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1. 发明申请

US20060197931A1 Printer and a method for recording a multi-level image 有权
标题翻译：打印机和记录多级图像的方法
公开(公告)号：US20060197931A1
公开(公告)日：2006-09-07
申请号：US11361418
申请日：2006-02-24
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.
摘要翻译：一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

2. 发明授权

US07053985B2 Printer and a method for recording a multi-level image 有权
公开(公告)号：US07053985B2
公开(公告)日：2006-05-30
申请号：US10615008
申请日：2003-07-07
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

3. 发明授权

US07342218B2 Methods and systems for optical inspection of surfaces based on laser screening 有权
标题翻译：基于激光筛选的表面光学检测方法和系统
公开(公告)号：US07342218B2
公开(公告)日：2008-03-11
申请号：US10327534
申请日：2002-12-19
申请人： Gilad Almogy , Haim Feldman
发明人： Gilad Almogy , Haim Feldman
IPC分类号： H01J3/14 , G01N27/00
CPC分类号： G01N21/8806 , G02B26/10
摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
摘要翻译：一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

4. 发明授权

US07379161B2 Printer and a method for recording a multi-level image 有权
标题翻译：打印机和记录多级图像的方法
公开(公告)号：US07379161B2
公开(公告)日：2008-05-27
申请号：US11361418
申请日：2006-02-24
申请人： Gilad Almogy , Haim Feldman , Meir Aloni
发明人： Gilad Almogy , Haim Feldman , Meir Aloni
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70208 , G03F7/70275 , G03F7/70291 , G03F7/70358
摘要： A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.
摘要翻译：一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击衬底，每个被调制的光束阵列响应于对应于对应的亮度级相关图像的输入信号被调制被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。

5. 发明授权

US6124924A Focus error correction method and apparatus 有权
标题翻译：聚焦误差校正方法及装置
公开(公告)号：US6124924A
公开(公告)日：2000-09-26
申请号：US220340
申请日：1998-12-24
申请人： Haim Feldman , Ron Naftali , Gilad Almogy , Amir Komeem
发明人： Haim Feldman , Ron Naftali , Gilad Almogy , Amir Komeem
IPC分类号： G02B7/34 , G03F7/20 , G03F9/00 , G11B7/09 , G01B11/26
CPC分类号： G03F7/70483 , G02B7/34 , G03F7/70358 , G03F9/7026 , G11B7/0908 , G11B7/0917
摘要： Scanning method and apparatus for maintaining a desired position of an article are presented. The apparatus comprises an illumination unit, a focusing optics and a focus detection unit. The illumination unit generates an incident light beam for illuminating an elongated region of the article and producing light returned from the illuminated region. The focusing optics focuses the incident beam onto a focal plane and collects at least a portion of the returned light. The focus detection unit comprises an imaging optics and a detector having a sensing surface responsive to light impinging thereon for generating data representative thereof. The imaging optics is capable of forming first and second images on the sensing surface. The first and second images are formed by first and second spatially separated substantially identical light components of the collected returned light, respectively, which propagate symmetrically relative to an optical axis of the focusing optics. A position of the first image relative to the second image is indicative of the position of the article relative to the focal plane.
摘要翻译：提出了用于维持制品所需位置的扫描方法和装置。该装置包括照明单元，聚焦光学元件和焦点检测单元。照明单元产生用于照亮物品的细长区域并产生从照明区域返回的光的入射光束。聚焦光学器件将入射光束聚焦在焦平面上并收集返回光的至少一部分。焦点检测单元包括成像光学器件和具有响应于其上的光照射的感测表面的检测器，用于产生代表其的数据。成像光学器件能够在感测表面上形成第一和第二图像。第一和第二图像分别由收集的返回光的第一和第二空间分离的基本相同的光分量形成，其相对于聚焦光学器件的光轴对称地传播。第一图像相对于第二图像的位置指示物品相对于焦平面的位置。

6. 发明申请

US20140299790A1 INSPECTION METHOD AND AN INSPECTION SYSTEM EXHIBITING SPECKLE REDUCTION CHARACTERISTICS 有权
标题翻译：检验方法和检验系统展示品种减少特性
公开(公告)号：US20140299790A1
公开(公告)日：2014-10-09
申请号：US14009869
申请日：2011-04-07
申请人： Amir Shoham , Haim Feldman , Doron Shoham
发明人： Amir Shoham , Haim Feldman , Doron Shoham
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/33 , G01N2021/8822 , G01N2201/0697
摘要： A method and an inspection system that exhibiting speckle reduction characteristics includes a light source arranged to generate input light pulses, and diffuser-free speckle reduction optics that include a beam splitter, for splitting an input light pulse from the light source into multiple light pulses that are oriented at angles in relation to each other when exiting the beam splitter, and at least one optical element for directing the multiple light pulses to impinge on an inspected object at different angles.
摘要翻译：具有斑点减少特性的方法和检查系统包括布置成产生输入光脉冲的光源和包括分束器的无漫射器散斑光学器件，用于将来自光源的输入光脉冲分成多个光脉冲，在离开分束器时相对于彼此的角度定向，并且至少一个光学元件用于引导多个光脉冲以不同的角度撞击在被检查物体上。

7. 发明申请

US20100188658A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 失效
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20100188658A1
公开(公告)日：2010-07-29
申请号：US12752995
申请日：2010-04-01
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/88 , G01N21/00
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。在探测波长处的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

8. 发明申请

US20100097680A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION 有权
标题翻译：光学检测用照明系统
公开(公告)号：US20100097680A1
公开(公告)日：2010-04-22
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G02B27/48 , G02B26/10
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

9. 发明授权

US07620932B2 Simulation of aerial images 有权
标题翻译：空中图像的模拟
公开(公告)号：US07620932B2
公开(公告)日：2009-11-17
申请号：US11966630
申请日：2007-12-28
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.
摘要翻译：用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。基于相干特性计算光学系统的相干分解。分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

10. 发明授权

US07331033B2 Simulation of aerial images 有权
标题翻译：空中图像的模拟
公开(公告)号：US07331033B2
公开(公告)日：2008-02-12
申请号：US10928537
申请日：2004-08-27
申请人： Haim Feldman
发明人： Haim Feldman
IPC分类号： G06F17/50
CPC分类号： G03F1/84 , G03F1/36 , G03F7/705 , G03F7/706
摘要： A method for generating a simulated aerial image of a mask projected by an optical system includes determining a coherence characteristic of the optical system. A coherent decomposition of the optical system is computed based on the coherence characteristic. The decomposition includes a series of expansion functions having angular and radial components that are expressed as explicit functions. The expansion functions are convolved with a transmission function of the mask in order to generate the simulated aerial image.
摘要翻译：用于产生由光学系统投影的掩模的模拟空间图像的方法包括确定光学系统的相干特性。基于相干特性计算光学系统的相干分解。分解包括一系列扩展函数，其具有表示为显式函数的角度和径向分量。扩展功能与掩模的传输功能一起卷积，以便产生模拟的航空图像。

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