专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US09082585B2 Defect observation method and device using SEM 有权
标题翻译：缺陷观察方法和装置采用SEM
公开(公告)号：US09082585B2
公开(公告)日：2015-07-14
申请号：US13143345
申请日：2009-11-27
申请人： Go Kotaki , Atsushi Miyamoto , Ryo Nakagaki , Takehiro Hirai
发明人： Go Kotaki , Atsushi Miyamoto , Ryo Nakagaki , Takehiro Hirai
IPC分类号： H04N7/18 , H01J37/22 , G06T7/00 , H01J37/26 , H01J37/28 , H01L21/66
CPC分类号： H01J37/222 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J37/265 , H01J37/28 , H01J2237/2817 , H01L22/12
摘要： An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.
摘要翻译：搜索能够在低放大倍率领域中获取的高倍率参考图像的成像区域，而不将舞台从低倍率下的缺陷区域成像的位置移动，并且如果搜索成功，则获取成像区域本身的图像并获取高倍率参考图像。如果搜索不成功，则将成像方案切换到从与缺陷区相邻的芯片获取高倍率参考图像的方案。

2. 发明授权

US09020237B2 Method for optimizing observed image classification criterion and image classification apparatus 有权
标题翻译：优化观察图像分类标准和图像分类装置的方法
公开(公告)号：US09020237B2
公开(公告)日：2015-04-28
申请号：US13702674
申请日：2011-05-13
申请人： Takehiro Hirai , Kozo Miyake , Junko Konishi
发明人： Takehiro Hirai , Kozo Miyake , Junko Konishi
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/0004 , G06T2200/24 , G06T2207/10061 , G06T2207/30148
摘要： A first object is to use both ADC (automatic defect classification) and MDC (manual defect classification) and reduce the amount of MDC operation. A second object is to prevent a DOI (defect of interest) from being missed.The first object is achieved by displaying judgment information on a screen. The judgment information is necessary when part of the classification is performed by ADC and part of the classification is performed by MDC and used to judge which classification is used, ADC or MDC. In the display operation, ADC classification results and MDC classification results are also displayed in the form of matrix. Further, a missed DOI rate is calculated for each classification threshold used in the defect classification and displayed on the screen.
摘要翻译：第一个目的是使用ADC（自动缺陷分类）和MDC（手动缺陷分类），并减少MDC操作的数量。第二个目的是防止DOI（感兴趣的缺陷）被遗漏。通过在屏幕上显示判断信息来实现第一个目的。当部分分类由ADC执行时，判断信息是必需的，部分分类由MDC执行，用于判断使用哪种分类，ADC或MDC。在显示操作中，ADC分类结果和MDC分类结果也以矩阵的形式显示。此外，针对在缺陷分类中使用并显示在屏幕上的每个分类阈值计算错失的DOI率。

3. 发明申请

US20120117010A1 DEVICE FOR CLASSIFYING DEFECTS AND METHOD FOR ADJUSTING CLASSIFICATION 有权
标题翻译：用于分类缺陷的装置和调整分类的方法
公开(公告)号：US20120117010A1
公开(公告)日：2012-05-10
申请号：US13376390
申请日：2010-07-08
申请人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
发明人： Makoto Ono , Yohei Minekawa , Junko Konishi , Takehiro Hirai , Yuya Isomae
IPC分类号： G06F15/18
CPC分类号： G06T7/001 , G06T2207/10056 , G06T2207/20076 , G06T2207/30148
摘要： Disclosed is a technique wherein an object that requires adjustment in order to increase the reliability of automatic classification can be easily identified. A device (140) for adjusting classification classifies defects into a first class group according to the feature amount of the defects that are obtained from image data obtained from an electron microscope (110), and classifies the defects into a second class group according to the feature amount of the defects classified into the first class group. And, the device (140) for adjusting the classification calculates classification performance by comparing the defects that have been classified into the second class group, and outputs the calculated classification performance in a predetermined display format to an output unit (180).
摘要翻译：公开了一种技术，其中可以容易地识别为了增加自动分类的可靠性而需要调整的对象。用于调整分类的装置（140）根据从电子显微镜（110）获得的图像数据获得的缺陷的特征量，将缺陷分类为第一类别组，并根据分类为第一类组的缺陷的特征量。并且，用于调整分类的装置（140）通过比较已分类为第二类组的缺陷，并将计算出的分类性能以预定显示格式输出到输出单元（180）来计算分类性能。

4. 发明申请

US20120044262A1 SURFACE OBSERVATION APPARATUS AND SURFACE OBSERVATION METHOD 有权
标题翻译：表面观察装置和表面观测方法
公开(公告)号：US20120044262A1
公开(公告)日：2012-02-23
申请号：US13318718
申请日：2010-05-25
申请人： Takehiro Hirai , Kenji Obara , Naoma Ban
发明人： Takehiro Hirai , Kenji Obara , Naoma Ban
IPC分类号： G06K9/62 , G09G5/377 , G06T3/40
CPC分类号： H01L22/20 , G06T7/001 , G06T2200/24 , G06T2207/10061 , G06T2207/30148 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A surface observation apparatus is achieved, which enables even a beginner to easily select an optimal evaluation indicator for each of various patterns to be evaluated without a trial and error approach. A plurality of images to be evaluated are input from an image processing unit (114) to an evaluation image input unit (113a) (in step 901). The input images to be evaluated are displayed on a display (115). A user rearranges the images in accordance with an evaluation criterion of the user while referencing the display (115), and defines an evaluation criterion (in step 902). Evaluation values are calculated for the input images (to be evaluated) using a plurality of evaluation indicators (in step 903). The evaluation values for each of the evaluation indicators are compared with the evaluation criterion defined by the user, and correlation coefficients are then calculated (in step 904). An evaluation indicator having the maximum absolute value of a correlation coefficient is automatically selected as an evaluation criterion that is closest to the evaluation criterion defined by the user (in step 905). The images are rearranged in order of correlation coefficient and a list of the images is displayed on the display (115) so that the images are arranged in order of evaluation value (in step 906).
摘要翻译：实现了表面观察装置，即使初学者也能够在不进行试错法的情况下容易地选择要评估的各种图案中的各种图案的最佳评价指标。将要评估的多个图像从图像处理单元（114）输入到评估图像输入单元（113a）（在步骤901中）。待评估的输入图像显示在显示器（115）上。用户根据用户的评价标准重新排列图像，同时参照显示器（115），并定义评估标准（步骤902）。使用多个评价指标对输入图像（待评价）计算评价值（步骤903）。将各评价指标的评价值与用户定义的评价标准进行比较，然后计算相关系数（步骤904）。自动选择具有相关系数的最大绝对值的评估指标作为最接近用户定义的评估标准的评估标准（在步骤905中）。按照相关系数的顺序重新排列图像，并且在显示器（115）上显示图像列表，使得以评估值的顺序排列图像（在步骤906中）。

5. 发明申请

US20110285839A1 DEFECT OBSERVATION METHOD AND DEVICE USING SEM 有权
标题翻译：缺陷观察方法和使用SEM的设备
公开(公告)号：US20110285839A1
公开(公告)日：2011-11-24
申请号：US13143345
申请日：2009-11-27
申请人： Go Kotaki , Atsushi Miyamoto , Ryo Nakagaki , Takehiro Hirai
发明人： Go Kotaki , Atsushi Miyamoto , Ryo Nakagaki , Takehiro Hirai
IPC分类号： H04N7/18
CPC分类号： H01J37/222 , G06T7/001 , G06T2207/10061 , G06T2207/30148 , H01J37/265 , H01J37/28 , H01J2237/2817 , H01L22/12
摘要： An imaging region of a high-magnification reference image capable of being acquired in a low-magnification field without moving a stage from a position at which a defective region has been imaged at a low magnification is searched for and if the search is successful, an image of the imaging region itself is acquired and the high-magnification reference image is acquired. If the search is unsuccessful, the imaging scheme is switched to that in which the high-magnification reference image is acquired from a chip adjacent to the defective region.
摘要翻译：搜索能够在低放大倍率领域中获取的高倍率参考图像的成像区域，而不将舞台从低倍率下的缺陷区域成像的位置移动，并且如果搜索成功，则获取成像区域本身的图像并获取高倍率参考图像。如果搜索不成功，则将成像方案切换到从与缺陷区相邻的芯片获取高倍率参考图像的方案。

6. 发明授权

US08036845B2 Method of correcting coordinates, and defect review apparatus 有权
标题翻译：校正坐标的方法和缺陷检查装置
公开(公告)号：US08036845B2
公开(公告)日：2011-10-11
申请号：US12792795
申请日：2010-06-03
申请人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
发明人： Takehiro Hirai , Kazuo Aoki , Kumi Kaneko
IPC分类号： G01C17/38 , G21C17/00
CPC分类号： G01R31/2884
摘要： The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.
摘要翻译：本发明提供了一种校正坐标的方法，以便在用于将样品台移动到特定坐标上以检查样品的检查装置中的视场中快速且适当地布置样品。根据本发明的检查装置，其是用于将样本台移动到由检查装置预先计算的坐标以检查样本的检查装置，具有保留多个坐标校正表以校正坐标的偏差的功能先前由检查装置计算的值和由检查装置检测到的实际样品位置。评估装置评估多个坐标校正表的校正精度，并且应用具有最大评估值的坐标校正表中的一个。

7. 发明申请

US20090206259A1 REVIEW METHOD AND REVIEW DEVICE 有权
标题翻译：审查方法和审查装置
公开(公告)号：US20090206259A1
公开(公告)日：2009-08-20
申请号：US12366179
申请日：2009-02-05
申请人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
发明人： Kenji Obara , Takehiro Hirai , Kohei Yamaguchi , Naoma Ban
IPC分类号： G01N23/00
CPC分类号： H01J37/21 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2817
摘要： A defect review method and a defect review device using an electron microscope, reduce the number of user processes necessary to set automatic focal adjustment of an electron beam to provide easier sample observation.The review method comprises the steps of: performing focal adjustment for a plurality of coordinate positions pre-registered on the coordinate on an object under observation; creating a criterion for focal adjustment based on a focal position at each of the plurality of coordinate positions; setting a focal probe range based on a deviation between the criterion and the focal position; and determining an automatic focal adjustment range for defect detection on the object under observation based on the set focal probe range.
摘要翻译：使用电子显微镜的缺陷检查方法和缺陷检查装置，减少设置电子束的自动聚焦调整所需的用户处理次数，以提供更容易的样品观察。检查方法包括以下步骤：对预先登记在观察对象上的坐标上的多个坐标位置执行焦点调整; 基于所述多个坐标位置中的每个坐标位置处的焦点位置创建用于焦点调整的标准; 根据标准和焦点位置之间的偏差设置焦点探测范围; 以及基于所设置的焦点探测范围确定用于观察对象的缺陷检测的自动焦点调整范围。

8. 发明申请

US20090121152A1 INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWING DEFECTS 有权
标题翻译：半导体波形检测方法及评估缺陷的设备
公开(公告)号：US20090121152A1
公开(公告)日：2009-05-14
申请号：US12352357
申请日：2009-01-12
申请人： Kenji OBARA , Takehiro HIRAI
发明人： Kenji OBARA , Takehiro HIRAI
IPC分类号： G21K5/10 , G01N23/00
CPC分类号： G01N23/2251 , H01J37/222 , H01J37/244 , H01J37/26 , H01J37/28 , H01J2237/24475 , H01J2237/2448 , H01J2237/24592 , H01J2237/28 , H01J2237/2809 , H01J2237/2817
摘要： An object of the present invention is to provide a suitable method of observing a wafer edge by using an electron microscope. The electron microscope includes a column which can take an image in being tilted, and thus allows a wafer edge to be observed from an oblique direction.
摘要翻译：本发明的目的是提供一种使用电子显微镜观察晶片边缘的合适方法。电子显微镜包括可以使图像倾斜的列，从而允许从倾斜方向观察晶片边缘。

9. 发明授权

US07361340B2 Antibody against tumor specific antigen as target 失效
标题翻译：针对肿瘤特异性抗原的抗体作为靶标
公开(公告)号：US07361340B2
公开(公告)日：2008-04-22
申请号：US11223812
申请日：2005-09-09
申请人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
发明人： Kimihasa Ichikawa , Shu Takahashi , Toshinori Agatsuma , Keisuke Fukuchi , Takehiro Hirai
IPC分类号： A61K39/395 , C07K16/30
CPC分类号： C07K16/30 , C07K2317/732 , C12Q1/6886 , C12Q2600/136 , C12Q2600/158
摘要： The present invention relates to a method of detecting cancer by use of an oncogene, a method of screening for an active compound useful to treat and/or prevent cancer, and a pharmaceutical composition for treatment and/or prevention of cancer. More specifically, the present invention provides a method of detecting cancer based on the expression of the human oculospanin gene as a marker and a pharmaceutical composition containing an antibody capable of specifically recognizing human oculospanin and having cytotoxic activity against cancer cells.
摘要翻译：本发明涉及通过使用癌基因检测癌症的方法，筛选用于治疗和/或预防癌症的活性化合物的方法和用于治疗和/或预防癌症的药物组合物。更具体地，本发明提供了一种基于人oculospanin基因作为标记物的表达和含有能够特异性识别人oculospanin并对癌细胞具有细胞毒性活性的抗体的药物组合物来检测癌症的方法。

10. 发明申请

US20080004742A1 Automatic defect review and classification system 有权
标题翻译：自动缺陷审查和分类系统
公开(公告)号：US20080004742A1
公开(公告)日：2008-01-03
申请号：US11892583
申请日：2007-08-24
申请人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
发明人： Takehiro Hirai , Kazuo Aoki , Kenji Obara
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/32218 , Y02P90/22
摘要： The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially execute ADR/ADC having high priority, the invention employs an algorithm for serially selecting ADR/ADC in the order of higher processing capacity (in the order of greater numerical values in the expression by a DPH unit) from among ADR/ADCs that have the lowest priority, no matter whether the ADR/DC is now under execution or not.
摘要翻译：本发明提出了一种系统，当ADC处理不能通过一个ADC不能跟踪ADR而不能执行但对具有高优先级的ADR使用ADC时，中断与具有低优先级的ADC相关联的处理的系统。为了优先执行具有高优先级的ADR / ADC，本发明采用一种用于从ADR / ADC中的处理能力较高（按DPH单元的表达式中的较大数值的数量级）的顺序选择ADR / ADC的算法，优先级最低，无论ADR / DC是否在执行中。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式