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21. 发明授权

US07095482B2 Multiple system vibration isolator 有权
标题翻译：多系统隔振器
公开(公告)号：US07095482B2
公开(公告)日：2006-08-22
申请号：US10186876
申请日：2002-06-28
申请人： Alton H. Phillips , Douglas C. Watson , Andrew J. Hazelton
发明人： Alton H. Phillips , Douglas C. Watson , Andrew J. Hazelton
IPC分类号： G03B27/42 , F16M13/00 , F01B7/00
CPC分类号： F16F15/0232 , F16F9/02
摘要： A vibration isolator (200) for isolating a first assembly (206) from vibration from a second assembly (208) includes a first system (202) and a second system (204) coupled to the first system (202). In one embodiment, the first system (202) supports the majority of the first assembly (206) relative to the second assembly (208) and the second system (204) adjusts for a change in the location of the center of gravity of the first assembly (206). Further, the second system (204) can be used to compensate for fluctuations in the atmospheric pressure near the vibration isolator (200).
摘要翻译：用于将第一组件（206）与来自第二组件（208）的振动隔离的隔振器（200）包括耦合到第一系统（202）的第一系统（202）和第二系统（204）。在一个实施例中，第一系统（202）相对于第二组件（208）支撑大部分第一组件（206），并且第二系统（204）调节第一组件（206）的重心位置的变化组件（206）。此外，第二系统（204）可以用于补偿隔振器（200）附近的大气压力的波动。

22. 发明申请

US20100156198A1 SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS 审中-公开
标题翻译：平板电机的屏蔽层加热后备冷却
公开(公告)号：US20100156198A1
公开(公告)日：2010-06-24
申请号：US12643888
申请日：2009-12-21
申请人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
发明人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
IPC分类号： H02K9/20 , H02K41/03
CPC分类号： G03F7/70858 , G03F7/70758 , H02K9/19 , H02K9/20 , H02K41/031 , H02K2201/18
摘要： According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.
摘要翻译：根据本发明的一个方面，电动机装置包括至少一个线圈，盖板和屏蔽层。该至少一个线圈具有第一侧和第二侧。覆盖板基本上位于距离至少一个线圈一定距离的至少一个线圈的第一侧上方。屏蔽层位于至少一个线圈的第一侧和盖板之间，并具有顶面。顶表面接触盖板，并且包括形成混合物的液体和气体，并使顶表面具有基本恒定的温度。

23. 发明授权

US07477358B2 EUV reticle handling system and method 失效
标题翻译： EUV掩模版处理系统和方法
公开(公告)号：US07477358B2
公开(公告)日：2009-01-13
申请号：US11238237
申请日：2005-09-28
申请人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
发明人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
IPC分类号： G03B27/62 , B65D85/38
CPC分类号： G03F7/70741
摘要： An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. The enclosure in conjunction with a heater and heat sink provides thermophoretic protection of an enclosed reticle.
摘要翻译：公开了用于保护掩模版的至少一个图案侧和相对侧的外壳。外壳包括第一和第二部分，其在处理，检查，存储和运输期间形成围绕保护的掩模版的外壳。外壳与加热器和散热器一起提供封闭的掩模版的热泳保护。

24. 发明授权

US06953109B2 Vibration isolator with low lateral stiffness 失效
标题翻译：具有低侧向刚度的隔振器
公开(公告)号：US06953109B2
公开(公告)日：2005-10-11
申请号：US10267489
申请日：2002-10-08
申请人： Douglas C. Watson , Alton H. Phillips
发明人： Douglas C. Watson , Alton H. Phillips
IPC分类号： F16F9/02 , F16F15/023 , F16F7/10
CPC分类号： F16F15/0232 , F16F9/02
摘要： A vibration isolator (200) for isolating a first assembly (202) from vibration from a second assembly (204) includes a housing (206) that is secured to the second assembly (204) and a pendulum assembly (208). The pendulum assembly (208) includes one or more pistons (226) and a connector assembly (224). The piston (226) is coupled to the first assembly (202). The connector assembly (224) couples the piston (226) to the housing (206) and allows the piston (226) to swing laterally relative to the housing (206). The vibration isolator (200) can also include a pendulum support (264) and/or a mover (580) that moves the piston (226) and assists in supporting the load of the first assembly (202).
摘要翻译：用于将第一组件（202）与来自第二组件（204）的振动隔离的隔振器（200）包括固定到第二组件（204）和摆锤组件（208）的壳体（206）。摆锤组件（208）包括一个或多个活塞（226）和连接器组件（224）。活塞（226）联接到第一组件（202）。连接器组件（224）将活塞（226）联接到壳体（206）并允许活塞（226）相对于壳体（206）横向摆动。隔振器（200）还可以包括使活塞（226）移动并有助于支撑第一组件（202）的负载的摆动支撑件（264）和/或移动器（580）。

25. 发明授权

US08425060B2 Self-correcting optical elements for high-thermal-load optical systems 有权
公开(公告)号：US08425060B2
公开(公告)日：2013-04-23
申请号：US11983615
申请日：2007-11-09
申请人： Douglas C. Watson , Alton H. Phillips
发明人： Douglas C. Watson , Alton H. Phillips
IPC分类号： G02B5/08
CPC分类号： G02B7/028 , G02B7/008 , G02B7/181
摘要： Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.

26. 发明授权

US07591561B2 Liquid cooled mirror for use in extreme ultraviolet lithography 有权
标题翻译：用于极紫外光刻的液体冷却镜
公开(公告)号：US07591561B2
公开(公告)日：2009-09-22
申请号：US11382342
申请日：2006-05-09
申请人： Alton H. Phillips , Derek Coon , Douglas C. Watson
发明人： Alton H. Phillips , Derek Coon , Douglas C. Watson
IPC分类号： G02B5/08
CPC分类号： G02B5/10 , G02B7/1815 , G03F7/70783 , G03F7/70891 , G03F7/70983 , G21K1/06 , G21K2201/065
摘要： Methods and apparatus for internally or directly cooling a mirror using a fluid with laminar flow properties are disclosed. According to one aspect of the present invention, an internally cooled mirror includes an optical surface that absorbs light, and at least one microchannel formed beneath the optical surface. The mirror also includes a port that supplied a fluid to the microchannel. The fluid is subjected to a laminar flow and absorbs heat associated with the absorbed light.
摘要翻译：公开了使用具有层流性质的流体内部或直接冷却反射镜的方法和装置。根据本发明的一个方面，内部冷却镜包括吸收光的光学表面和形成在光学表面下方的至少一个微通道。镜子还包括向微通道供应流体的端口。流体经受层流并吸收与吸收的光相关的热量。

27. 发明申请

US20070285632A1 EUVL reticle stage and reticle protection system and method 审中-公开
标题翻译： EUVL标线片和掩模版保护系统及方法
公开(公告)号：US20070285632A1
公开(公告)日：2007-12-13
申请号：US11450766
申请日：2006-06-08
申请人： Alton H. Phillips , Douglas C. Watson
发明人： Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： G03B27/42 , G03F7/70916
摘要： Apparatuses for and methods of maximizing particle protection while enabling temporary concurrent illumination of a reticle with exposure radiation through an aperture and auto focus beams or while mounting a reticle to or removing a reticle from a reticle stage are disclosed.
摘要翻译：公开了一种使粒子保护最大化的装置，同时使通过孔径和自动聚焦光束的曝光辐射临时同时照射光罩，或者同时将掩模版安装在标线片平台上或从掩模工艺台移除掩模版。

28. 发明授权

US06922293B2 Kinematic optical mounting assembly with flexures 有权
标题翻译：运动光学安装组件带弯曲
公开(公告)号：US06922293B2
公开(公告)日：2005-07-26
申请号：US10229051
申请日：2002-08-28
申请人： Douglas C. Watson , Alton H. Phillips , Masato Hatasawa
发明人： Douglas C. Watson , Alton H. Phillips , Masato Hatasawa
IPC分类号： G02B7/02
CPC分类号： G02B7/023
摘要： A kinematic optical mounting assembly secures an optical element to a base. A plurality of first bracket assemblies and second bracket assemblies are secured to the base and engage the optical element. Each first bracket assembly constrains the optical element from movement relative to the base in a direction substantially parallel to an axis of the base. Each second bracket assembly constrains the optical element from movement relative to the base in a direction substantially perpendicular to the axis of the base and substantially tangential to a periphery of the base. Six independent bracket assemblies constrain the optical element in six degrees of freedom to provide kinematic constraint without bending moments.
摘要翻译：运动学光学安装组件将光学元件固定到基座。多个第一支架组件和第二支架组件固定到基座并接合光学元件。每个第一支架组件限制光学元件在基本上平行于基座的轴线的方向上相对于基座移动。每个第二支架组件约束光学元件在基本上垂直于基座的轴线的方向上相对于基座移动，并且基本上与基座的周边相切。六个独立的支架组件以六个自由度约束光学元件以提供运动约束而没有弯矩。

29. 发明授权

US08853988B2 Control systems and methods for compensating for effects of a stage motor 有权
标题翻译：用于补偿平台电机的影响的控制系统和方法
公开(公告)号：US08853988B2
公开(公告)日：2014-10-07
申请号：US12406322
申请日：2009-03-18
申请人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
发明人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
IPC分类号： G05B1/06 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译：本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

30. 发明授权

US08705170B2 High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations 有权
标题翻译：高NA反射折射成像光学器件用于将掩模版成像到一对成像位置
公开(公告)号：US08705170B2
公开(公告)日：2014-04-22
申请号：US12547086
申请日：2009-08-25
申请人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
发明人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B27/1066 , G02B27/143 , G03F7/70225 , G03F7/7025 , G03F7/70275 , G03F7/70833
摘要： New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
摘要翻译：提供了一种被配置为将掩模版同时成像到一对成像位置的成像光学系统的新的和有用的概念，其中成像光学器件包括一对臂，每个臂包括反射折射成像光学元件。此外，成像光学器件优选地设计成在至少为1.3的数值孔径同时成像成对位置的成对位置成像，并且不会由成像光学元件遮挡光。

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