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31. 发明授权

US4691982A Optical coupler 失效
标题翻译：光耦合器
公开(公告)号：US4691982A
公开(公告)日：1987-09-08
申请号：US709300
申请日：1985-03-07
申请人： Yukuo Nishimura , Mamoru Miyawaki , Noriyuki Nose , Takashi Nakagiri
发明人： Yukuo Nishimura , Mamoru Miyawaki , Noriyuki Nose , Takashi Nakagiri
IPC分类号： G02B6/124 , G02B6/34 , G02B6/10
CPC分类号： G02B6/124 , G02B6/34
摘要： An optical coupler of good efficiency can be prepared at a low cost by making an optical waveguide and a grating of the optical coupler of a monomolecular layer or a monomolecular built-up film.
摘要翻译：通过制造光波导和单分子层或单分子组合膜的光耦合器的光栅，可以以低成本制备效率高的光耦合器。

32. 发明授权

US4595290A Device for measuring light incident on an optical system 失效
标题翻译：用于测量入射在光学系统上的光的装置
公开(公告)号：US4595290A
公开(公告)日：1986-06-17
申请号：US283233
申请日：1981-07-14
申请人： Noriyuki Nose , Kiyonobu Endo
发明人： Noriyuki Nose , Kiyonobu Endo
IPC分类号： G02B27/10 , G03B7/099 , G01J1/42
CPC分类号： G02B27/108 , G02B27/1086 , G03B7/09976
摘要： This invention provides a device for measuring light incident on an optical system. This device includes an optical system defining an optical path, a beam splitter and a photo detector. The beam splitter has a relief type diffraction lattice having a plurality of semireflecting surfaces periodically arranged and included in a transparent body. The diffraction lattice is arranged to split a portion of the incident light by its effect of reflection/diffraction and its beam splitting efficiency having a predetermined distribution within the lattice area. The diffracted light from the diffraction lattice is directed to the photo detector.
摘要翻译：本发明提供一种用于测量入射在光学系统上的光的装置。该装置包括限定光路的光学系统，分束器和光电检测器。分束器具有浮雕型衍射晶格，其具有周期性排列并包含在透明体中的多个半反射面。衍射栅格被布置成通过其反射/衍射效应将入射光的一部分分离，并且其分光效率在晶格区域内具有预定的分布。来自衍射晶格的衍射光被引导到光电检测器。

33. 发明授权

US4265522A Camera having a holographic indicator 失效
标题翻译：相机具有全息指示器
公开(公告)号：US4265522A
公开(公告)日：1981-05-05
申请号：US33687
申请日：1979-04-26
申请人： Kazuya Matsumoto , Susumu Matsumura , Noriyuki Nose , Youichi Okuno
发明人： Kazuya Matsumoto , Susumu Matsumura , Noriyuki Nose , Youichi Okuno
IPC分类号： G03B17/20 , G03H1/00 , G03H1/04 , G03H1/22
CPC分类号： G03H1/22 , G03H1/0248 , G03H1/0406 , G03H1/0408 , G03H1/2249 , G03H1/265 , G03H2001/221 , G03H2001/2231 , G03H2001/2234 , G03H2001/2284 , G03H2001/2615 , G03H2210/20 , G03H2222/34 , G03H2227/02 , G03H2240/11
摘要： A camera having a holographic indicator in which a reconstructed image of hologram and an image of an object formed by an image forming optical system are formed on the same plane, so that the reconstructed image and the object's image can be observed at the same diopter through a common observation optical system.
摘要翻译：具有全息指示器的照相机，其中在同一平面上形成全息图的重建图像和由图像形成光学系统形成的物体的图像，使得可以以相同的屈光度来观察重建图像和物体的图像常见的观察光学系统。

34. 发明授权

US5495336A Position detecting method for detecting a positional relationship between a first object and a second object 失效
标题翻译：位置检测方法，用于检测第一物体和第二物体之间的位置关系
公开(公告)号：US5495336A
公开(公告)日：1996-02-27
申请号：US441982
申请日：1995-05-16
申请人： Noriyuki Nose , Kunitaka Ozawa , Masanobu Hasegawa
发明人： Noriyuki Nose , Kunitaka Ozawa , Masanobu Hasegawa
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/70
摘要： A method of detecting the positional relationship between a first object and a second object is disclosed which includes projecting a first light through a convex lens mark of the first object and a concave lens pattern of the second object onto a first plane and projecting a second light through a concave lens mark of the first object and a convex lens pattern of the second object onto the first plane, wherein a first spacing between positions of incidence of the first light and the second light on the first plane increases with displacement of the second object relative to the first object in a predetermined direction. The method also includes projecting a third light through a concave lens mark of the first object and a convex lens pattern of the second object onto a second plane and projecting a fourth light through a convex lens mark of the first object and a concave lens pattern of the second object onto the second plane, wherein a second spacing between positions of incidence of the third light and the fourth light on the second plane decreases with displacement of the second object relative to the first object in the predetermined direction. The method also includes determining a reference for the detection of a position of the first object relative to a position of the second object on the basis of the first spacing and the second spacing as they become substantially equal to each other.
摘要翻译：本发明公开了一种检测第一物体与第二物体之间的位置关系的方法，其中包括将第一物体的凸透镜标记的第一光和第二物体的凹透镜图案投射到第一平面上，并将第二光通过第一物体的凹透镜标记和第二物体的凸透镜图案到第一平面上，其中第一光的入射位置和第一平面上的第二光的位置之间的第一间隔随着第二物体的位移而增加相对于第一物体在预定方向上。该方法还包括通过第一物体的凹透镜标记和第二物体的凸透镜图案将第三光投射到第二平面上，并将第四光通过第一物体的凸透镜标记投射并且将第四光投射到第二物体的凹透镜图案所述第二物体在所述第二平面上，其中所述第三光的入射位置与所述第二平面上的所述第四光的位置之间的第二间隔随着所述第二物体相对于所述第一物体沿所述预定方向的位移而减小。该方法还包括基于第一间隔和第二间隔基于彼此基本相等而确定用于检测第一物体相对于第二物体的位置的位置的参考。

35. 发明授权

US5461474A Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same 失效
标题翻译：用于检测被检查表面上的异物的检查装置，以及曝光装置及使用其的装置制造方法
公开(公告)号：US5461474A
公开(公告)日：1995-10-24
申请号：US266512
申请日：1994-06-27
申请人： Minoru Yoshii , Noriyuki Nose , Masayuki Suzuki , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
发明人： Minoru Yoshii , Noriyuki Nose , Masayuki Suzuki , Kyoichi Miyazaki , Toshihiko Tsuji , Seiji Takeuchi
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956 , H01L21/66
CPC分类号： G01N21/956 , G01N21/94
摘要： When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.
摘要翻译：当通过利用扫描系统的来自光源的光束扫描表面并通过检测器接收来自表面的散射光来检查要检查的表面上的异物的存在时，在表示第一当光束扫描表面上的第一条线时，从检测器获得的散射光，以及当光束沿正交方向扫描从第一条线移位预定量的第二条线时，从检测器获得的第二散射光的信号到第一行的方向。

36. 发明授权

US5379108A Alignment system 失效
标题翻译：校准系统
公开(公告)号：US5379108A
公开(公告)日：1995-01-03
申请号：US91959
申请日：1993-07-15
申请人： Noriyuki Nose , Naoto Abe
发明人： Noriyuki Nose , Naoto Abe
IPC分类号： G03F9/00 , H01L21/027 , H01L21/30 , G01B11/00
CPC分类号： G03F9/70
摘要： An alignment system includes an alignment detector for detecting a relative deviation of the mask and the wafer from a predetermined positional relationship, a stage mechanism for moving the mask relative to the wafer, an interferometer device for producing information related to the movement by the stage mechanism, and a controller for determining an input to be applied to the stage mechanism so as to bring the mask and the wafer into the predetermined positional relationship, on the basis of a detected value obtained through the alignment detector and a measured value obtained through the interferometer device, both being uptaken at the same timing, and for controlling the stage mechanism on the basis of the thus determined input.
摘要翻译：对准系统包括用于检测掩模和晶片与预定位置关系的相对偏离的对准检测器，用于使掩模相对于晶片移动的平台机构，用于产生与平台机构的移动有关的信息的干涉仪装置以及控制器，用于基于通过对准检测器获得的检测值和通过干涉仪获得的测量值，确定要施加到舞台机构的输入以使掩模和晶片达到预定位置关系的控制器装置，两者都在相同的定时被吸收，并且基于这样确定的输入来控制舞台机构。

37. 发明授权

US5343291A Method and apparatus for measuring an interval between two objects 失效
标题翻译：用于测量两个物体间隔的方法和装置
公开(公告)号：US5343291A
公开(公告)日：1994-08-30
申请号：US851109
申请日：1992-03-16
申请人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
发明人： Mitsutoshi Ohwada , Masakazu Matsugu , Shigeyuki Suda , Minoru Yoshii , Yukichi Niwa , Noriyuki Nose , Kenji Saitoh , Masanobu Hasegawa
IPC分类号： G03F9/00 , G01B11/02
CPC分类号： G03F9/7023 , G03F9/7049
摘要： A device for measuring an interval between two plate-like objects includes a light source for projecting a light toward the objects, a detector for detecting a position of incidence, upon a predetermined surface, of the light projected by the light source and deflected by the two objects, and a calculating portion for measuring the interval of the two objects on the basis of the detection by the detector.
摘要翻译：用于测量两个板状物体之间的间隔的装置包括：用于向物体投射光的光源;检测器，用于检测由光源投射并被光源偏转的预定表面上的入射位置; 两个物体和用于根据检测器的检测来测量两个物体的间隔的计算部分。

38. 发明授权

US5319444A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5319444A
公开(公告)日：1994-06-07
申请号：US20464
申请日：1993-02-22
申请人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
发明人： Kenji Saitoh , Masakazu Matsugu , Yukichi Niwa , Noriyuki Nose , Minoru Yoshii , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/14 , G01N21/86
CPC分类号： G03F9/7049
摘要： A method of detecting relative positional deviation between first and second objects. The method includes the steps of providing the first object with a first mark which functions as a lens, providing the second object with a second mark which functions as a lens, providing an optical system between the first and second objects, directing a radiation beam through the first mark and the optical system to the second mark, and detecting any shift of the radiation beam from the second mark irradiated with the radiation beam from the optical system, to detect the relative positional deviation of the first and second objects.
摘要翻译：一种检测第一和第二物体之间的相对位置偏差的方法。该方法包括以下步骤：向第一物体提供用作透镜的第一标记，为第二物体提供用作透镜的第二标记，在第一和第二物体之间提供光学系统，引导辐射束通过第一标记和第二标记的光学系统，并且检测来自用来自光学系统的辐射束照射的第二标记的辐射束的任何偏移，以检测第一和第二物体的相对位置偏差。

39. 发明授权

US5294980A Positioning detecting method and apparatus 失效
标题翻译：定位检测方法及装置
公开(公告)号：US5294980A
公开(公告)日：1994-03-15
申请号：US58662
申请日：1993-05-10
申请人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
发明人： Masakazu Matsugu , Kenji Saitoh , Yukichi Niwa , Noriyuki Nose , Ryo Kuroda , Shigeyuki Suda
IPC分类号： G03F9/00 , G01B11/00 , G01N21/85
CPC分类号： G03F9/70
摘要： A device for detecting a relative positional relationship between first and second objects with respect to a predetermined direction includes an illumination system for irradiating the first object with light, wherein the first and second objects are provided with first and second physical optic elements, respectively, each having a light converging or diverging function in at least one direction and wherein the illumination system illuminates the first physical optic element. A photodetecting system detects light passing through the first object and emanating from the second object, and is operable to detect light convergently or divergently influenced by both of the first and physical optic elements, such that the relative positional relationship between the first and second objects can be detected on the basis of the detection by the photodetecting system. At least one of the first and second physical optic elements has a light converging or diverging function in a direction perpendicular to the one direction and has different focal lengths in the perpendicular direction and in the one direction.
摘要翻译：用于检测相对于预定方向的第一和第二物体之间的相对位置关系的装置包括用于用光照射第一物体的照明系统，其中第一和第二物体分别设置有第一和第二物理光学元件，在至少一个方向上具有聚光或发散功能，并且其中所述照明系统照亮所述第一物理光学元件。光检测系统检测穿过第一物体并从第二物体发出的光，并且可操作以从第一物理光学元件和物理光学元件两者收敛或分散地检测光，使得第一和第二物体之间的相对位置关系基于光检测系统的检测来检测。第一和第二物理光学元件中的至少一个在垂直于一个方向的方向上具有聚光或发散功能，并且在垂直方向和一个方向上具有不同的焦距。

40. 发明授权

US5142156A Alignment method for printing a pattern of an original onto different surface areas of a substrate 失效
标题翻译：一种将原始图案印在基板不同表面上的对准方法
公开(公告)号：US5142156A
公开(公告)日：1992-08-25
申请号：US588947
申请日：1990-09-27
申请人： Kunitaka Ozawa , Shunichi Uzawa , Hirohisa Ohta , Makiko Mori , Noriyuki Nose
发明人： Kunitaka Ozawa , Shunichi Uzawa , Hirohisa Ohta , Makiko Mori , Noriyuki Nose
IPC分类号： G03F7/20 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30
CPC分类号： G03F7/70883 , G03F9/70
摘要： An alignment method for use in an exposure apparatus for printing a pattern of an original onto different surface areas of a substrate, the alignment method comprising the steps of: providing alignment marks around the pattern of the original and placing the original on an original supporting stage; providing a reference mark on an X-Y stage for supporting the substrate and being movable in X and Y directions, and moving the X-Y stage so as to place the reference mark at those positions, in sequence, which correspond to the alignment marks of the original, respectively, and which are preset in respect to a stage coordinate system; detecting, in sequence, positional errors of the alignment marks of the original with respect to the corresponding set positions, respectively, by using the reference mark and through the movement of the X-Y stage, wherein the positional errors are detected by use of positional error detectors which are provided to be associated with the alignment marks of the original, respectively; calculating a rotational error of the original with respect to the stage coordinate system, in .theta. direction, by using the positional errors; and rotationally moving the original supporting table in the .theta. direction so as to correct the rotational error.

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