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    • 28. 发明授权
    • Valve for vacuum exhaustion system
    • 真空排气系统阀门
    • US07472887B2
    • 2009-01-06
    • US10545672
    • 2004-02-09
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • Tadahiro OhmiNobukazu IkedaMichio YamajiMasafumi KitanoAkihiro Morimoto
    • F16K7/17
    • F16K7/14F16K27/003F16K51/02
    • The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent the corrosions, cloggings, and seal leakages inside the piping system caused by the accumulation of substances produced by the decomposition of the gas.Specifically, the aluminum passivation is applied on the piping parts, i.e. the valve and others, used in the vacuum exhaustion system to inhibit the gas decomposition caused by the temperature rise at the time of the baking so that components for the reduction in the diameter size in the vacuum exhaustion system are provided. The corrosions, cloggings and seat leakages caused by the gas decomposition are prevented.
    • 本发明提供一种阀,其能够减小用于真空排气系统的设备的真空排气管的直径,结果是降低成本,并且使真空耗尽时间短,并且还可以防止 由气体分解产生的物质的积聚引起的管道系统内的腐蚀,堵塞和密封泄漏。 具体地说,在真空耗尽系统中使用的管道部件即阀门等上施加铝钝化,以抑制由烘烤时的温度升高引起的气体分解,从而减小直径尺寸的部件 在真空耗尽系统中提供。 防止气体分解引起的腐蚀,堵塞和座椅泄漏。