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31. 发明申请

US20090284835A1 SCANNING MICROSCOPY USING INHOMOGENEOUS POLARIZATION 有权
标题翻译：扫描显微镜使用非均匀偏振
公开(公告)号：US20090284835A1
公开(公告)日：2009-11-19
申请号：US12464761
申请日：2009-05-12
申请人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
发明人： Doron Meshulach , Kobi Kan , Haim Feldman , Ido Dolev , Ori Sarfaty
IPC分类号： G02B27/28
CPC分类号： G02B21/0092 , G02B21/0068
摘要： Apparatus for imaging a surface, including an acousto-optic (AO) system. The AO system includes an AO element having a radiation input surface and a radiation output surface. The element is configured to receive radio-frequency (RF) pulses and a radiation input at the radiation input surface and to generate traveling beams from the radiation output surface. The AO system also includes an inhomogeneous polarization generator, positioned relative to the AO element so that the AO system outputs traveling inhomogeneously polarized beams. The apparatus includes objective optics which are configured to focus the inhomogeneously polarized beams onto the surface so as to form respective traveling spots thereon; collection optics, which are configured to collect scattered radiation from the traveling spots and to focus the scattered radiation to form respective image spots; and a detector which is arranged to receive the respective image spots and to generate a signal in response thereto.
摘要翻译：用于对表面进行成像的装置，包括声光（AO）系统。 AO系统包括具有辐射输入表面和辐射输出表面的AO元件。该元件被配置为在辐射输入表面处接收射频（RF）脉冲和辐射输入并且产生来自辐射输出表面的行进光束。 AO系统还包括相对于AO元件定位的不均匀偏振发生器，使得AO系统输出行进的非均匀偏振光束。该装置包括被配置为将不均匀偏振光束聚焦到表面上以在其上形成相应的行进点的物镜光学元件; 收集光学器件，其被配置为从所述行进点收集散射的辐射并且聚焦所述散射的辐射以形成相应的图像斑点; 以及检测器，其被布置成接收相应的图像点并响应于此产生信号。

32. 发明授权

US07342218B2 Methods and systems for optical inspection of surfaces based on laser screening 有权
标题翻译：基于激光筛选的表面光学检测方法和系统
公开(公告)号：US07342218B2
公开(公告)日：2008-03-11
申请号：US10327534
申请日：2002-12-19
申请人： Gilad Almogy , Haim Feldman
发明人： Gilad Almogy , Haim Feldman
IPC分类号： H01J3/14 , G01N27/00
CPC分类号： G01N21/8806 , G02B26/10
摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
摘要翻译：一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

33. 发明申请

US20070008519A1 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US20070008519A1
公开(公告)日：2007-01-11
申请号：US11394218
申请日：2006-01-23
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

34. 发明申请

US20060221331A1 High Throughput Inspection System and a Method for Generating Transmitted and/or Reflected Images 有权
标题翻译：高通量检测系统和生成传输和/或反射图像的方法
公开(公告)号：US20060221331A1
公开(公告)日：2006-10-05
申请号：US11425101
申请日：2006-06-19
申请人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
发明人： Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/956
摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
摘要翻译：用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

35. 发明授权

US07030978B2 System and method for inspection of a substrate that has a refractive index 有权
$System and method for inspection of a substrate that has a refractive index$
标题翻译：用于检查具有折射率的基板的系统和方法
公开(公告)号：US07030978B2
公开(公告)日：2006-04-18
申请号：US10423353
申请日：2003-04-25
申请人： Avishay Guetta , Haim Feldman , Ron Naftali , Doron Shoham
发明人： Avishay Guetta , Haim Feldman , Ron Naftali , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8422 , G01N21/8806
摘要： A system and method for inspection of a substrate having a first refractive index, the method including the steps of: (i) defining an apodization scheme in response to a characteristic of the layer; (ii) applying an apodizer to apodize a beam of radiation in response to the apodization scheme; (iii) directing the apodized beam of radiation to impinge on the substrate, whereby a plurality of rays are reflected from the substrate; whereas the apodized beam of radiation propagates through an at least partially transparent medium having a third refractive index and an at least partially transparent layer having a second refractive index and is subsequently reflected from the substrate; whereas the second refractive index differs from the first refractive index and from the third refractive index; and (iv) detecting at least some of the plurality of reflected rays.
摘要翻译：一种用于检查具有第一折射率的衬底的系统和方法，所述方法包括以下步骤：（i）响应于所述层的特性定义变迹方案; （ii）响应于变迹方案应用变迹器来变形辐射束; （iii）引导变迹的辐射束照射到衬底上，由此多个射线从衬底反射; 而变迹的辐射束通过具有第三折射率的至少部分透明的介质和具有第二折射率的至少部分透明的层传播，并随后从基底反射; 而第二折射率与第一折射率和第三折射率不同; 和（iv）检测所述多个反射光线中的至少一些。

36. 发明申请

US20060048090A1 Simulation of aerial images 有权
公开(公告)号：US20060048090A1
公开(公告)日：2006-03-02
申请号：US10928537
申请日：2004-08-27
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50 , G21K5/00
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.

37. 发明申请

US20050219518A1 Dark field inspection system 有权
标题翻译：暗场检查系统
公开(公告)号：US20050219518A1
公开(公告)日：2005-10-06
申请号：US10511092
申请日：2003-09-08
申请人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
发明人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
IPC分类号： G01N21/47 , G01N21/88 , G01N21/95 , G01N21/956 , G02B27/48
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
摘要翻译：用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应角度范围中，以便形成该区域的相应图像。图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

38. 发明授权

US09012875B2 Inspection method and an inspection system exhibiting speckle reduction characteristics 有权
标题翻译：检查方法和具有散斑特性的检查系统
公开(公告)号：US09012875B2
公开(公告)日：2015-04-21
申请号：US14009869
申请日：2011-04-07
申请人： Amir Shoham , Haim Feldman , Doron Shoham
发明人： Amir Shoham , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88 , G01N21/33
CPC分类号： G01N21/8806 , G01N21/33 , G01N2021/8822 , G01N2201/0697
摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
摘要翻译：具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲，在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

39. 发明授权

US08488117B2 Inspection system and method for fast changes of focus 有权
标题翻译：检测系统和方法快速改变焦点
公开(公告)号：US08488117B2
公开(公告)日：2013-07-16
申请号：US13224096
申请日：2011-09-01
申请人： Haim Feldman , Boris Morgenstein , Roman Naidis , Adam Baer
发明人： Haim Feldman , Boris Morgenstein , Roman Naidis , Adam Baer
IPC分类号： G01N21/00
CPC分类号： G02F1/29 , G01N21/8806 , G01N21/9501 , G02F1/11 , G02F2001/294
摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.
摘要翻译：检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

40. 发明申请

US20110170090A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION 有权
标题翻译：光学检测用照明系统
公开(公告)号：US20110170090A1
公开(公告)日：2011-07-14
申请号：US13069332
申请日：2011-03-22
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

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