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1. 发明申请

US20050219518A1 Dark field inspection system 有权
标题翻译：暗场检查系统
公开(公告)号：US20050219518A1
公开(公告)日：2005-10-06
申请号：US10511092
申请日：2003-09-08
申请人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
发明人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
IPC分类号： G01N21/47 , G01N21/88 , G01N21/95 , G01N21/956 , G02B27/48
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
摘要翻译：用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应角度范围中，以便形成该区域的相应图像。图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

2. 发明授权

US07339661B2 Dark field inspection system 有权
标题翻译：暗场检查系统
公开(公告)号：US07339661B2
公开(公告)日：2008-03-04
申请号：US10511092
申请日：2003-09-08
申请人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
发明人： Doron Korngut , Erez Admoni , Ofer Kadar , Lev Haikoviz , Haim Feldman , Avishay Guetta
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
摘要翻译：用于检查样品的装置包括辐射源，其适于将光辐射引导到样品表面的区域上，以及多个图像传感器。每个图像传感器被配置为将从该区域散射的辐射接收到不同的相应的角度范围中，以便形成该区域的相应图像。图像处理器适于处理各个图像中的至少一个，以便检测表面上的缺陷。

3. 发明申请

US20110043806A1 INTRUSION WARNING SYSTEM 有权
标题翻译：入侵警告系统
公开(公告)号：US20110043806A1
公开(公告)日：2011-02-24
申请号：US12988321
申请日：2009-04-16
申请人： Avishay Guetta , Doron Korngut , Gil Blai
发明人： Avishay Guetta , Doron Korngut , Gil Blai
IPC分类号： G01N21/00
CPC分类号： G08B13/2491 , G01S17/026 , G08B13/181
摘要： A system for detecting intrusion across a surface, comprising a plurality of light sources projecting an array of illuminating beams along different optical paths in the surface and a detector array system directed such that it detects along a plurality of fields of view in the surface, illumination reflected from the illuminating beams. A signal processing system detects changes along the array of fields of view, in the reflected illumination level detected by the detector system. An increase greater than a predefined level in the reflected illumination level from any field of view provides an indication of an intrusion across the surveilled surface along that field of view, at the crossing point of the direction of that field of view with the optical path whose illuminating beam generated the increase in reflected illumination from that field of view.
摘要翻译：一种用于检测跨越表面的入侵的系统，包括多个光源，所述多个光源沿着所述表面中的不同光路投射照明光束的阵列;以及探测器阵列系统，其被指示为沿着所述表面中的多个视野检测照明从照明光束反射。信号处理系统在由检测器系统检测到的反射照明水平中检测沿视场阵列的变化。在任何视野的反射照明水平上大于预定水平的增加提供了沿着该视场在该视野方向的交叉点处与沿着该视野的观察点的入射表面的入射指示，照明光束从该视野产生反射照明的增加。

4. 发明授权

US07265900B2 Inspection system with oblique viewing angle 有权
标题翻译：检视系统具有倾斜视角
公开(公告)号：US07265900B2
公开(公告)日：2007-09-04
申请号：US10511084
申请日：2003-09-08
申请人： Doron Korngut , Benjamin Cohen , Avishay Guetta
发明人： Doron Korngut , Benjamin Cohen , Avishay Guetta
IPC分类号： G02B21/06
CPC分类号： G01N21/8806 , G01N21/94 , G01N21/9501 , G01N21/95623 , G01N2021/479 , G02B27/0025 , G02B27/48
摘要： Apparatus for imaging an area of a surface along a viewing angle that is oblique to the surface includes an afocal optical relay, which is adapted to form a tilted initial image of the area by collecting optical radiation from the area along an optical axis oriented at the viewing angle. A tilt correction unit is coupled to correct a tilt of the initial image so as to form a substantially undistorted intermediate image. A magnification module is coupled to focus the intermediate image onto an image detector.
摘要翻译：用于沿着与表面倾斜的视角成像表面区域的设备包括无焦光学继电器，其适于通过沿着沿着所述光学轴线的光轴收集来自所述区域的光辐射来形成所述区域的倾斜初始图像可视角度。耦合倾斜校正单元以校正初始图像的倾斜度，以便形成基本上未变形的中间图像。耦合放大模块以将中间图像聚焦到图像检测器上。

5. 发明申请

US20060066843A1 Optical inspection with alternating configurations 有权
标题翻译：具有交替配置的光学检查
公开(公告)号：US20060066843A1
公开(公告)日：2006-03-30
申请号：US11234492
申请日：2005-09-22
申请人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
发明人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/479
摘要： An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
摘要翻译：用于检查样品的成像系统包括照射模块，其照射具有脉冲光辐射的样品表面。机械扫描器将成像系统的样本和部分中的至少一个平移以扫描由表面上的脉冲光辐射照射的区域，以便通过相应的连续的脉冲脉冲来照射表面上的连续的部分重叠的帧辐射。收集模块收集从表面散射的光辐射，以捕获被照射的帧的图像序列。系统控制器与脉冲光辐射同步地在至少第一和第二不同光学配置之间交替地改变成像系统的配置。

6. 发明申请

US20130087684A1 LASER DAYLIGHT DESIGNATION AND POINTING 有权
标题翻译：激光指示和指示
公开(公告)号：US20130087684A1
公开(公告)日：2013-04-11
申请号：US13515863
申请日：2010-12-14
申请人： Avishay Guetta , Michael Yagudaev , Doron Korngut
发明人： Avishay Guetta , Michael Yagudaev , Doron Korngut
IPC分类号： H01L27/146 , H01L27/148
CPC分类号： F41G7/2293 , F41G3/02 , F41G3/145 , F41G7/2246 , F41G7/226 , G01S7/4914 , G01S17/32 , G01S17/89 , H01L27/146 , H01L27/14643 , H01L27/148
摘要： A laser designator system using modulated CW laser diodes and a conventional high pixel count image sensor array, such as CCD or CMOS array. These two technologies, diode lasers and imaging sensor arrays are reliable, widely used and inexpensive technologies, as compared with prior art pulsed laser systems. These systems are distinguished from the prior art systems in that they filter the laser signal spatially, by collecting light over a comparatively long period of time from a very few pixels out of the entire field of view of the image sensor array. This is in contrast to the prior art systems where the laser signal is filtered temporarily, over a very short time span, but over a large fraction of the field of view. By spatially filtering the signal outputs of the individual pixels, it becomes possible to subtract the background illumination from the illuminated laser spot.
摘要翻译：一种使用调制CW激光二极管和常规高像素数像素传感器阵列（如CCD或CMOS阵列）的激光指示系统。与现有技术的脉冲激光系统相比，这两种技术，二极管激光器和成像传感器阵列是可靠的，广泛使用的和便宜的技术。这些系统与现有技术的系统不同，它们通过从图像传感器阵列的整个视野内的极少数像素中收集较长时间的光，从而在空间上对激光信号进行滤波。这与现有技术的系统不同，其中激光信号在非常短的时间跨度上临时滤波，但是在视场的很大一部分上。通过对各个像素的信号输出进行空间滤波，可以从照明的激光光斑中减去背景照明。

7. 发明申请

US20070008520A1 FIELD FOLDING OPTICAL METHOD FOR IMAGING SYSTEM 有权
标题翻译：用于成像系统的现场折叠光学方法
公开(公告)号：US20070008520A1
公开(公告)日：2007-01-11
申请号：US11426054
申请日：2006-06-23
申请人： Avishay Guetta , Doron Korngut , Gil Blai , Yoni Cohen
发明人： Avishay Guetta , Doron Korngut , Gil Blai , Yoni Cohen
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/47 , G01N21/8806
摘要： Apparatus for inspecting a surface of a sample, including a detector and folding optics. The folding optics are configured to receive radiation arising from a first region of the surface and from a second region of the surface. The first region and the second region have a first spatial relationship with respect to each other. The folding optics form from the radiation a first image of the first region and a second image of the second region on the detector, wherein the first image is a linear transformation of the first region and the second image is the linear transformation of the second region. The first image and the second image have a second spatial relationship, different from the linear transformation of the first spatial relationship, with respect to each other.
摘要翻译：用于检查样品表面的装置，包括检测器和折叠光学元件。折叠光学元件构造成接收从表面的第一区域和表面的第二区域产生的辐射。第一区域和第二区域相对于第一区域和第二区域具有第一空间关系。折射光学器件从辐射形成第一区域的第一图像和检测器上的第二区域的第二图像，其中第一图像是第一区域的线性变换，第二图像是第二区域的线性变换。第一图像和第二图像具有与第一空间关系的线性变换不同的第二空间关系。

8. 发明申请

US20060066870A1 Speckle reduction with transparent blocks 有权
公开(公告)号：US20060066870A1
公开(公告)日：2006-03-30
申请号：US11236355
申请日：2005-09-26
申请人： Doron Korngut , Avishay Guetta
发明人： Doron Korngut , Avishay Guetta
IPC分类号： G01B11/02
CPC分类号： G02B27/48
摘要： Apparatus for reducing speckle, including a first coherence-reducing component, having a first array of transparent first elements arranged to receive different, respective first portions of a collimated light beam that is incident on the first component, the first elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective first portions as respective first collimated sub-beams. The apparatus further includes a second coherence-reducing component, having a second array of transparent second elements arranged to receive different, respective second portions of each of the first collimated sub-beams of the light beam, the second elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective second portions as respective second collimated sub-beams. The apparatus also includes a light combiner, which is arranged to combine the second collimated sub-beams into a collimated output beam.

9. 发明授权

US09761102B2 Terrain surveillance system 有权
公开(公告)号：US09761102B2
公开(公告)日：2017-09-12
申请号：US14115392
申请日：2012-05-03
申请人： Avishay Guetta , Michael Yagudaev , Doron Korngut
发明人： Avishay Guetta , Michael Yagudaev , Doron Korngut
IPC分类号： G08B13/189 , G08B13/184
CPC分类号： G08B13/189 , G08B13/184
摘要： A system for the surveillance of terrain and the detection of intrusions over a plane extending into that terrain. A curtain array of light beams is projected along the plane and reflections from the terrain are detected by a sensor array essentially spatially coincident with the array of light sources. The times of flight of the beams are determined, and these characterize the form of the terrain being surveilled. The initial background reflection pattern is acquired and stored by the system. A sudden change in this detected background pattern can be defined as arising from an unexpected reflection, indicative of an intrusion. Signal processing systems are described utilizing modulated laser beams and detection at a frequency at least twice that of the modulation, such that reflected signals arising from the ON and the OFF periods of the laser modulation can be subtracted to eliminate the background signals.

10. 发明授权

US07586959B2 Speckle reduction with transparent blocks 有权
标题翻译：散斑减少与透明块
公开(公告)号：US07586959B2
公开(公告)日：2009-09-08
申请号：US11236355
申请日：2005-09-26
申请人： Doron Korngut , Avishay Guetta
发明人： Doron Korngut , Avishay Guetta
IPC分类号： G02B27/48
CPC分类号： G02B27/48
摘要： Apparatus for reducing speckle, including a first coherence-reducing component, having a first array of transparent first elements arranged to receive different, respective first portions of a collimated light beam that is incident on the first component, the first elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective first portions as respective first collimated sub-beams. The apparatus further includes a second coherence-reducing component, having a second array of transparent second elements arranged to receive different, respective second portions of each of the first collimated sub-beams of the light beam, the second elements generating different, respective optical lengths with respect to the light beam passing therethrough and outputting the respective second portions as respective second collimated sub-beams. The apparatus also includes a light combiner, which is arranged to combine the second collimated sub-beams into a collimated output beam.
摘要翻译：用于减少斑点的装置，包括第一相干减少部件，具有第一阵列的透明第一元件，其布置成接收入射在第一部件上的准直光束的不同的相应的第一部分，第一元件产生不同的相应光学相对于通过其的光束的长度，并将相应的第一部分作为相应的第一准直子光束输出。该装置还包括第二相干减少部件，具有透明第二元件的第二阵列，布置成接收光束的每个第一准直子光束的不同的相应的第二部分，第二元件产生不同的相应的光学长度相对于通过其的光束，并将相应的第二部分作为相应的第二准直子光束输出。该装置还包括一个组合器，其被布置成将第二准直子光束组合成准直的输出光束。

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