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    • 2. 发明申请
    • ILLUMINATION DEVICE, LIGHT SOURCE DEVICE USED FOR THE SAME, AND LIQUID CRYSTAL DISPLAY EQUIPPED WITH THE ILLUMINATION DEVICE
    • 照明装置,用于其的光源装置和装备有照明装置的液晶显示装置
    • US20090279284A1
    • 2009-11-12
    • US12089974
    • 2006-07-19
    • Seiji TakeuchiTetsuya HamadaNoriyuki Ohashi
    • Seiji TakeuchiTetsuya HamadaNoriyuki Ohashi
    • G09F13/08F21K7/00
    • G02B6/0068G02B6/003G02B6/0073G02B6/0085G02F1/133615
    • In the case where RGB light emitting elements are used as light sources of a surface emitting type illumination device, the occurrence of color irregularity in the vicinity of a light incident surface is prevented, so that uniform white light is obtained on an entire light outgoing surface. In a light source device including light emitting elements of respective colors including red light emitting elements, green light emitting elements, and blue light emitting elements that emit light in a red (R) wavelength range, light in a green (G) wavelength range, and light in a blue (B) wavelength range, respectively, the light emitting elements being provided on one principal surface of a substrate, the light emitting elements of the respective colors are aligned in a longitudinal direction of the substrate, the number of the green light emitting elements is larger than the number of each of the red light emitting elements and the blue light emitting elements, and the light emitting elements of the respective colors in the longitudinal direction of the substrate are aligned at regular Intervals for each of the colors.
    • 在使用RGB发光元件作为表面发光型照明装置的光源的情况下,防止在光入射面附近发生颜色不规则,使得在整个光出射面上获得均匀的白光 。 在包括发射红色(R)波长范围的光的红色发光元件,绿色发光元件和蓝色发光元件的各种颜色的发光元件的光源装置中,具有绿色(G)波长范围的光, 和蓝色(B)波长范围的光,发光元件分别设置在基板的一个主表面上,各颜色的发光元件沿基板的纵向排列,绿色的数量 发光元件大于红色发光元件和蓝色发光元件的数量,并且基板的纵向方向上的各种颜色的发光元件以每种颜色的规则间隔对准。
    • 3. 发明授权
    • Exposure apparatus and device manufacturing method
    • 曝光装置和装置制造方法
    • US07573563B2
    • 2009-08-11
    • US11366356
    • 2006-03-01
    • Kenji YamazoeSeiji TakeuchiAkiyoshi Suzuki
    • Kenji YamazoeSeiji TakeuchiAkiyoshi Suzuki
    • G03B27/72G03B27/42G03B27/54
    • G03F7/7085G01J4/04G03F7/70058G03F7/70566G03F7/70591
    • An exposure apparatus includes an illumination optical system for illuminating the reticle using the ultraviolet light from the light source, and a polarization measuring unit measuring the polarization state of the ultraviolet light, the polarization measuring unit including an optical unit for providing at least three different phase differences to the ultraviolet light that has passed at least part of the illumination optical system, a polarization element for providing a different transmittance in accordance with a polarization state of the ultraviolet light that has passed the optical unit, and an image pickup device for detecting a light intensity of the ultraviolet light that has passed the polarization element, the polarization measuring unit measuring the polarization state of the ultraviolet light that has passed the at least part of the illumination optical system based on a detection result of the image pickup device.
    • 曝光装置包括:照明光学系统,其使用来自光源的紫外光照射标线片;以及偏振光测量单元,测量紫外光的偏振状态,所述偏振光测量单元包括用于提供至少三个不同相位的光学单元 与通过照明光学系统的至少一部分的紫外线的差异,根据通过光学单元的紫外线的偏振状态提供不同透射率的偏振元件,以及用于检测 通过偏振元件的紫外线的光强度,所述偏振光测定单元,根据所述摄像元件的检测结果,测量已经通过所述照明光学系统的至少一部分的紫外线的偏振状态。
    • 5. 发明授权
    • Exposure apparatus that acquires information regarding a polarization state of light from a light source
    • 获取关于来自光源的光的偏振状态的信息的曝光装置
    • US07015456B2
    • 2006-03-21
    • US10429742
    • 2003-05-06
    • Seiji TakeuchiYasuhiro Kishikawa
    • Seiji TakeuchiYasuhiro Kishikawa
    • H01J40/14
    • G03F7/7085G01J4/04G03F7/70566
    • A polarization state detecting system includes a first dividing device for dividing incident light into two light beams having the same polarization state as the incident light, a detector for detecting one of the two light beams from the first dividing device, through a polarizer, and an acquisition device for acquiring information regarding the polarization state of the incident light on the basis of an output of the detector. The first dividing device includes a first element, a second element and a third element. The second element is disposed so that a p-polarization component reflected by the first element is reflected by the second element as an s-polarization component. The third element is disposed so that a p-polarization component transmitted through the first element is reflected by the third element as an s-polarization component, and one of the two light beams is light reflected by the first element and reflected by the second element, while the other of the two light beams is light transmitted through the first element and transmitted through the third element.
    • 偏振态检测系统包括:第一分割装置,用于将入射光分成具有与入射光相同的偏振状态的两个光束;检测器,用于通过偏振器检测来自第一分割装置的两个光束中的一个;以及 获取装置,用于基于检测器的输出获取关于入射光的偏振状态的信息。 第一分割装置包括第一元件,第二元件和第三元件。 第二元件设置成使得由第一元件反射的p偏振分量作为s偏振分量被第二元件反射。 第三元件设置成使得透过第一元件的p偏振分量被第三元件作为s偏振分量反射,并且两个光束中的一个被第一元件反射并由第二元件反射 而两个光束中的另一个光透过第一元件透过第三元件。