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1. 发明授权

US06705341B2 Mass flow controller 失效
标题翻译：质量流量控制器
公开(公告)号：US06705341B2
公开(公告)日：2004-03-16
申请号：US10377054
申请日：2003-02-28
申请人： Rajinder S. Gill
发明人： Rajinder S. Gill
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/0368 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller has a sensor section that generates an electrical signal, dependent on the measured flow rate. The controller sends a control signal to a magnetic field generating unit, dependent upon the actual flow rate and the desired flow rate, which in response, generates a magnetic flux in the direction of the fluid input to the fluid output through the body of the controller. This means that the magnetic flux is concurrent with the fluid flow within the mass flow controller body. The magnetic flux alters the position of a plunger button assembly, located between the bypass chamber and the fluid output, relative to an orifice plate to control the flow rate to obtain the desired output flow. By incorporating the proportional control valve within the mass flow controller body, the need for a separate and large valve section is eliminated, reducing the size and cost of the controller.
摘要翻译：质量流量控制器具有根据所测量的流量产生电信号的传感器部分。控制器根据实际流量和期望流量将控制信号发送到磁场产生单元，该流量作为响应，在流体输入通过控制器主体输出的流体的方向上产生磁通量。这意味着磁通量与质量流量控制器主体内的流体流动同时发生。磁通量相对于孔板改变位于旁路室和流体输出之间的柱塞按钮组件的位置，以控制流量以获得期望的输出流量。通过将比例控制阀结合在质量流量控制器主体内，消除了对单独的和大的阀部分的需要，从而减小了控制器的尺寸和成本。

2. 发明授权

US06681797B2 Pressure transducer 失效
标题翻译：压力传感器
公开(公告)号：US06681797B2
公开(公告)日：2004-01-27
申请号：US10150239
申请日：2002-05-16
申请人： Eugen Mannhart
发明人： Eugen Mannhart
IPC分类号： G05D706
CPC分类号： G05D16/202 , Y10T137/7761
摘要： A pressure transducer for the production of a controlled under or overpressure comprises a valve to which compressed air can be applied, a motor for adjusting the position of the valve block, a sensor for measuring the pressure to be controlled and an electronic controller. The valve comprises a valve block working together with a valve seat. The rotational movement of the shaft of the motor is converted into a longitudinal movement of the valve block by means of a coupling. Between the shaft of the motor and the valve block, a spring is inserted which applies a mechanical load to the motor so that the motor does not reach the set speed given by the controller but turns slower. The load on the motor is dependent on the position of the valve block. For the controller, this is equivalent to a linearization of the characteristic curve of the regulated system.
摘要翻译：用于产生受控的低压或超压的压力传感器包括可以施加压缩空气的阀，用于调节阀块的位置的电动机，用于测量要控制的压力的传感器和电子控制器。该阀包括与阀座一起工作的阀块。马达的轴的旋转运动通过联轴器转换成阀块的纵向移动。在马达的轴和阀块之间，插入弹簧，该弹簧对马达施加机械载荷，使得马达不达到由控制器给出的设定速度，但是变慢。电机上的负载取决于阀块的位置。对于控制器，这相当于调节系统的特性曲线的线性化。

3. 发明授权

US06564825B2 Mass flow meter systems and methods 失效
公开(公告)号：US06564825B2
公开(公告)日：2003-05-20
申请号：US10226378
申请日：2002-08-23
申请人： Patrick A. Lowery , Petur Thordarson , Robert Laragione
发明人： Patrick A. Lowery , Petur Thordarson , Robert Laragione
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10T137/0318 , Y10T137/0989 , Y10T137/7761
摘要： A flow meter system that calculates mass flow rate based only on a single pressure signal. A flow controller is arranged in parallel with a restriction such that it constant pressure differential is maintained across the restriction. The pressure, and temperature if not controlled, of the fluid flowing through the restriction is measured on either side of the restriction. The pressure is compared to a plot of pressure versus mass flow rate calculated for the specific restriction and fluid being measured. The constant pressure differential maintained across the restriction yields a linear relationship between pressure and flow rate. If temperature is not controlled, the plot or pressure versus mass flow rate will remain linear, but the slope of the curve will be adjusted based on the temperature of the fluid.

4. 发明授权

US06561218B2 Small internal volume fluid mass flow control apparatus 有权
标题翻译：小内部体积流体质量流量控制装置
公开(公告)号：US06561218B2
公开(公告)日：2003-05-13
申请号：US09912043
申请日：2001-07-24
申请人： Daniel T. Mudd
发明人： Daniel T. Mudd
IPC分类号： G05D706
CPC分类号： F16K31/007 , G05D7/0635 , Y10T137/7761 , Y10T137/87354
摘要： A fluid mass flow control apparatus, particularly useful for controlling low flow rates of fluids used in semiconductor manufacturing processes, comprises a first elongated flow tube connected to an inlet fitting and to a capsule like valve housing and a second elongated tube connected to the inlet fitting and the valve housing and including a flow sensor. The valve housing is connected to a magnetostrictive actuator including an elongated actuator member disposed in a conduit connected to the valve housing and serving as part of the fluid flow path through the apparatus. An electromagnetic coil is disposed about the conduit and the actuator and is responsive to energization to effect controlled elongation of the actuator to control the position of a valve closure member disposed in the valve housing. Adjustments to full-scale flow ranges of the apparatus may be obtained by inserting a tube or wire in the flow sensor tube to act as a flow restrictor.
摘要翻译：流体质量流量控制装置，特别适用于控制在半导体制造过程中使用的流体的低流速，包括连接到入口配件和胶囊状阀壳体的第一细长流管和连接到入口配件的第二细长管和阀壳体并且包括流量传感器。阀壳体连接到磁致伸缩致动器，其包括设置在连接到阀壳体的导管中的细长致动器构件，并且用作通过该装置的流体流动路径的一部分。电磁线圈围绕导管和致动器设置并且响应于通电以实现致动器的受控伸长以控制设置在阀壳体中的阀关闭构件的位置。可以通过将管或线插入流量传感器管中以用作流量限制器来获得对装置的满量程流量范围的调节。

5. 发明授权

US06443174B2 Fluid mass flow control valve and method of operation 有权
标题翻译：流体质量流量控制阀和操作方法
公开(公告)号：US06443174B2
公开(公告)日：2002-09-03
申请号：US09900829
申请日：2001-07-06
申请人： Daniel T. Mudd
发明人： Daniel T. Mudd
IPC分类号： G05D706
CPC分类号： G01F1/6842 , G01F1/6847 , G01F5/00 , G05D7/0635 , Y10T137/0324 , Y10T137/0368 , Y10T137/7759 , Y10T137/7761 , Y10T137/87354
摘要： A fluid mass flow control apparatus, particularly adapted for use in controlling fluid flow to semiconductor fabrication processes, comprises a tubular body part having inlet and outlet fittings and a bore extending therethrough and supporting a valve seat in the bore. A closure member is connected to an arm which extends laterally through a tubular spigot portion of the body part. The body part has a reduced thickness wall at the spigot portion to allow elastic deflection of the wall and movement of the arm to control the position of the closure member. An elongated tube or rod actuator on which a resistance heating coil is supported is operably connected to a control system for heating the actuator to move the arm to control flow of fluid through the apparatus. A flow restrictor is mounted upstream of the valve seat and a mass flow sensor is in communication with the passage to provide a mass flow rate signal to the control system.
摘要翻译：特别适用于控制流向半导体制造工艺的流体流体的流体质量流量控制装置包括具有入口和出口配件的管状主体部件和延伸穿过其中并在孔中支撑阀座的孔。闭合构件连接到横向延伸穿过主体部分的管状插口部分的臂。主体部分在插口部分处具有减小的壁厚度，以允许壁的弹性偏转和臂的移动以控制封闭构件的位置。支撑电阻加热线圈的细长管或杆致动器可操作地连接到控制系统，用于加热致动器以移动臂以控制通过设备的流体的流动。限流器安装在阀座的上游，质量流量传感器与通道连通，以向控制系统提供质量流量信号。

6. 发明授权

US06405745B1 Ultra accurate gas injection system 有权
标题翻译：超精密气体注入系统
公开(公告)号：US06405745B1
公开(公告)日：2002-06-18
申请号：US09532220
申请日：2000-03-22
申请人： Krishnendu Kar , Robert Semidey
发明人： Krishnendu Kar , Robert Semidey
IPC分类号： G05D706
CPC分类号： G01M3/207 , G05D7/0635 , Y10T137/0324 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389
摘要： An ultra accurate gas injection system includes an input device for inputting setpoint data including a target flow rate for the flow of gas into the system. The gas flows through a mass flow controller at an actual flow rate. The mass flow controller issues a flow rate signal indicative of at least the actual flow rate and receives a flow control signal. The mass flow controller is configured to control the actual flow rate dependent at least in part upon the flow control signal. A programmable controller is electrically connected to the input device and the mass flow controller. The programmable controller receives the setpoint data from the input device and issues the flow control signal, the flow control signal being dependent at least in part upon the target flow rate contained within the setpoint data. The programmable controller repeatedly reads the flow rate signal and compares the actual flow rate with the target flow rate. The programmable controller adjusts the flow rate signal dependent at least in part upon the comparison of the actual flow rate with the target flow rate, and is configured to adjust the flow control signal such that the actual flow rate is substantially equal to the target flow rate. The programmable controller issues an output signal dependent at least in part upon the flow rate signal. An output device is electrically connected to the programmable controller and receives the output signal. The output device indicates the actual flow rate.
摘要翻译：超精密气体喷射系统包括用于输入设定点数据的输入装置，包括用于气体流入系统的目标流量。气体以实际流量流过质量流量控制器。质量流量控制器发出指示至少实际流量的流量信号并接收流量控制信号。质量流量控制器被配置为至少部分地依赖于流量控制信号来控制实际流量。可编程控制器电连接到输入装置和质量流量控制器。可编程控制器从输入装置接收设定点数据并发出流量控制信号，流量控制信号至少部分地取决于包含在设定点数据内的目标流量。可编程控制器重复读取流量信号，并将实际流量与目标流量进行比较。可编程控制器至少部分地根据实际流量与目标流量的比较来调节流量信号，并且被配置为调节流量控制信号，使得实际流量基本上等于目标流量。可编程控制器至少部分地根据流量信号发出输出信号。输出装置电连接到可编程控制器并接收输出信号。输出装置表示实际流量。

7. 发明授权

US06394119B2 Method for conserving a resource by flow interruption 失效
标题翻译：通过流中断节省资源的方法
公开(公告)号：US06394119B2
公开(公告)日：2002-05-28
申请号：US09873736
申请日：2001-06-04
申请人： Michael B. Ball
发明人： Michael B. Ball
IPC分类号： G05D706
CPC分类号： H01L21/67017 , Y10T137/0318 , Y10T137/7759 , Y10T137/86389
摘要： A method of conserving a facility delivered to a machine during the machine's idle mode is herein described. In one embodiment, the method is directed to a method for conserving coolant water delivery to a semiconductor wafer grinding machine. The system monitors the status of the grinder to determine whether the grinder is active or idle. After the system determines the grinder has entered idle mode, the system reduces the flow of water to the machine. In one embodiment, the flow is simply reduced while, in another embodiment, the flow is terminated. A delay circuit in the system may delay the reduction of the flow rate until some point after entering idle mode. Periodically throughout the idle mode, the system increases the flow of coolant water to the grinder to ensure the temperature of all grinder components remains consistent. The duty cycle of the coolant flow may be adjusted to optimize water conservation and machine readiness.
摘要翻译：这里描述了在机器的空闲模式期间节省输送到机器的设施的方法。在一个实施例中，该方法涉及一种用于节省向半导体晶片研磨机的冷却水输送的方法。系统监控研磨机的状态，以确定研磨机是否处于活动状态或空闲状态。系统确定研磨机进入空闲模式后，系统会减少机器的水量。在一个实施例中，简单地减少流量，而在另一个实施例中，流程终止。系统中的延迟电路可能会延迟流量的降低，直到进入空闲模式后的某一点。在整个怠速模式下，系统会逐渐增加冷却水流向研磨机的流量，以确保所有研磨机组件的温度保持一致。可以调节冷却剂流量的占空比以优化节水和机器准备。

8. 发明授权

US06363968B1 System for conserving a resource by flow interruption 失效
标题翻译：通过流中断节省资源的系统
公开(公告)号：US06363968B1
公开(公告)日：2002-04-02
申请号：US09873661
申请日：2001-06-04
申请人： Michael B. Ball
发明人： Michael B. Ball
IPC分类号： G05D706
CPC分类号： H01L21/67017 , Y10T137/0318 , Y10T137/7759 , Y10T137/86389
摘要： A method of conserving a facility delivered to a machine during the machine's idle mode is herein described. In one embodiment, the method is directed to a method for conserving coolant water delivery to a semiconductor wafer grinding machine. The system monitors the status of the grinder to determine whether the grinder is active or idle. After the system determines the grinder has entered idle mode, the system reduces the flow of water to the machine. In one embodiment, the flow is simply reduced while, in another embodiment, the flow is terminated. A delay circuit in the system may delay the reduction of the flow rate until some point after entering idle mode. Periodically throughout the idle mode, the system increases the flow of coolant water to the grinder to ensure the temperature of all grinder components remains consistent. The duty cycle of the coolant flow may be adjusted to optimize water conservation and machine readiness.
摘要翻译：这里描述了在机器的空闲模式期间节省输送到机器的设施的方法。在一个实施例中，该方法涉及一种用于节省向半导体晶片研磨机的冷却水输送的方法。系统监控研磨机的状态，以确定研磨机是否处于活动状态或空闲状态。系统确定研磨机进入空闲模式后，系统会减少机器的水量。在一个实施例中，简单地减少流量，而在另一个实施例中，流程终止。系统中的延迟电路可能会延迟流量的降低，直到进入空闲模式后的某一点。在整个怠速模式下，系统会逐渐增加冷却水流向研磨机的流量，以确保所有研磨机组件的温度保持一致。可以调节冷却剂流量的占空比以优化节水和机器准备。

9. 发明授权

US06360772B1 Mass flow controller 有权
标题翻译：质量流量控制器
公开(公告)号：US06360772B1
公开(公告)日：2002-03-26
申请号：US09608112
申请日：2000-06-30
申请人： Hsiao-Che Wu
发明人： Hsiao-Che Wu
IPC分类号： G05D706
CPC分类号： G05D7/0635 , Y10S251/90 , Y10T137/7759 , Y10T137/7761
摘要： A mass flow controller (MFC) for controlling the fluid flow in a conduit is configured to include a flow command input for issuing a flow control command, a control unit accepting the flow control command for generating a control signal, a flow-sensing device including a plurality of temperature sensors, a sensor circuit and an amplifier, an actuator being driven by the control unit, and a valve member including a valve being adjusted by the actuator for controlling the fluid flow in the conduit, a distortion controller being distorted in response to the control signal, and an elastic body being distorted in response to an external force resulting from the distortion of the distortion controller for changing the orifice size in the conduit. In addition, the valve can be designed to be fixed instead of being mobile so as to reduce the occurrence of particles resulting from the mutual frictions emerging among the moving parts employed in the valve member.
摘要翻译：用于控制管道中的流体流动的质量流量控制器（MFC）被配置为包括用于发出流量控制命令的流量命令输入，接受用于产生控制信号的流量控制命令的控制单元，包括：多个温度传感器，传感器电路和放大器，由控制单元驱动的致动器，以及阀构件，其包括由致动器调节的阀，用于控制管道中的流体流动，失真控制器响应失真并且弹性体响应由变形控制器产生的外力而变形，以改变管道中的孔口尺寸。此外，阀可以被设计成固定而不是可移动的，以便减少由在阀构件中使用的运动部件之间出现的相互摩擦而产生的颗粒的发生。

10. 发明授权

US06298285B1 Irrigation accumulation controller 有权
标题翻译：灌溉积累控制器
公开(公告)号：US06298285B1
公开(公告)日：2001-10-02
申请号：US09478108
申请日：2000-01-04
申请人： John Addink , Kirk Buhler , Tony Varga
发明人： John Addink , Kirk Buhler , Tony Varga
IPC分类号： G05D706
CPC分类号： A01G25/16
摘要： An irrigation controller that is capable of making daily adjustment of irrigation duration based upon historical, environmental, and or received information. The irrigation controller can automatically skip days and make changes to account for daily and seasonal environmental changes. Such automatic determination is advantageous to minimize the need of the operator intervention to make seasonal change as well as providing irrigation savings, and ensures deep irrigation. The simplified user interface and control allows for a change made at any time of the year to effect the remainder of the year to provide the best balance of minimal or no user interface, irrigation conservation.
摘要翻译：一个灌溉控制器，能够根据历史，环境和或收到的信息每天对灌溉时间进行调整。灌溉控制器可以自动跳过天数，并进行更改以解决日常和季节性环境变化。这种自动确定有利于最小化操作者干预以使季节性变化以及提供灌溉节约的需要，并确保深度灌溉。简化的用户界面和控制允许在一年中的任何时间进行更改，以在年底剩余时间内提供最小或无用户界面，灌溉保护的最佳平衡。

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