，fra 1/10 + EE的放大倍数来进行处理。虽然如此形成的图案的周边应变大，并且当投影离子束批量照射区域受限时电流变形不均匀，但是形成在凹槽周边的凹槽的深度增加不影响轨道变窄处理由于其应变可忽略不计，所以在投影离子束的中心部分。结果，以高精度处理窄轨道宽度。

44. 发明申请

US20120235055A1 Focused Ion Beam Device and Focused Ion Beam Processing Method 失效
标题翻译：聚焦离子束装置和聚焦离子束加工方法
公开(公告)号：US20120235055A1
公开(公告)日：2012-09-20
申请号：US13513256
申请日：2010-11-15
申请人： Yuichi Madokoro , Hirokazu Kaneoya , Tsuyoshi Onishi , Isamu Sekihara
发明人： Yuichi Madokoro , Hirokazu Kaneoya , Tsuyoshi Onishi , Isamu Sekihara
IPC分类号： H01J3/28
CPC分类号： G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译：公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉部分处理，而不需要对样品台进行调整和操作。利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。

45. 发明授权

US08710464B2 Specimen preparation device, and control method in specimen preparation device 失效
标题翻译：样品制备装置及样品制备装置的控制方法
公开(公告)号：US08710464B2
公开(公告)日：2014-04-29
申请号：US13203807
申请日：2009-10-23
申请人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G21K5/08
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译：自动进行切片样品与试样的分离等。在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记，通过图像识别以高精度识别切除的样本和样本的相对运动等。在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。因此，例如，无人标本切除成为可能，并且可以制备大量标本。

46. 发明授权

US08629394B2 Charged particle beam device and method for correcting position with respect to charged particle beam 失效
标题翻译：带电粒子束装置和相对于带电粒子束校正位置的方法
公开(公告)号：US08629394B2
公开(公告)日：2014-01-14
申请号：US13202498
申请日：2009-10-23
申请人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G01N31/00 , G01N33/00
CPC分类号： H01J37/28 , H01J37/153 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/15 , H01J2237/1536 , H01J2237/20207 , H01J2237/221 , H01J2237/30483 , H01J2237/31745
摘要： An object of the present invention is to eliminate a distortion in an image even if there is an angular difference between the deflection direction of the charged particle beam and the tilt axis of a specimen, and to accurately observe and process the specimen. When the deflection direction of the charged particle beam is not parallel to the tilt axis of the specimen, the deflection rotation angle to the observation direction of the charged particle beam is determined, and the deflection pattern is changed. Thereby the distortion in the image is corrected. The deflection pattern is changed to a parallelogram. A distortion-free image is obtained even if the specimen is tilted, and the specimen can be observed and processed with high accuracy. This allows automatically recognizing the position correction mark to perform observation and processing after correcting the positional relation.
摘要翻译：本发明的目的是消除图像中的变形，即使在带电粒子束的偏转方向与试样的倾斜轴之间存在角度差，也能够精确地观察和处理试样。当带电粒子束的偏转方向与试样的倾斜轴不平行时，确定与带电粒子束的观察方向的偏转旋转角度，改变偏转图案。从而校正图像中的失真。偏转图案变为平行四边形。即使样品倾斜，也能获得无变形的图像，能够高精度地观察和加工样品。这允许在校正位置关系之后自动识别位置校正标记以执行观察和处理。

47. 发明授权

US08552397B2 Focused ion beam device and focused ion beam processing method 失效
标题翻译：聚焦离子束装置和聚焦离子束处理方法
公开(公告)号：US08552397B2
公开(公告)日：2013-10-08
申请号：US13513256
申请日：2010-11-15
申请人： Yuichi Madokoro , Hirokazu Kaneoya , Tsuyoshi Onishi , Isamu Sekihara
发明人： Yuichi Madokoro , Hirokazu Kaneoya , Tsuyoshi Onishi , Isamu Sekihara
IPC分类号： H01J3/28 , G21K1/00
CPC分类号： G21K1/00 , H01J37/1478 , H01J37/3056 , H01J2237/0458 , H01J2237/31745
摘要： Disclosed is an operation for an optical system which achieves observation of focused ion beam processing equivalent to that in a case wherein a sample stage is tilted mechanically. In a focused ion beam optical system, an aperture, a tilting deflector, a beam scanner, and an objective lens are controlled so as to irradiate an ion beam tilted to the optical axis of the optical system, thereby achieving thin film processing and a cross section processing without accompanying adjustment and operation for a sample stage. The thin film processing and the cross section processing with a focused ion beam can be automated, and yield can be improved. For example, by applying the present invention to a cross section monitor to detect an end point, the cross section processing can be easily automated.
摘要翻译：公开了一种光学系统的操作，其实现了与样品台机械倾斜的情况相当的聚焦离子束处理的观察。在聚焦离子束光学系统中，控制孔径，倾斜偏转器，光束扫描器和物镜，以照射倾斜到光学系统的光轴的离子束，由此实现薄膜处理和交叉部分处理，而不需要对样品台进行调整和操作。利用聚焦离子束的薄膜处理和横截面加工可以自动化，并且可以提高收率。例如，通过将本发明应用于截面监视器来检测终点，可以容易地自动化横截面处理。

48. 发明申请

US20110309245A1 SPECIMEN PREPARATION DEVICE, AND CONTROL METHOD IN SPECIMEN PREPARATION DEVICE 失效
标题翻译：样品制备装置，以及样品制备装置中的控制方法
公开(公告)号：US20110309245A1
公开(公告)日：2011-12-22
申请号：US13203807
申请日：2009-10-23
申请人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Tsuyoshi Onishi , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： G21K5/10 , G01N23/02
CPC分类号： G01N1/286
摘要： Separation and the like of an excised specimen from a specimen are automatically performed. Marks for improving image recognition accuracy are provided in a region that becomes an excised specimen in a specimen and a region other than said region, or in a transfer means for transferring the excised specimen and a specimen holder capable of holding the excised specimen, and the relative movement of the excised specimen and the specimen, and the like are recognized with high accuracy by image recognition. In the sampling of a minute specimen using a focused ion beam, the detection of an end point of processing for separation of the excised specimen from the specimen, and the like are automatically performed. Thus, for example, unmanned specimen excision becomes possible, and preparation of a lot of specimens becomes possible.
摘要翻译：自动进行切片样品与试样的分离等。在成为试样和除了所述区域以外的区域的切除试样的区域中，或者在用于转移切除的试样的转移装置和能够保持切除的试样的试样保持器的区域中提供用于提高图像识别精度的标记，通过图像识别以高精度识别切除的样本和样本的相对运动等。在使用聚焦离子束对分钟标本的取样中，自动执行用于将切出的样品与试样分离的处理终点的检测等。因此，例如，无人标本切除成为可能，并且可以制备大量标本。

49. 发明申请

US20110297826A1 CHARGED PARTICLE BEAM DEVICE AND METHOD FOR CORRECTING POSITION WITH RESPECT TO CHARGED PARTICLE BEAM 失效
标题翻译：充电颗粒光束装置和相对于充电颗粒光束校正位置的方法
公开(公告)号：US20110297826A1
公开(公告)日：2011-12-08
申请号：US13202498
申请日：2009-10-23
申请人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
发明人： Yuichi Madokoro , Megumi Aizawa , Yukio Yoshizawa
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/153 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/15 , H01J2237/1536 , H01J2237/20207 , H01J2237/221 , H01J2237/30483 , H01J2237/31745
摘要： An object of the present invention is to eliminate a distortion in an image even if there is an angular difference between the deflection direction of the charged particle beam and the tilt axis of a specimen, and to accurately observe and process the specimen. When the deflection direction of the charged particle beam is not parallel to the tilt axis of the specimen, the deflection rotation angle to the observation direction of the charged particle beam is determined, and the deflection pattern is changed. Thereby the distortion in the image is corrected. The deflection pattern is changed to a parallelogram. A distortion-free image is obtained even if the specimen is tilted, and the specimen can be observed and processed with high accuracy. This allows automatically recognizing the position correction mark to perform observation and processing after correcting the positional relation.
摘要翻译：本发明的目的是消除图像中的变形，即使在带电粒子束的偏转方向与试样的倾斜轴之间存在角度差，也能够精确地观察和处理试样。当带电粒子束的偏转方向与试样的倾斜轴不平行时，确定与带电粒子束的观察方向的偏转旋转角度，改变偏转图案。从而校正图像中的失真。偏转图案变为平行四边形。即使样品倾斜，也能获得无变形的图像，能够高精度地观察和加工样品。这允许在校正位置关系之后自动识别位置校正标记以执行观察和处理。

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