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1. 发明授权

US06895075B2 X-ray reflectometry with small-angle scattering measurement 有权
标题翻译：具有小角度散射测量的X射线反射测量
公开(公告)号：US06895075B2
公开(公告)日：2005-05-17
申请号：US10364883
申请日：2003-02-12
申请人： Boris Yokhin , Alexander Dikopoltsev , Tzachi Rafaeli , Amos Gvirtzman
发明人： Boris Yokhin , Alexander Dikopoltsev , Tzachi Rafaeli , Amos Gvirtzman
IPC分类号： G01N23/201 , G01N23/20 , G01N23/203
CPC分类号： G01N23/20
摘要： Apparatus for inspection of a sample includes a radiation source and an array of detector elements arranged to receive radiation from the surface due to irradiation of an area of the surface by the radiation source. The array has a first operative configuration for resolving the received radiation along a first axis perpendicular to the surface, and a second operative configuration for resolving the received radiation along a second axis parallel to the surface. A signal processor processes the signal from the detector array in the two configurations so as to determine a reflectance of the surface as a function of elevation angle relative to the surface and a scattering profile of the surface as a function of azimuthal angle in a plane of the surface.
摘要翻译：用于检查样品的装置包括辐射源和检测器元件的阵列，其布置成由于辐射源对表面的区域的照射而从表面接收辐射。该阵列具有用于沿着垂直于该表面的第一轴分解接收的辐射的第一操作配置，以及用于沿着平行于该表面的第二轴分解所接收的辐射的第二操作配置。信号处理器以两种配置处理来自检测器阵列的信号，以便确定作为相对于表面的仰角的函数的表面的反射率和作为方位角的函数的表面的散射曲线作为方位角的函数表面。

2. 发明授权

US06512814B2 X-ray reflectometer 有权
公开(公告)号：US06512814B2
公开(公告)日：2003-01-28
申请号：US09833902
申请日：2001-04-12
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01T136
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

3. 发明授权

US06639968B2 X-ray reflectometer 有权
公开(公告)号：US06639968B2
公开(公告)日：2003-10-28
申请号：US10300504
申请日：2002-11-20
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01N2320
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

4. 发明授权

US06895071B2 XRR detector readout processing 有权
标题翻译： XRR检测器读出处理
公开(公告)号：US06895071B2
公开(公告)日：2005-05-17
申请号：US10635365
申请日：2003-08-06
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01B15/02 , G01N23/20 , G01N23/223 , G01T1/36
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.
摘要翻译：反射仪装置包括：辐射源，其适于在相对于样品表面的一定范围的角度范围内辐射样品;以及检测器组件，其定位成在角度范围内接收从样品反射的辐射，并产生响应于此的信号。快门可调节地定位以拦截辐射，快门具有阻挡位置，其中阻挡在角度范围的下部的辐射，从而允许反射的辐射基本上仅在其中的较高部分范围和清晰的位置，其中该范围的下部的辐射基本上没有阻塞地达到阵列。

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