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31. 发明申请

US20110261190A1 DEFECT OBSERVATION DEVICE AND DEFECT OBSERVATION METHOD 审中-公开
标题翻译：缺陷观察装置和缺陷观察方法
公开(公告)号：US20110261190A1
公开(公告)日：2011-10-27
申请号：US13122160
申请日：2009-09-28
申请人： Ryo Nakagaki , Minoru Harada , Kenji Obara
发明人： Ryo Nakagaki , Minoru Harada , Kenji Obara
IPC分类号： H04N7/18
CPC分类号： H01J37/265 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J37/28 , H01J2237/2817
摘要： A review SEM is provided with a means to store sets of images acquired using multiple imaging conditions or sets of images for which multiple imaging conditions are simulated using simulation, a means to store defect position information for each set of images, and a means to store information relating to imaging conditions and process time. A means to estimate predicted capture rate and throughput with the individual imaging conditions for the sets of images from the stored information, and a means to display the results thereof are additionally provided.
摘要翻译：审查SEM被提供有存储使用多个成像条件或多组成像条件被模拟的多组成像条件获取的图像集合的装置，用于存储每组图像的缺陷位置信息的存储装置，以及存储装置有关成像条件和处理时间的信息。一种用于根据所存储的信息来估计图像集合的各个成像条件来估计预测捕获率和吞吐量的手段，并且还提供了显示其结果的手段。

32. 发明申请

US20090268959A1 METHOD AND APPARATUS FOR REVIEWING DEFECTS 有权
标题翻译：评估缺陷的方法和装置
公开(公告)号：US20090268959A1
公开(公告)日：2009-10-29
申请号：US12428557
申请日：2009-04-23
申请人： Minoru Harada , Ryo Nakagaki , Kenji Obara , Atsushi Miyamoto
发明人： Minoru Harada , Ryo Nakagaki , Kenji Obara , Atsushi Miyamoto
IPC分类号： G06K9/00
CPC分类号： G06T7/004 , G01N21/9501 , G06T7/0004 , G06T7/001 , G06T7/70 , G06T2207/10061 , G06T2207/30148
摘要： Disclosed is a method for reviewing defects in a large number of samples within a short period of time through the use of a defect review apparatus. To collect defect images steadily and at high throughput, a defect detection method is selected before imaging and set up for each of review target defects in the samples in accordance with the external characteristics of the samples that are calculated from the design information about the samples. The defect images are collected after an imaging sequence is set up for the defect images and reference images in such a manner as to reduce the time required for stage movement in accordance with the defect coordinates of the samples and the selected defect detection method.
摘要翻译：公开了一种通过使用缺陷检查装置在短时间内检查大量样品中的缺陷的方法。为了稳定和高吞吐量收集缺陷图像，在成像之前选择缺陷检测方法，并根据从样本的设计信息计算出的样本的外部特征，为样本中的每个评估目标缺陷设置缺陷检测方法。在针对缺陷图像和参考图像设置成像序列之后收集缺陷图像，以便根据样本的缺陷坐标和所选择的缺陷检测方法来减少阶段移动所需的时间。

33. 发明授权

US06657221B2 Image classification method, observation method, and apparatus thereof with different stage moving velocities 失效
标题翻译：具有不同阶段移动速度的图像分类方法，观察方法及装置
公开(公告)号：US06657221B2
公开(公告)日：2003-12-02
申请号：US09988436
申请日：2001-11-20
申请人： Ryo Nakagaki , Yuji Takagi , Takashi Hiroi , Masahiro Watanabe , Minori Noguchi , Kazuo Aoki
发明人： Ryo Nakagaki , Yuji Takagi , Takashi Hiroi , Masahiro Watanabe , Minori Noguchi , Kazuo Aoki
IPC分类号： G01N2186
CPC分类号： G01N21/9501
摘要： There are provided an automatic image collection apparatus and method capable of acquiring and automatically classifying fast an image of a defect part caused in a semiconductor wafer production process detected by a defect inspection unit. The image collection apparatus for automatically imaging and collecting images of a plurality of observed parts on a semiconductor wafer is provided with a scheduling portion for deciding the imaging order of the defects and stage moving velocities based on the positional relation of the plurality of observed parts on the wafer and a control portion for feed backing the stage movement amount to the beam deflection amount, thereby imaging and collecting images via an optimal route while moving the stage.
摘要翻译：提供一种自动图像采集装置和方法，其能够快速地获取由缺陷检查单元检测的半导体晶片制造过程中引起的缺陷部分的图像的自动分类。用于在半导体晶片上自动成像和收集多个观察部分的图像的图像采集装置设置有调度部分，用于基于多个观察部分的位置关系来确定缺陷和阶段移动速度的成像顺序晶片和用于馈送背景的控制部分，舞台移动量达到光束偏转量，从而在移动舞台的同时通过最佳路线对图像进行成像和收集。

34. 发明申请

US20140072204A1 DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM 有权
标题翻译：缺陷分类方法和缺陷分类系统
公开(公告)号：US20140072204A1
公开(公告)日：2014-03-13
申请号：US14112105
申请日：2012-04-16
申请人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06T7/00 , G06K9/62
CPC分类号： G06T7/001 , G01N21/9501 , G01N23/225 , G01N2223/421 , G01N2223/611 , G01N2223/646 , G06K9/6267 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.
摘要翻译：在自动缺陷分类中，必须为每个缺陷观察装置设定分类处方。如果多个设备在同一阶段进行操作，则分类配方中的分类等级必须相同。当创建新的分类配方时，出现了在不同装置中的分类等级中发生差异的问题。该缺陷分类系统具有分类配方存储单元; 信息指定单元，存储图像的级和设备信息。相应的缺陷指定单元从在相同阶段从不同图像拾取装置获得的图像中指定相同类型的缺陷的图像。图像转换单元将从相同阶段的不同图像拾取装置获得的图像转换成可比较的相似图像; 并且配方更新单元将分类类别记录在与相同类型的缺陷的指定图像相对应的分类配方中。

35. 发明授权

US09401015B2 Defect classification method, and defect classification system 有权
标题翻译：缺陷分类方法和缺陷分类系统
公开(公告)号：US09401015B2
公开(公告)日：2016-07-26
申请号：US14112105
申请日：2012-04-16
申请人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
发明人： Yohei Minekawa , Yuji Takagi , Minoru Harada , Takehiro Hirai , Ryo Nakagaki
IPC分类号： G06K9/00 , G06T7/00 , G01N23/225 , G06K9/62 , G06T5/00 , G01N21/95 , H01L21/66
CPC分类号： G06T7/001 , G01N21/9501 , G01N23/225 , G01N2223/421 , G01N2223/611 , G01N2223/646 , G06K9/6267 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： In automatic defect classification, a classification recipe must be set for each defect observation device. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created. This defect classification system has a classification recipe storage unit; an information specification unit, the stage of a stored image, and device information. A corresponding defect specification unit specifies images of the same type of defect from images obtained from different image pickup devices at the same stage. An image conversion unit converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.
摘要翻译：在自动缺陷分类中，必须为每个缺陷观察装置设定分类处方。如果多个设备在同一阶段进行操作，则分类配方中的分类等级必须相同。当创建新的分类配方时，出现了在不同装置中的分类等级中出现差异的问题。该缺陷分类系统具有分类配方存储单元; 信息指定单元，存储图像的级和设备信息。相应的缺陷指定单元从在相同阶段从不同图像拾取装置获得的图像中指定相同类型的缺陷的图像。图像转换单元将从相同阶段的不同图像拾取装置获得的图像转换成可比较的相似图像; 并且配方更新单元将分类类别记录在与相同类型的缺陷的指定图像相对应的分类配方中。

36. 发明申请

US20130070078A1 METHOD AND DEVICE FOR TESTING DEFECT USING SEM 有权
标题翻译：使用SEM测试缺陷的方法和装置
公开(公告)号：US20130070078A1
公开(公告)日：2013-03-21
申请号：US13520210
申请日：2010-12-22
申请人： Yuji Takagi , Minoru Harada , Ryo Nakagaki , Naoki Hosoya , Toshifumi Honda , Takehiro Hirai
发明人： Yuji Takagi , Minoru Harada , Ryo Nakagaki , Naoki Hosoya , Toshifumi Honda , Takehiro Hirai
IPC分类号： H04N7/18
CPC分类号： G06T7/001 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.
摘要翻译：在使用复查SEM执行电路图案的编程点检查时，即使在要检查的电路图案的变化大的情况下，也可以抑制误报的产生而进行稳定的检查。通过使用评价SEM将预定电路图案顺序成像获得的SEM图像存储在存储单元中。从存储的SEM图像中选择满足设定条件的图像，并平均以创建平均图像（GP图像）。通过使用该GP图像通过GP比较进行模式检查，即使当电路图案的变化大时也可以在抑制伪报告的产生的同时执行检查。

37. 发明申请

US20120257041A1 METHOD FOR DEFECT INSPECTION AND APPARATUS FOR DEFECT INSPECTION 审中-公开
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US20120257041A1
公开(公告)日：2012-10-11
申请号：US13513258
申请日：2010-11-22
申请人： Ryo Nakagaki , Minoru Harada , Takehiro Hirai , Yuji Takagi
发明人： Ryo Nakagaki , Minoru Harada , Takehiro Hirai , Yuji Takagi
IPC分类号： H04N7/18
CPC分类号： H01J37/28 , H01J2237/24592 , H01J2237/2817 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Provided is a technique for a wafer inspection conducted by simple operation, which is useful even when the inspection covers a variety of items and the inspection items are changed frequently with time like in a start-up period of a semi-conductor process. According to the technique, inspection images are collected, and then a template is prepared from the inspection images. A plurality of regions are defined on the template, and inspection methods and output indexes are registered in correspondence with the respective regions. In the inspection, by reference to the template images corresponding to the derived inspection images, the inspection is conducted based on the inspection information registered therein and the quantitative output levels are calculated.
摘要翻译：提供了一种通过简单的操作进行的晶片检查的技术，即使在检查覆盖各种物品并且检查项目在半导体处理的启动期间随时间频繁地变化也是有用的。根据该技术，收集检查图像，然后从检查图像准备模板。在模板上定义多个区域，并且与各个区域对应地登记检查方法和输出索引。在检查中，参考与导出的检查图像对应的模板图像，基于登记在其中的检查信息进行检查，并计算定量输出水平。

38. 发明授权

US09390490B2 Method and device for testing defect using SEM 有权
标题翻译：使用SEM测试缺陷的方法和装置
公开(公告)号：US09390490B2
公开(公告)日：2016-07-12
申请号：US13520210
申请日：2010-12-22
申请人： Yuji Takagi , Minoru Harada , Ryo Nakagaki , Naoki Hosoya , Toshifumi Honda , Takehiro Hirai
发明人： Yuji Takagi , Minoru Harada , Ryo Nakagaki , Naoki Hosoya , Toshifumi Honda , Takehiro Hirai
IPC分类号： H04N7/18 , G06T7/00 , H01L21/66
CPC分类号： G06T7/001 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： In performing a programmed-point inspection of a circuit pattern using a review SEM, stable inspection can be performed while suppressing the generation of a false report even when a variation in a circuit pattern to be inspected is large. SEM images that are obtained by sequentially imaging a predetermined circuit pattern using the review SEM are stored into a storage unit. Images that meet a set condition are selected from the stored SEM images, and averaged to create an average image (GP image). By performing pattern check by GP comparison using this GP image, an inspection can be performed while suppressing the generation of a false report even when a variation in the circuit patterns is large.
摘要翻译：在使用复查SEM执行电路图案的编程点检查时，即使在要检查的电路图案的变化大的情况下，也可以抑制误报的产生而进行稳定的检查。通过使用评价SEM将预定电路图案顺序成像获得的SEM图像存储在存储单元中。从存储的SEM图像中选择满足设定条件的图像，并平均以创建平均图像（GP图像）。通过使用该GP图像通过GP比较进行模式检查，即使当电路图案的变化大时也可以在抑制伪报告的产生的同时执行检查。

39. 发明授权

US07034299B2 Transmission electron microscope system and method of inspecting a specimen using the same 失效
标题翻译：透射电子显微镜系统及使用其的检查方法
公开(公告)号：US07034299B2
公开(公告)日：2006-04-25
申请号：US10918340
申请日：2004-08-16
申请人： Ryo Nakagaki , Yuji Takagi , Hirohito Okuda , Hiroshi Kakibayashi
发明人： Ryo Nakagaki , Yuji Takagi , Hirohito Okuda , Hiroshi Kakibayashi
IPC分类号： H01J37/26 , G01N23/04
CPC分类号： H01J37/222 , G01N23/04 , G06T7/0012 , H01J2237/26
摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.
摘要翻译：无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别样品中存在微观物质。

40. 发明申请

US20050051725A1 Transmission electron microscope system and method of inspecting a specimen using the same 失效
标题翻译：透射电子显微镜系统及使用其的检查方法
公开(公告)号：US20050051725A1
公开(公告)日：2005-03-10
申请号：US10918340
申请日：2004-08-16
申请人： Ryo Nakagaki , Yuji Takagi , Hirohito Okuda , Hiroshi Kakibayashi
发明人： Ryo Nakagaki , Yuji Takagi , Hirohito Okuda , Hiroshi Kakibayashi
IPC分类号： G01N23/04 , G01N33/48 , G01N23/00
CPC分类号： H01J37/222 , G01N23/04 , G06T7/0012 , H01J2237/26
摘要： It is possible to reliably and efficiently determine whether a specimen contains viruses, bacteria, etc. and, if it does, identify their types, regardless of the observer. Furthermore, even a newly-discovered bacterium can be quickly identified by utilizing a database at a remote location. A transmission microscope system has a microscope for observing a specimen and a database which stores, for each microscopic thing (such as a virus), a name, a specimen pretreatment method and an imaging condition used when the microscopic thing is observed, captured image data, etc. An image of the specimen is captured according to a specimen pretreatment method and an imaging condition retrieved from the database using the name of a target microscopic thing as a key, and the captured image is compared with images stored in the database to identify microscopic things present in the specimen.
摘要翻译：无论观察者如何，都可以可靠而有效地确定样本是否含有病毒，细菌等，如果有，则可以识别其类型。此外，甚至可以通过利用远程位置的数据库来快速识别新发现的细菌。透射显微镜系统具有用于观察标本的显微镜和存储针对每个微观事物（例如病毒）的名称，样本预处理方法和观察微观事物时使用的成像条件的数据库，捕获的图像数据等等。根据样本预处理方法和使用目标微观事物的名称作为关键从数据库检索的成像条件来捕获样本的图像，并将捕获的图像与存储在数据库中的图像进行比较以识别样品中存在微观物质。

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