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41. 发明授权

US08552522B2 Dishing-free gap-filling with multiple CMPs 有权
公开(公告)号：US08552522B2
公开(公告)日：2013-10-08
申请号：US13151666
申请日：2011-06-02
申请人： Ming-Yuan Wu , Kong-Beng Thei , Chiung-Han Yeh , Harry Chuang , Mong-Song Liang
发明人： Ming-Yuan Wu , Kong-Beng Thei , Chiung-Han Yeh , Harry Chuang , Mong-Song Liang
IPC分类号： H01L21/70
CPC分类号： H01L21/76883 , H01L21/76229
摘要： A method of forming an integrated circuit structure includes providing a semiconductor substrate; forming patterned features over the semiconductor substrate, wherein gaps are formed between the patterned features; filling the gaps with a first filling material, wherein the first filling material has a first top surface higher than top surfaces of the patterned features; and performing a first planarization to lower the top surface of the first filling material, until the top surfaces of the patterned features are exposed. The method further includes depositing a second filling material, wherein the second filling material has a second top surface higher than the top surfaces of the patterned features; and performing a second planarization to lower the top surface of the second filling material, until the top surfaces of the patterned features are exposed.

42. 发明授权

US08125051B2 Device layout for gate last process 有权
标题翻译：门最后进程的设备布局
公开(公告)号：US08125051B2
公开(公告)日：2012-02-28
申请号：US12471091
申请日：2009-05-22
申请人： Harry Chuang , Kong-Beng Thei , Chiung-Han Yeh , Mong-Song Liang , Hou-Ju Li , Ming-Yuan Wu , Tzung-Chi Lee
发明人： Harry Chuang , Kong-Beng Thei , Chiung-Han Yeh , Mong-Song Liang , Hou-Ju Li , Ming-Yuan Wu , Tzung-Chi Lee
IPC分类号： H01L27/06 , H01L21/70 , H01L21/338 , H01L21/302
CPC分类号： H01L21/8249 , H01L27/0623 , H01L27/0629 , H01L27/0635
摘要： A semiconductor device is provided that includes a semiconductor substrate having a first region and a second region, transistors having metal gates formed in the first region, an isolation structure formed in the second region, at least one junction device formed proximate the isolation structure in the second region, and a stopping structure formed overlying the isolation structure in the second region.
摘要翻译：提供一种半导体器件，其包括具有第一区域和第二区域的半导体衬底，在第一区域中形成有金属栅极的晶体管，形成在第二区域中的隔离结构，形成在隔离结构中的至少一个接合器件第二区域，以及形成在第二区域中的隔离结构上方的停止结构。

43. 发明申请

US20120025329A1 Spacer Shape Engineering for Void-Free Gap-Filling Process 有权
标题翻译：无间隙填充过程的间隔形状工程
公开(公告)号：US20120025329A1
公开(公告)日：2012-02-02
申请号：US13270585
申请日：2011-10-11
申请人： Ming-Yuah Wu , Yi-Shien Mor , Chih-Tang Peng , Chiung-Han Yeh , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
发明人： Ming-Yuah Wu , Yi-Shien Mor , Chih-Tang Peng , Chiung-Han Yeh , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
IPC分类号： H01L29/78
CPC分类号： H01L21/823481 , H01L21/823468 , H01L21/823475 , H01L29/6653 , H01L29/6656 , H01L29/7833 , H01L29/7843
摘要： A method of forming a semiconductor device includes providing a semiconductor substrate; forming a gate stack on the semiconductor substrate; forming a gate spacer adjacent to a sidewall of the gate stack; thinning the gate spacer; and forming a secondary gate spacer on a sidewall of the gate spacer after the step of thinning the gate spacer.
摘要翻译：一种形成半导体器件的方法包括提供半导体衬底; 在半导体衬底上形成栅叠层; 形成邻近所述栅叠层的侧壁的栅极间隔; 减薄栅间隔; 以及在所述栅极间隔物变薄的步骤之后，在所述栅极间隔物的侧壁上形成次级栅极间隔物。

44. 发明申请

US20100001332A1 INTEGRATING A CAPACITOR IN A METAL GATE LAST PROCESS 有权
标题翻译：在金属门最后过程中集成电容器
公开(公告)号：US20100001332A1
公开(公告)日：2010-01-07
申请号：US12256132
申请日：2008-10-22
申请人： Harry Chuang , Tzung-Chi Lee , Kong-Beng Thei , Sheng-Chen Chung , Mong-Song Liang
发明人： Harry Chuang , Tzung-Chi Lee , Kong-Beng Thei , Sheng-Chen Chung , Mong-Song Liang
IPC分类号： H01L29/92 , H01L21/34
CPC分类号： H01L27/0629 , H01L27/11 , H01L29/94
摘要： A semiconductor device is provided which includes a semiconductor substrate having a first region and a second region, transistors having metal gates formed in the first region, and at least one capacitor formed in the second region. The capacitor includes a top electrode having at least one stopping structure formed in the top electrode, the at least one stopping structure being of a different material from the top electrode, a bottom electrode, and a dielectric layer interposed between the top electrode and the bottom electrode.
摘要翻译：提供一种半导体器件，其包括具有第一区域和第二区域的半导体衬底，在第一区域中形成有金属栅极的晶体管，以及形成在第二区域中的至少一个电容器。所述电容器包括顶电极，所述顶电极具有形成在所述顶电极中的至少一个止动结构，所述至少一个止动结构与所述顶电极，底电极和介于所述顶电极和所述底电极之间的电介质层具有不同的材料电极。

45. 发明授权

US08461654B2 Spacer shape engineering for void-free gap-filling process 有权
标题翻译：无间隙填充过程的间隔形状工程
公开(公告)号：US08461654B2
公开(公告)日：2013-06-11
申请号：US13270585
申请日：2011-10-11
申请人： Ming-Yuan Wu , Yi-Shien Mor , Chih-Tang Peng , Chiung-Han Yeh , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
发明人： Ming-Yuan Wu , Yi-Shien Mor , Chih-Tang Peng , Chiung-Han Yeh , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
IPC分类号： H01L29/78
CPC分类号： H01L21/823481 , H01L21/823468 , H01L21/823475 , H01L29/6653 , H01L29/6656 , H01L29/7833 , H01L29/7843
摘要： A method of forming a semiconductor device includes providing a semiconductor substrate; forming a gate stack on the semiconductor substrate; forming a gate spacer adjacent to a sidewall of the gate stack; thinning the gate spacer; and forming a secondary gate spacer on a sidewall of the gate spacer after the step of thinning the gate spacer.
摘要翻译：一种形成半导体器件的方法包括提供半导体衬底; 在半导体衬底上形成栅叠层; 形成邻近所述栅叠层的侧壁的栅极间隔; 减薄栅间隔; 以及在所述栅极间隔物变薄的步骤之后，在所述栅极间隔物的侧壁上形成次级栅极间隔物。

46. 发明申请

US20120132987A1 Reducing Device Performance Drift Caused by Large Spacings Between Active Regions 有权
标题翻译：降低活动区域之间大间距引起的设备性能漂移
公开(公告)号：US20120132987A1
公开(公告)日：2012-05-31
申请号：US13367103
申请日：2012-02-06
申请人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
发明人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
IPC分类号： H01L29/78 , H01L29/06
CPC分类号： H01L21/823475 , H01L21/31155 , H01L21/823412 , H01L21/823481 , H01L29/7846
摘要： A method of forming an integrated circuit structure includes providing a semiconductor substrate; and forming a first and a second MOS device. The first MOS device includes a first active region in the semiconductor substrate; and a first gate over the first active region. The second MOS device includes a second active region in the semiconductor substrate; and a second gate over the second active region. The method further include forming a dielectric region between the first and the second active regions, wherein the dielectric region has an inherent stress; and implanting the dielectric region to form a stress-released region in the dielectric region, wherein source and drain regions of the first and the second MOS devices are not implanted during the step of implanting.
摘要翻译：形成集成电路结构的方法包括提供半导体衬底; 以及形成第一和第二MOS器件。第一MOS器件包括半导体衬底中的第一有源区; 和第一个主动区域的第一个门。第二MOS器件包括半导体衬底中的第二有源区; 以及在第二活动区域上的第二栅极。该方法还包括在第一和第二有源区之间形成电介质区域，其中电介质区域具有固有应力; 以及注入所述电介质区域以在所述电介质区域中形成应力释放区域，其中所述第一和第二MOS器件的源极和漏极区域在植入步骤期间不被植入。

47. 发明授权

US08138554B2 Semiconductor device with local interconnects 有权
标题翻译：具有局部互连的半导体器件
公开(公告)号：US08138554B2
公开(公告)日：2012-03-20
申请号：US12212034
申请日：2008-09-17
申请人： Harry Chuang , Kong-Beng Thei , Sheng-Chen Chung , Mong-Song Liang
发明人： Harry Chuang , Kong-Beng Thei , Sheng-Chen Chung , Mong-Song Liang
IPC分类号： H01L29/76 , H01L29/94 , H01L31/062 , H01L31/113 , H01L31/119
CPC分类号： H01L21/76895 , H01L21/823475 , H01L27/088 , H01L29/4238
摘要： A semiconductor device with local interconnects is provided. The semiconductor device comprises a first gate line structure and a second gate line structure disposed on a substrate and substantially collinear. A first pair of source/drain regions is formed in the substrate on both sides of the first gate line structure and a second pair of source/drain regions is formed in the substrate on both sides of the second gate line structure. A pair of conductive lines is disposed on the substrate on both sides of the first gate line structure and the second gate line structure, such that each conductive line is connected to one of the first pair of source/drain regions and one of the second pair of source/drain regions.
摘要翻译：提供具有局部互连的半导体器件。半导体器件包括设置在衬底上并基本上共线的第一栅极线结构和第二栅极线结构。第一对源极/漏极区域形成在第一栅极线结构的两侧的衬底中，并且第二对源极/漏极区域形成在第二栅极线结构的两侧的衬底中。一对导线设置在第一栅极线结构和第二栅极线结构的两侧上的衬底上，使得每个导线连接到第一对源极/漏极区域中的一个并且第二对中的一个的源/漏区。

48. 发明授权

US08115271B2 Reducing device performance drift caused by large spacings between active regions 有权
标题翻译：有效区域之间由间隔较大引起的器件性能漂移降低
公开(公告)号：US08115271B2
公开(公告)日：2012-02-14
申请号：US13155251
申请日：2011-06-07
申请人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
发明人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
IPC分类号： H01L21/70
CPC分类号： H01L21/823475 , H01L21/31155 , H01L21/823412 , H01L21/823481 , H01L29/7846
摘要： A method of forming an integrated circuit structure includes providing a semiconductor substrate; and forming a first and a second MOS device. The first MOS device includes a first active region in the semiconductor substrate; and a first gate over the first active region. The second MOS device includes a second active region in the semiconductor substrate; and a second gate over the second active region. The method further include forming a dielectric region between the first and the second active regions, wherein the dielectric region has an inherent stress; and implanting the dielectric region to form a stress-released region in the dielectric region, wherein source and drain regions of the first and the second MOS devices are not implanted during the step of implanting.
摘要翻译：形成集成电路结构的方法包括提供半导体衬底; 以及形成第一和第二MOS器件。第一MOS器件包括半导体衬底中的第一有源区; 和第一个主动区域的第一个门。第二MOS器件包括半导体衬底中的第二有源区; 以及在第二活动区域上的第二栅极。该方法还包括在第一和第二有源区之间形成电介质区域，其中电介质区域具有固有应力; 以及注入所述电介质区域以在所述电介质区域中形成应力释放区域，其中所述第一和第二MOS器件的源极和漏极区域在植入步骤期间不被植入。

49. 发明授权

US07977202B2 Reducing device performance drift caused by large spacings between active regions 有权
标题翻译：有效区域之间由间隔较大引起的器件性能漂移降低
公开(公告)号：US07977202B2
公开(公告)日：2011-07-12
申请号：US12175976
申请日：2008-07-18
申请人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
发明人： Harry Chuang , Kong-Beng Thei , Mong-Song Liang
IPC分类号： H01L21/76
CPC分类号： H01L21/823475 , H01L21/31155 , H01L21/823412 , H01L21/823481 , H01L29/7846
摘要： A method of forming an integrated circuit structure includes providing a semiconductor substrate; and forming a first and a second MOS device. The first MOS device includes a first active region in the semiconductor substrate; and a first gate over the first active region. The second MOS device includes a second active region in the semiconductor substrate; and a second gate over the second active region. The method further include forming a dielectric region between the first and the second active regions, wherein the dielectric region has an inherent stress; and implanting the dielectric region to form a stress-released region in the dielectric region, wherein source and drain regions of the first and the second MOS devices are not implanted during the step of implanting.
摘要翻译：形成集成电路结构的方法包括提供半导体衬底; 以及形成第一和第二MOS器件。第一MOS器件包括半导体衬底中的第一有源区; 和第一个主动区域的第一个门。第二MOS器件包括半导体衬底中的第二有源区; 以及在第二活动区域上的第二栅极。该方法还包括在第一和第二有源区之间形成电介质区域，其中电介质区域具有固有应力; 以及注入所述电介质区域以在所述电介质区域中形成应力释放区域，其中所述第一和第二MOS器件的源极和漏极区域在植入步骤期间不被植入。

50. 发明申请

US20100285658A1 INTEGRATING A FIRST CONTACT STRUCTURE IN A GATE LAST PROCESS 有权
标题翻译：在门窗最后一个过程中集成第一个接触结构
公开(公告)号：US20100285658A1
公开(公告)日：2010-11-11
申请号：US12839994
申请日：2010-07-20
申请人： Chiung-Han Yeh , Ming-Yuan Wu , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
发明人： Chiung-Han Yeh , Ming-Yuan Wu , Kong-Beng Thei , Harry Chuang , Mong-Song Liang
IPC分类号： H01L21/28 , H01L21/3205
CPC分类号： H01L29/66606 , H01L21/823814 , H01L21/823871
摘要： A method is provided that includes providing a substrate; forming a transistor in the substrate, the transistor having a dummy gate; forming a dielectric layer over the substrate and transistor; forming a contact feature in the dielectric layer; and after forming the contact feature, replacing the dummy gate of the transistor with a metal gate. An exemplary contact feature is a dual contact.
摘要翻译：提供了一种提供基板的方法，在衬底中形成晶体管，晶体管具有虚拟栅极; 在衬底和晶体管上形成介电层; 在介电层中形成接触特征; 并且在形成接触特征之后，用金属栅极替换晶体管的虚拟栅极。示例性接触特征是双重接触。

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