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1. 发明授权

US08731138B2 High-resolution X-ray diffraction measurement with enhanced sensitivity 有权
$High-resolution X-ray diffraction measurement with enhanced sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US08731138B2
公开(公告)日：2014-05-20
申请号：US13547073
申请日：2012-07-12
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/20 , G01N23/203 , G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

2. 发明申请

US20110164730A1 High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity 有权
$High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US20110164730A1
公开(公告)日：2011-07-07
申请号：US12683436
申请日：2010-01-07
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Ofengenden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Ofengenden , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

3. 发明申请

US20060023836A1 Enhancement of X-ray reflectometry by measurement of diffuse reflections 有权
公开(公告)号：US20060023836A1
公开(公告)日：2006-02-02
申请号：US10902177
申请日：2004-07-30
申请人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
发明人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
IPC分类号： G01N23/20
CPC分类号： G01N23/203 , G01B15/02
摘要： A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.

4. 发明授权

US06512814B2 X-ray reflectometer 有权
公开(公告)号：US06512814B2
公开(公告)日：2003-01-28
申请号：US09833902
申请日：2001-04-12
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01T136
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.

5. 发明申请

US20120281814A1 High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity 有权
$High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US20120281814A1
公开(公告)日：2012-11-08
申请号：US13547073
申请日：2012-07-12
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

6. 发明授权

US08243878B2 High-resolution X-ray diffraction measurement with enhanced sensitivity 有权
$High-resolution X-ray diffraction measurement with enhanced sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US08243878B2
公开(公告)日：2012-08-14
申请号：US12683436
申请日：2010-01-07
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/20 , G01N23/203 , G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

7. 发明申请

US20070274447A1 Automated selection of X-ray reflectometry measurement locations 审中-公开
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US20070274447A1
公开(公告)日：2007-11-29
申请号：US11798617
申请日：2007-05-15
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01N23/20
CPC分类号： G01N23/201 , G01N2223/052
摘要： A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质指数，表示在各个位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

8. 发明授权

US07068753B2 Enhancement of X-ray reflectometry by measurement of diffuse reflections 有权
标题翻译：通过测量漫反射增强X射线反射率
公开(公告)号：US07068753B2
公开(公告)日：2006-06-27
申请号：US10902177
申请日：2004-07-30
申请人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
发明人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
IPC分类号： G01N23/20
CPC分类号： G01N23/203 , G01B15/02
摘要： A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.
摘要翻译：一种用于检查具有表面层的样品的方法。该方法包括在准直的X射线束照射样品时获取样品的第一反射光谱，并且处理第一反射光谱以测量样品的漫反射特性。在用X射线的会聚束照射样品的同时获取样品的第二反射光谱。使用漫反射特性分析第二反射光谱，以确定样品的表面层的特性。

9. 发明授权

US06895071B2 XRR detector readout processing 有权
标题翻译： XRR检测器读出处理
公开(公告)号：US06895071B2
公开(公告)日：2005-05-17
申请号：US10635365
申请日：2003-08-06
申请人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
发明人： Boris Yokhin , Alexander Dikopoltsev , Isaac Mazor , David Berman
IPC分类号： G01B15/02 , G01N23/20 , G01N23/223 , G01T1/36
CPC分类号： G01T1/36
摘要： Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.
摘要翻译：反射仪装置包括：辐射源，其适于在相对于样品表面的一定范围的角度范围内辐射样品;以及检测器组件，其定位成在角度范围内接收从样品反射的辐射，并产生响应于此的信号。快门可调节地定位以拦截辐射，快门具有阻挡位置，其中阻挡在角度范围的下部的辐射，从而允许反射的辐射基本上仅在其中的较高部分范围和清晰的位置，其中该范围的下部的辐射基本上没有阻塞地达到阵列。

10. 发明授权

US07649978B2 Automated selection of X-ray reflectometry measurement locations 有权
标题翻译：自动选择X射线反射测量位置
公开(公告)号：US07649978B2
公开(公告)日：2010-01-19
申请号：US12232259
申请日：2008-09-12
申请人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
发明人： Isaac Mazor , Alex Dikopoltsev , Boris Yokhin , Dileep Agnihotri , Tzachi Rafaeli , Alex Tokar , David Berman , Moshe Beylin
IPC分类号： G01B15/02
CPC分类号： G01N23/201 , G01N2223/052
摘要： The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.
摘要翻译：用于检查样品的计算机实现的方法包括在样品的表面上限定多个位置，用X射线照射每个位置处的表面，并测量X射线的角度分布，响应于光束从表面发射，以产生相应的多个X射线光谱。分析X射线光谱以产生各自的相应的品质因数，表明在相应位置处的X射线光谱的测量质量。响应于品质因数从多个位置中选择一个或多个位置，并且使用在所选择的位置处测量的X射线光谱来估计样品的性质。

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