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    • 35. 发明专利
    • FORMING METHOD FOR SELENIUM THIN FILM
    • JPH02137274A
    • 1990-05-25
    • JP28995588
    • 1988-11-18
    • HITACHI LTDJAPAN BROADCASTING CORP
    • MATSUBARA HIROKAZUHIRAI TADAAKITAKASAKI YUKIOYAMAZAKI JUNICHIKOSUGI MITSUOTAKETOSHI KAZUHISA
    • C23C14/06H01L21/368H01L31/0248
    • PURPOSE:To form, with excellent reproducibility, a photoconductive thin film excellent in sensitivity in a long wavelength region, the main material of which film is selenium abundant in adhesion, by activating in a vacuum at least a part of vaporization material whose main body is selenium, and forming a thin film. CONSTITUTION:When a thin film is formed, a reaction chamber 1 is first vacuumized; a substrate 3 is controlled at a specified temperature by a heater 4; a substrate retaining electrode 2 to retain the substrate 3 is negatively biased with respect to a crucible 6. Vaporization material 7, whose main body is selenium, is subjected to impulse heating and vaporized by accelerated electron emitted from an electron beam source 9, and deposited on the substrate 3 whose temperature is controlled, thereby forming a thin film whose main body is selenium. In this process, a part of vaporization material collides, in a vacuum, with the accelerated electron output from the electron beam source 9; said material is activated and accelerated by electric field, and rushes into the substrate 3. By the effect of activation, acceleration, and rushing- into of active species, a photoconductive thin film whose main body is selenium, and which is provided with distinctive thermal and electric characteristics unobtainable by conventional vacuum deposition, e.g., the increase of heat resistance and photoconductivity, can be obtained.
    • 40. 发明专利
    • X-RAY IMAGE PICKUP TUBE
    • JPH06302287A
    • 1994-10-28
    • JP8964693
    • 1993-04-16
    • JAPAN BROADCASTING CORPHITACHI LTD
    • MARUYAMA HIROTAKAKATO TSUTOMUNAGATSUMA KAZUYUKINAKANO YASUSHISAMEJIMA KENJITSUJI KAZUTAKAHIRAI TADAAKI
    • H01J9/233H01J31/49
    • PURPOSE:To provide a good quality of X-ray image pickup tube at a high sensitivity and a high resolution without generating a white spot image defect, by composing the first layer of a surface flatting layer with a material having the glass transition point higher than that of the material to compose the second layer. CONSTITUTION:On an X-ray permeable face plate 1, a surface flatting layer 2 which consists of the first surface flatting layer 201 and the second surface flatting layer 202, consisting of an amorphous material, is provided. As the material to compose the first layer 201, a material with the glass transition point higher than that of the material of the second layer 202 is used, and the second layer is formed on the first layer at the temperature scope higher than the glass transition point of the material to compose the second layer, and lower than the glass transition point of the material to compose the first layer. Consequently, when the second layer is heated and vapor deposited, or the second layer is heat-treated after the vapor deposition, a chemical combining force is operated between the first layer and the second layer, and an islanding of the second layer by the condensation force of the second layer itself can be prevented, and a high accuracy of flatted surface can be obtained.