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1. 发明授权

US07653174B2 Inspection of small features using X-ray fluorescence 有权
标题翻译：使用X射线荧光检查小特征
公开(公告)号：US07653174B2
公开(公告)日：2010-01-26
申请号：US12003215
申请日：2007-12-20
申请人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
发明人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.
摘要翻译：一种检查方法包括：使用聚焦的X射线束照射样品，以便在样品的表面上限定斑点。样本和X射线束中的至少一个被移动，以沿着与表面上的特征交叉的扫描路径扫描斑点。在沿着扫描路径的多个位置处测量从样品响应于X射线束发射的X射线荧光的相应强度，其中斑点与特征具有不同的重叠程度。处理在多个位置处测量的强度，以便计算扫描路径上发射的X射线荧光的调整值。基于调整值估计特征的厚度。

2. 发明申请

US20080159475A1 Inspection of small features using X-Ray fluorescence 有权
标题翻译：使用X射线荧光检查小特征
公开(公告)号：US20080159475A1
公开(公告)日：2008-07-03
申请号：US12003215
申请日：2007-12-20
申请人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
发明人： Isaac Mazor , David Berman , Boris Yokhin , Alexander Tokar
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for inspection includes irradiating a sample using an X-ray beam, which is focused so as to define a spot on a surface of the sample. At least one of the sample and the X-ray beam is shifted so as to scan the spot along a scan path that crosses a feature on the surface. Respective intensities of X-ray fluorescence emitted from the sample responsively to the X-ray beam are measured at a plurality of locations along the scan path, at which the spot has different, respective degrees of overlap with the feature. The intensities measured at the plurality of the locations are processed in order to compute an adjusted value of the emitted X-ray fluorescence over the scan path. A thickness of the feature is estimated based on the adjusted value.
摘要翻译：一种检查方法包括：使用聚焦的X射线束照射样品，以便在样品的表面上限定斑点。样本和X射线束中的至少一个被移动，以沿着与表面上的特征交叉的扫描路径扫描斑点。在沿着扫描路径的多个位置处测量从样品响应于X射线束发射的X射线荧光的相应强度，其中斑点与特征具有不同的重叠程度。处理在多个位置处测量的强度，以便计算扫描路径上发射的X射线荧光的调整值。基于调整值估计特征的厚度。

3. 发明申请

US20060227931A1 Detection of dishing and tilting using x-ray fluorescence 有权
标题翻译：使用x射线荧光检测凹陷和倾斜
公开(公告)号：US20060227931A1
公开(公告)日：2006-10-12
申请号：US11103071
申请日：2005-04-11
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alexander Tokar
IPC分类号： G01N23/223 , G01T1/36
CPC分类号： G01N23/223 , G01N2223/076
摘要： A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.
摘要翻译：用于测试施加到样品表面的材料的方法包括将具有已知束宽度和强度横截面的激发束引导到样品的区域上。测量从响应于激发光束的区域发射的X射线荧光的强度。响应于X射线荧光的测量强度和激发光束的强度横截面，估计区域内材料的分布，其空间分辨率比光束宽度更精细。

4. 发明授权

US07680243B2 X-ray measurement of properties of nano-particles 有权
标题翻译：纳米颗粒的X射线测量性质
公开(公告)号：US07680243B2
公开(公告)日：2010-03-16
申请号：US11896909
申请日：2007-09-06
申请人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
发明人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
IPC分类号： G01N23/223 , G01N23/201
CPC分类号： G01N23/2206 , G01N2223/054 , G01N2223/076
摘要： A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.
摘要翻译：用于分析样品的方法包括引导一个或多个X射线束照射到已经形成了所选元素的纳米颗粒层的样品的表面的区域上。响应于一个或多个光束检测来自该区域的二次X射线辐射。基于检测到的辐射来表征纳米颗粒在表面上的分布。

5. 发明申请

US20090067573A1 X-ray measurement of properties of nano-particles 有权
标题翻译：纳米颗粒的X射线测量性质
公开(公告)号：US20090067573A1
公开(公告)日：2009-03-12
申请号：US11896909
申请日：2007-09-06
申请人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
发明人： Boris Yokhin , Alexander Tokar , Alexander Krokhmal , Asher Peled , Dileep Agnihotri
IPC分类号： G01N23/223
CPC分类号： G01N23/2206 , G01N2223/054 , G01N2223/076
摘要： A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.
摘要翻译：用于分析样品的方法包括引导一个或多个X射线束照射到已经形成了所选元素的纳米颗粒层的样品的表面的区域上。响应于一个或多个光束检测来自该区域的二次X射线辐射。基于检测到的辐射来表征纳米颗粒在表面上的分布。

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