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21. 发明授权

US6075373A Inspection device for inspecting a semiconductor wafer 失效
标题翻译：用于检查半导体晶片的检查装置
公开(公告)号：US6075373A
公开(公告)日：2000-06-13
申请号：US862601
申请日：1997-05-23
申请人： Shinji Iino
发明人： Shinji Iino
IPC分类号： G01R31/26 , G01R1/06 , G01R1/073 , G01R31/28 , H01L21/66 , G01R31/02 , G01R1/04
CPC分类号： G01R31/2886 , G01R1/07307 , G01R31/2851
摘要： The invention provides a simple, light-weight inspection device by arranging a mechanical path switching mechanism. The invention includes a device main body, one or more inspection targets having a plurality of connection pads, a test portion for measuring the electrical characteristics of the inspection targets on the basis of electrical signals from the inspection targets, a mounting device for mounting the inspection targets at predetermined positions with respect to the device main body, a probe card having a plurality of probe pads on its upper surface, which are electrically connected to the connection pads of the inspection targets mounted on the mounting device through an electrical contact device, a contact block having contact pins which removably contact the respective probe pads of the probe card, a connection device for electrically connecting the contact pins of the contact block and the test portion, and a contact block support/moving device for movably supporting the contact block in the circumferential direction at the peripheral of the probe card. In the invention, the plurality of probe pads are divided into a plurality of groups, which are circumferentially arranged at peripheral portions of the upper surface of the probe card.
摘要翻译：本发明通过布置机械路径切换机构来提供简单，轻量的检查装置。本发明包括装置主体，具有多个连接垫的一个或多个检查对象，用于基于来自检查对象的电信号来测量检查对象的电气特性的测试部，用于安装检查的安装装置目标在相对于装置主体的预定位置，探针卡在其上表面具有多个探针垫，其通过电接触装置电连接到安装在安装装置上的检查对象的连接焊盘，接触块，其具有可拆卸地接触探针卡的各个探针垫的接触针，用于电连接接触块和测试部分的接触针的连接装置，以及用于可移动地支撑接触块的接触块支撑/移动装置探针卡周边的圆周方向。在本发明中，多个探针垫被分成多个组，它们周向地布置在探针卡的上表面的周边部分。

22. 发明授权

US5825500A Unit for transferring to-be-inspected object to inspection position 失效
标题翻译：将检查对象转移到检查位置的单位
公开(公告)号：US5825500A
公开(公告)日：1998-10-20
申请号：US753250
申请日：1996-11-21
申请人： Shinji Iino , Noboru Hayakawa
发明人： Shinji Iino , Noboru Hayakawa
IPC分类号： G01R1/06 , G01N21/88 , G01R31/28 , H01L21/68 , G01B11/00
CPC分类号： G01N21/88 , G01N2021/9513 , G02F1/1309
摘要： A transfer unit according to the invention employs a transfer member movable between a standby position and an inspection position, a detection unit provided at the transfer member for detecting the position of the object on a support surface of the transfer member, a rotatable mount member having a mount surface on which the object is mounted, and capable of transferring the object between the mount surface and the support surface of the transfer member, and a control unit for calculating an amount of deviation of the object from a reference position on the basis of a detection value of the detection unit, the control unit also driving the mount member and the transfer member to correct the amount of deviation of the object from the reference position on the basis of the calculation result.
摘要翻译：根据本发明的转印单元采用在待机位置和检查位置之间移动的转印部件，设置在转印部件处用于检测物体在转印部件的支撑表面上的位置的检测单元，具有安装表面，其上安装有物体，并且能够将物体在安装表面和传送构件的支撑表面之间传送;以及控制单元，用于基于以下方式计算物体与参考位置的偏差量：所述检测单元的检测值，所述控制单元还驱动所述安装构件和所述传递构件，以根据所述计算结果来校正所述物体与所述基准位置的偏差量。

23. 发明授权

US5742173A Method and apparatus for probe testing substrate 失效
标题翻译：探针测试底物的方法和装置
公开(公告)号：US5742173A
公开(公告)日：1998-04-21
申请号：US737338
申请日：1996-11-18
申请人： Yoichi Nakagomi , Hidehito Yokomori , Shinji Iino , Satoshi Sano
发明人： Yoichi Nakagomi , Hidehito Yokomori , Shinji Iino , Satoshi Sano
IPC分类号： G01R1/067 , G01R1/04
CPC分类号： G01R1/06705
摘要： A substrate inspecting method has a step of previously storing as initial setting data the positional information of a mounting table on which the substrate is placed and the positional information of the probe, a calibration step of moving a first alignment member provided at a position away by a specified distance from the mounting table together with the mounting table, and aligning the first alignment member with a second alignment member fixed to a position away by a specified distance from the probe, a step of calculating a distance between the calibrated position and the mutual probe/pad contact position on the basis of the previously stored initial setting data, and moving the mounting table on the basis of the calculated results to position the pad at the probe, and a step of contacting the pad of the substrate on the mounting table with the probe, and sending a test signal to a pattern circuit on the substrate to inspect.
摘要翻译： PCT No.PCT / JP96 / 00699 Sec。 371日期：1996年11月18日 102（e）1996年11月18日日期PCT 1996年3月18日PCT公布。公开号WO96 / 29607 日期1996年9月26日基板检查方法具有以下步骤：预先存储作为初始设置数据的放置基板的安装台的位置信息和探针的位置信息，移动第一对准构件的校准步骤在与安装台一起离开安装台一定距离的位置处，并且将第一对准构件与固定到远离探测器一定距离的位置的第二对准构件对准;计算第二对准构件之间的距离的步骤; 基于先前存储的初始设定数据，根据计算结果移动安装台，将垫定位在探头上，并将接触垫的接触位置与步骤用探头安装在安装台上的基板，并将测试信号发送到基板上的图案电路进行检查。

24. 发明授权

US5568054A Probe apparatus having burn-in test function 失效
标题翻译：探头设备具有老化测试功能
公开(公告)号：US5568054A
公开(公告)日：1996-10-22
申请号：US444888
申请日：1995-05-19
申请人： Shinji Iino , Itaru Iida
发明人： Shinji Iino , Itaru Iida
IPC分类号： G01R31/26 , G01R31/28 , H01L21/326 , H01L21/66 , G01R31/02
CPC分类号： G01R31/2868
摘要： A probe apparatus having a burn-in test function includes an apparatus body, a probe card, having a plurality of probes, for causing the plurality of probes to electrically contact a semiconductor wafer, a tester for measuring the electrical characteristics of the semiconductor wafer, heating and cooling mechanisms for applying a thermal stress to test target chips, as targets of the burn-in test, of the semiconductor wafer, and an electrical mechanism for applying an electrical stress to the chips.
摘要翻译：具有老化测试功能的探针装置包括具有多个探针的装置主体，探针卡，用于使多个探针与半导体晶片电接触;测量器，用于测量半导体晶片的电特性; 用于施加热应力的加热和冷却机构，作为半导体晶片的老化试验的目标，以及用于向芯片施加电应力的电气机构。

25. 发明授权

US4959104A Self-hardenable material 失效
标题翻译：自硬化材料
公开(公告)号：US4959104A
公开(公告)日：1990-09-25
申请号：US287695
申请日：1988-12-20
申请人： Shinji Iino , Minoru Oshima , Shinya Kitoh , Toshiaki Kobayashi
发明人： Shinji Iino , Minoru Oshima , Shinya Kitoh , Toshiaki Kobayashi
IPC分类号： A61L24/00 , A61F2/00 , A61K6/033 , A61K6/06 , A61L24/02 , A61L27/12 , C04B22/08 , C04B22/12 , C04B24/04 , C04B24/06 , C04B28/34
CPC分类号： C04B28/344 , A61K6/033 , A61K6/083 , A61K6/087 , A61L24/02 , A61L27/12 , A61F2310/00293 , C04B2111/00836
摘要： A self-hardenable material comprising a calcium phosphate having an atomic ratio of Ca/P of 1.4 to 1.6, a difficultly water-soluble inorganic fluoride, an organic or inorganic acid and water is provided. For example, when the hardenable material is frilled in the form of slurry or paste in a necessary part in vivo or in the dental cavity, it hardens within a short time to form a stable apatite type product.
摘要翻译：提供一种自硬化材料，其包含Ca / P原子比为1.4〜1.6，难溶于水的无机氟化物，有机或无机酸和水的磷酸钙。例如，当可硬化材料在体内或牙腔中的必要部分中以浆料或糊剂的形式进行包覆时，其在短时间内硬化以形成稳定的磷灰石型产品。

26. 发明授权

US09388891B2 Multi-shaft drive device 有权
标题翻译：多轴驱动装置
公开(公告)号：US09388891B2
公开(公告)日：2016-07-12
申请号：US14001665
申请日：2012-01-26
申请人： Ryohei Shigematsu , Takafumi Hirata , Takahiro Fujii , Kiyoshi Nakajima , Shinji Iino , Soichi Nakayama
发明人： Ryohei Shigematsu , Takafumi Hirata , Takahiro Fujii , Kiyoshi Nakajima , Shinji Iino , Soichi Nakayama
IPC分类号： F16H37/06 , B60N2/02 , F16H63/30
CPC分类号： F16H37/065 , B60N2/0296 , F16H63/304 , F16H2063/3056 , Y10T74/19019
摘要： A multi-shaft drive device is provided that is capable of obtaining an appropriate backlash in an enmeshed state of an output side bevel gear and an input side bevel gear. An output side bevel gear (35) that is biased in the direction of an input side bevel gear by a coil spring contacts a shaft support bush attached to a wall portion (17) in an enmeshed state with the input side bevel gear. A bias direction stroke end of the output side bevel gear (35) is accordingly restricted. Moreover, the wall portion (17) is provided to a gear holder (15) fixed to a device case (10) that supports the input side bevel gear, thereby enabling the axial direction position of the output side bevel gear (35) to always be positioned at a uniform position to enmesh appropriately with the input side bevel gear.
摘要翻译：提供一种多轴驱动装置，其能够在输出侧锥齿轮和输入侧锥齿轮的啮合状态下获得适当的间隙。通过螺旋弹簧在输入侧锥齿轮的方向上偏置的输出侧锥齿轮35与输入侧锥齿轮接触以与啮合状态连接的壁部17的轴支撑衬套。因此，输出侧锥齿轮（35）的偏置方向行程末端受到限制。此外，壁部（17）设置在固定于支撑输入侧锥齿轮的装置壳体（10）的齿轮架（15）上，能够使输出侧锥齿轮（35）的轴向位置始终定位在一个均匀的位置以适当地与输入侧锥齿轮啮合。

27. 发明授权

US09121482B2 Multi-shaft drive device 有权
标题翻译：多轴驱动装置
公开(公告)号：US09121482B2
公开(公告)日：2015-09-01
申请号：US14001849
申请日：2012-01-26
申请人： Takeshi Nakamura , Masahiro Oda , Kenichi Katsube , Ryohei Shigematsu , Shinji Iino
发明人： Takeshi Nakamura , Masahiro Oda , Kenichi Katsube , Ryohei Shigematsu , Shinji Iino
IPC分类号： F16H19/08 , B60N2/02 , F16H37/06
CPC分类号： F16H19/08 , B60N2/0232 , B60N2/0296 , B60N2002/0236 , F16H37/065 , Y10T74/188
摘要： A power transmission member that transmits rotation of an output shaft to a movable mechanism achieves a simpler structure and increased productivity compared to when a conventional flexible cable is employed. Out of plural output portions 30 of a clutch unit 2, power transmission members that transmit rotation of an output shaft 31 to a movable mechanism are configured by a conventional torque cable in a second output portion 30B and a third output portion 30C. However in a first output portion 30A, the power transmission member is configured by a gearbox 3 including a worm 71 that is coaxially and integrally formed with an output shaft 31A.
摘要翻译：将输出轴的旋转传递到可移动机构的动力传递构件与使用常规柔性线缆相比，实现了更简单的结构和提高的生产率。在离合器单元2的多个输出部30中，将输出轴31的旋转传递到可动机构的动力传递部件由第二输出部30B和第三输出部30C中的传统扭矩电缆构成。然而，在第一输出部30A中，动力传递部件由齿轮箱3构成，齿轮箱3包括与输出轴31A同轴且一体形成的蜗杆71。

28. 发明申请

US20130192418A1 POWER TRANSMISSION MECHANISM AND MULTI-SHAFT DRIVE DEVICE 审中-公开
标题翻译：电力传输机构和多轴驱动装置
公开(公告)号：US20130192418A1
公开(公告)日：2013-08-01
申请号：US13877740
申请日：2011-10-11
申请人： Ryohei Shigematsu , Kenji Murakami , Kiyoshi Nakajima , Takafumi Hirata , Takahiro Fujii , Shinji Iino
发明人： Ryohei Shigematsu , Kenji Murakami , Kiyoshi Nakajima , Takafumi Hirata , Takahiro Fujii , Shinji Iino
IPC分类号： F16H37/06
CPC分类号： F16H37/065 , B60N2/0296 , F16D11/04 , F16D2023/123 , Y10T74/19088
摘要： Force of used spring can be weak, wear amount of power transmission member (gear or the like) can be reduced, and generation of strange noises can inhibited. When the dial cam is rotated and the recess of the outer peripheral surface faces the front end portion of the pin of the connection shaft, the connection shaft, which is biased by the force of the coil spring, is connected to the bevel gear, which engages with the bevel gear and is rotated, via the clutch teeth. Thus, the connection shaft is rotated, and the output shaft is rotated together with the connection shaft. That is, the power of the motor is transmitted to the output shaft. Since the coil spring is used for connecting the connection shaft to the bevel gear, the force of the coil spring can be reduced.
摘要翻译：使用过的弹簧的力可能较弱，能够减少动力传递部件（齿轮等）的磨损量，可以抑制奇怪的噪音的产生。当拨盘凸轮旋转并且外周表面的凹部面向连接轴的销的前端部分时，由螺旋弹簧的力被偏压的连接轴连接到锥齿轮，该锥齿轮与锥齿轮接合并通过离合器齿旋转。因此，连接轴旋转，输出轴与连接轴一起旋转。也就是说，马达的动力被传递到输出轴。由于螺旋弹簧用于将连接轴连接到锥齿轮，所以可以减小螺旋弹簧的力。

29. 再颁专利

USRE41515E1 Contactor and production method for contactor 有权
标题翻译：接触器接触器和接触器的生产方法
公开(公告)号：USRE41515E1
公开(公告)日：2010-08-17
申请号：US10772174
申请日：1999-07-29
申请人： Junichi Hagihara , Shinji Iino
发明人： Junichi Hagihara , Shinji Iino
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/06711 , G01R1/06716 , G01R1/06727 , G01R1/07342
摘要： A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor (1) of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes (3) arranged on a first substrate (silicon substrate) (2) and probe terminals (4) respectively provided on these electrodes (3). The probe terminal (4) has a conductive support (7) provided on the first electrode, elastic support plate (8) whose one end is fixed to the upper end of the conductive support column (7), and probe terminal (bump) 9 fixed to the free end portion of the elastic support plate (8).
摘要翻译：常规探针卡在探针端子的支撑结构中非常复杂，并且难以根据要检查的对象的各种电极焊盘阵列改变探针端子的阵列。本发明的接触器（1）同时将其探针端子与待检查物体的多个电极焊盘接触，并且对物体的电气检查进行一次或多次。它具有布置在分别设置在这些电极（3）上的第一衬底（硅衬底）（2）和探针端子（4）上的多个第一电极（3）。探针端子（4）具有设置在第一电极上的导电支撑（7），其一端固定在导电支柱（7）的上端的弹性支撑板（8）和探针端子（凸块）9 固定到弹性支撑板（8）的自由端部。

30. 发明授权

US06747465B2 Contractor, method for manufacturing the same, and probe card using the same 失效
标题翻译：承包商，制造方法，以及使用其的探针卡
公开(公告)号：US06747465B2
公开(公告)日：2004-06-08
申请号：US09986561
申请日：2001-11-09
申请人： Masayoshi Esashi , Shinji Iino , Tomohisa Hoshino
发明人： Masayoshi Esashi , Shinji Iino , Tomohisa Hoshino
IPC分类号： G01R3102
CPC分类号： G01R1/07371
摘要： There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.
摘要翻译：公开了一种用于测试被测物的电特性的接触器，该接触器包括接触器板，通过该接触器板形成的多个导电部件，多个梁部件和设置在该接触器上的接触端子每个梁构件的尖端。在该接触器中，每个梁构件在其两端具有尖端和基端，并且在尖端和基端之间具有台阶形状或拱形形状。每个梁构件的基端连接到每个导电构件。接触端子构件可以与梁构件的导电层一体地形成。

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