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31. 发明授权

US07804934B2 Accurate measurement of layer dimensions using XRF 有权
标题翻译：使用XRF精确测量层的尺寸
公开(公告)号：US07804934B2
公开(公告)日：2010-09-28
申请号：US12272050
申请日：2008-11-17
申请人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
发明人： Dileep Agnihotri , Jeremy O'Dell , Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/223 , G01T1/36
CPC分类号： G01B15/02 , G01N23/223 , G01N2223/076 , H01L22/12
摘要： A method for inspection of a sample includes directing an excitation beam to impinge on an area of a planar sample that includes a feature having sidewalls perpendicular to a plane of the sample, the sidewalls having a thin film thereon. An intensity of X-ray fluorescence (XRF) emitted from the sample responsively to the excitation beam is measured, and a thickness of the thin film on the sidewalls is assessed based on the intensity. In another method, the width of recesses in a surface layer of a sample and the thickness of a material deposited in the recesses after polishing are assessed using XRF.
摘要翻译：用于检查样品的方法包括引导激发光束撞击平面样品的区域，该平面样品的区域包括具有垂直于样品平面的侧壁的特征，该侧壁在其上具有薄膜。测量响应于激发光束从样品发射的X射线荧光强度（XRF），并且基于强度来评估侧壁上的薄膜的厚度。在另一种方法中，使用XRF来评估样品的表面层中的凹陷的宽度和抛光后沉积在凹部中的材料的厚度。

32. 发明授权

US07649978B2 Automated selection of X-ray reflectometry measurement locations 有权
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US07649978B2
公开(公告)日：2010-01-19
申请号：US12232259
申请日：2008-09-12
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01B15/02
CPC分类号： G01N23/201 , G01N2223/052
摘要： The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质因数，表明在相应位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

33. 发明申请

US20060133570A1 Measurement of critical dimensions using X-ray diffraction in reflection mode 有权
$Measurement of critical dimensions using X-ray diffraction in reflection mode$
公开(公告)号：US20060133570A1
公开(公告)日：2006-06-22
申请号：US11018352
申请日：2004-12-22
申请人： Isaac Mazor , Boris Yokhin
发明人： Isaac Mazor , Boris Yokhin
IPC分类号： G01N23/20
CPC分类号： G01N23/20
摘要： A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on an area of a periodic feature on a surface of the sample and receiving the X-rays scattered from the surface in a reflection mode so as to detect a spectrum of diffraction in the scattered X-rays as a function of azimuth. The spectrum of diffraction is analyzed in order to determine a dimension of the feature.

34. 发明授权

US06947520B2 Beam centering and angle calibration for X-ray reflectometry 有权
标题翻译：用于X射线反射测量的光束对中和角度校准
公开(公告)号：US06947520B2
公开(公告)日：2005-09-20
申请号：US10313280
申请日：2002-12-06
申请人： Boris Yokhin , Isaac Mazor , David Berman
发明人： Boris Yokhin , Isaac Mazor , David Berman
IPC分类号： G01B15/00 , G01B15/08 , G01N23/20 , G01N23/201
CPC分类号： G01B15/00 , G01N23/20
摘要： A method for testing a surface of a sample includes irradiating the surface at a grazing incidence with a beam of radiation having a focal region, whereby the radiation is reflected from the surface. At least one of the focal region and the sample is adjusted through a plurality of adjustment stages within an adjustment range so as to vary a location of the focal region relative to the surface. Respective angular profiles of the radiation reflected from the surface are measured at the plurality of adjustment stages, and the angular profiles are compared in order to select an adjustment within the range at which the surface is in a desired alignment with the beam.
摘要翻译：用于测试样品表面的方法包括用具有聚焦区域的辐射束以掠入射照射表面，由此辐射从表面反射。焦点区域和样本中的至少一个通过调整范围内的多个调节台进行调节，以便改变聚焦区域相对于表面的位置。在多个调整阶段测量从表面反射的辐射的各个角度分布，并且比较角剖面，以便在表面与光束所期望的对准的范围内选择调节。

35. 发明授权

US07653174B2 Inspection of small features using X-ray fluorescence 有权
标题翻译：使用X射线荧光检查小特征
公开(公告)号：US07653174B2
公开(公告)日：2010-01-26
申请号：US12003215
申请日：2007-12-20
申请人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
发明人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.
摘要翻译：一种检查方法包括：使用聚焦的X射线束照射样品，以便在样品的表面上限定斑点。样本和X射线束中的至少一个被移动，以沿着与表面上的特征交叉的扫描路径扫描斑点。在沿着扫描路径的多个位置处测量从样品响应于X射线束发射的X射线荧光的相应强度，其中斑点与特征具有不同的重叠程度。处理在多个位置处测量的强度，以便计算扫描路径上发射的X射线荧光的调整值。基于调整值估计特征的厚度。

36. 发明申请

US20090074141A1 Automated selection of x-ray reflectometry measurement locations 有权
标题翻译：自动选择x射线反射测量位置
公开(公告)号：US20090074141A1
公开(公告)日：2009-03-19
申请号：US12232259
申请日：2008-09-12
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01N23/201 , H01L21/02 , B05C11/00
CPC分类号： G01N23/201 , G01N2223/052
摘要： A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

37. 发明申请

US20080159475A1 Inspection of small features using X-Ray fluorescence 有权
标题翻译：使用X射线荧光检查小特征
公开(公告)号：US20080159475A1
公开(公告)日：2008-07-03
申请号：US12003215
申请日：2007-12-20
申请人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
发明人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.
摘要翻译：一种检查方法包括：使用聚焦的X射线束照射样品，以便在样品的表面上限定斑点。样本和X射线束中的至少一个被移动，以沿着与表面上的特征交叉的扫描路径扫描斑点。在沿着扫描路径的多个位置处测量从样品响应于X射线束发射的X射线荧光的相应强度，其中斑点与特征具有不同的重叠程度。处理在多个位置处测量的强度，以便计算扫描路径上发射的X射线荧光的调整值。基于调整值估计特征的厚度。

38. 发明授权

US07120228B2 Combined X-ray reflectometer and diffractometer 有权
$Combined X-ray reflectometer and diffractometer$
公开(公告)号：US07120228B2
公开(公告)日：2006-10-10
申请号：US10946426
申请日：2004-09-21
申请人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
发明人： Boris Yokhin , Isaac Mazor , Tzachi Rafaeli
IPC分类号： G01B15/02
CPC分类号： G01N23/20008
摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample. At least one detector array is arranged to sense the X-rays scattered from the sample as a function of elevation angle over a range of elevation angles simultaneously, and to generate output signals responsively to the scattered X-rays. The detector array has a first configuration in which the detector array senses the X-rays that are reflected from the surface of the sample at a grazing angle, and a second configuration in which the detector array senses the X-rays that are diffracted from the surface in a vicinity of a Bragg angle of the sample. A signal processor processes the output signals so as to determine a characteristic of the surface layer of the sample.

39. 发明授权

US06639968B2 X-ray reflectometer 有权
公开(公告)号：US06639968B2
公开(公告)日：2003-10-28
申请号：US10300504
申请日：2002-11-20
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01N2320
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

40. 发明授权

US06453002B1 Differential measurement of X-ray microfluorescence 有权
标题翻译： X射线微荧光的差示测量
公开(公告)号：US06453002B1
公开(公告)日：2002-09-17
申请号：US09551715
申请日：2000-04-18
申请人： Isaac Mazor , Boris Yokhin , David Bar-On
发明人： Isaac Mazor , Boris Yokhin , David Bar-On
IPC分类号： G01T136
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method of X-ray analysis includes irradiating a spot on a sample with X-rays along an X-ray beam axis. X-rays emitted from the sample, responsive to irradiating the spot, are simultaneously detected at a plurality of different azimuthal angles relative to the beam axis. X-ray intensities detected at the different angles in a common energy range are compared in order to determine a property of the sample.
摘要翻译： X射线分析的方法包括沿着X射线轴的X射线照射样品上的斑点。响应于照射点而从样品发射的X射线相对于光束轴以多个不同的方位角同时检测。比较在共同能量范围内以不同角度检测的X射线强度，以确定样品的性质。

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