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1. 发明申请

US20100156198A1 SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS 审中-公开
标题翻译：平板电机的屏蔽层加热后备冷却
公开(公告)号：US20100156198A1
公开(公告)日：2010-06-24
申请号：US12643888
申请日：2009-12-21
申请人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
发明人： Alexander Cooper , Scott Coakley , Douglas C. Watson , Alton H. Phillips , Gaurav Keswani , Michael B. Binnard
IPC分类号： H02K9/20 , H02K41/03
CPC分类号： G03F7/70858 , G03F7/70758 , H02K9/19 , H02K9/20 , H02K41/031 , H02K2201/18
摘要： According to one aspect of the present invention, a motor arrangement includes at least one coil, a cover plate, and a shield layer. The at least one coil has a first side and a second side. The cover plate is positioned substantially over the first side of the at least one coil at a distance from the at least one coil. The shield layer is positioned between the first side of the at least one coil and the cover plate, and has a top surface. The top surface contacts the cover plate, and includes a liquid and a gas that form a mixture and cause the top surface to have a substantially constant temperature.
摘要翻译：根据本发明的一个方面，电动机装置包括至少一个线圈，盖板和屏蔽层。该至少一个线圈具有第一侧和第二侧。覆盖板基本上位于距离至少一个线圈一定距离的至少一个线圈的第一侧上方。屏蔽层位于至少一个线圈的第一侧和盖板之间，并具有顶面。顶表面接触盖板，并且包括形成混合物的液体和气体，并使顶表面具有基本恒定的温度。

2. 发明申请

US20090033895A1 Lithography apparatus with flexibly supported optical system 审中-公开
标题翻译：平版印刷设备，灵活支持光学系统
公开(公告)号：US20090033895A1
公开(公告)日：2009-02-05
申请号：US11882027
申请日：2007-07-30
申请人： Michael B. Binnard , Douglas C. Watson , Alton H. Phillips , Scott Coakley
发明人： Michael B. Binnard , Douglas C. Watson , Alton H. Phillips , Scott Coakley
IPC分类号： G03B27/42
CPC分类号： G03F7/709 , G03F7/70833
摘要： A lithography apparatus includes a projection optical system that projects an image of a pattern, a first support member, a second support member that is flexibly coupled to the first support member by a first flexible coupling device such that the second support member is suspended from the first support member, and a second flexible coupling device that flexibly couples the projection optical system to the second support structure. This arrangement is capable of improving the vibration characteristics of the projection optical system.
摘要翻译：光刻设备包括投影光学系统，其投影图案的图像，第一支撑构件和第二支撑构件，第二支撑构件通过第一柔性联接装置柔性地联接到第一支撑构件，使得第二支撑构件从第一支撑构件和将投影光学系统柔性地耦合到第二支撑结构的第二柔性耦合装置。这种布置能够改善投影光学系统的振动特性。

3. 发明申请

US20070267995A1 Six Degree-of-Freedom Stage Apparatus 审中-公开
标题翻译：六自由度舞台装置
公开(公告)号：US20070267995A1
公开(公告)日：2007-11-22
申请号：US11750604
申请日：2007-05-18
申请人： Michael B. Binnard , Yoichi Arai , Douglas C. Watson , Alton H. Phillips , Scott Coakley
发明人： Michael B. Binnard , Yoichi Arai , Douglas C. Watson , Alton H. Phillips , Scott Coakley
IPC分类号： B64C17/06
CPC分类号： G03F7/70716 , G03F7/70766
摘要： Methods and apparatus for providing a fine stage with up to six degrees of freedom are disclosed. According to one aspect of the present invention, a stage apparatus includes a first stage assembly, a second stage assembly, and a countermass arrangement. The first stage assembly including a first component of a first actuator, and supports a second actuator arrangement. The second stage assembly is supported over the first stage assembly such that the second actuator arrangement drives the second stage assembly along a vertical axis. The countermass arrangement includes a second component of the first actuator. The first component cooperates with the second component to allow the first stage assembly to move relative to a first horizontal axis. The countermass arrangement absorbs reaction forces associated with the first and second stage assemblies.
摘要翻译：公开了提供高达六个自由度的精细台阶的方法和装置。根据本发明的一个方面，一种舞台装置包括第一舞台组件，第二舞台组件和反对质量装置。第一级组件包括第一致动器的第一部件，并且支撑第二致动器装置。第二级组件被支撑在第一级组件上，使得第二致动器装置沿着垂直轴驱动第二级组件。反对质量布置包括第一致动器的第二部件。第一部件与第二部件配合以允许第一级组件相对于第一水平轴线移动。反作用装置吸收与第一和第二级组件相关联的反作用力。

4. 发明申请

US20080285004A1 Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus 审中-公开
标题翻译：单片，非接触式六自由度舞台装置
公开(公告)号：US20080285004A1
公开(公告)日：2008-11-20
申请号：US11750545
申请日：2007-05-18
申请人： Michael B. Binnard , Yoichi Arai , Douglas C. Watson , Alton H. Phillips
发明人： Michael B. Binnard , Yoichi Arai , Douglas C. Watson , Alton H. Phillips
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： G03F7/709 , G03F7/70725 , G03F7/70758 , G03F7/70766 , G03F7/70816
摘要： Methods and apparatus for controlling a stage assembly in up to six degrees of freedom using actuators which each allow for forces to be generated in a horizontal direction and a vertical direction are disclosed. According to one aspect of the present invention, a stage apparatus includes a stage assembly and a first stator arrangement. The stage assembly includes a first magnet arrangement of an actuator assembly, and the first stator arrangement is part of the actuator assembly. The first magnet arrangement cooperates with the first stator arrangement to allow the stage assembly to move relative to a first horizontal axis as well as a vertical axis.
摘要翻译：公开了使用致动器在多达六个自由度中控制台组件的方法和装置，每个致动器允许在水平方向和垂直方向上产生力。根据本发明的一个方面，舞台装置包括舞台组件和第一定子装置。舞台组件包括致动器组件的第一磁体布置，并且第一定子布置是致动器组件的一部分。第一磁体装置与第一定子装置配合以允许载物台组件相对于第一水平轴线和垂直轴线移动。

5. 发明授权

US08853988B2 Control systems and methods for compensating for effects of a stage motor 有权
标题翻译：用于补偿平台电机的影响的控制系统和方法
公开(公告)号：US08853988B2
公开(公告)日：2014-10-07
申请号：US12406322
申请日：2009-03-18
申请人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
发明人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
IPC分类号： G05B1/06 , G05B19/404 , G03F7/20
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译：本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

6. 发明申请

US20100237819A1 Control Systems and Methods for Compensating for Effects of a Stage Motor 有权
标题翻译：补偿电动机效果的控制系统和方法
公开(公告)号：US20100237819A1
公开(公告)日：2010-09-23
申请号：US12406322
申请日：2009-03-18
申请人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
发明人： Michael B. Binnard , Scott Coakley , Douglas C. Watson , Pai-Hsueh Yang
IPC分类号： G05B11/36
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70758 , G05B2219/41128 , G05B2219/41443
摘要： Embodiments of the invention compensate for one or more effects of a stage motor in a precision stage device. A feedforward module receives an input signal corresponding to the effect of the motor and generates a feedforward control signal that can be used to modify a motor control signal to compensate for the effect of the motor. In some embodiments, a control system is provided to compensate for a back-electromotive force generated by a motor, while in other embodiments, a control system may compensate for an inductive effect of a motor. Embodiments of the invention may be useful in precision stage devices, for example, lithography devices such as steppers and scanners.
摘要翻译：本发明的实施例补偿了精密级装置中的级电动机的一个或多个效果。前馈模块接收与电动机的效果相对应的输入信号，并产生可用于修改电动机控制信号以补偿电动机的影响的前馈控制信号。在一些实施例中，提供控制系统以补偿由电动机产生的反电动势，而在其他实施例中，控制系统可以补偿电动机的感应效应。本发明的实施例可用于精密平台装置，例如平版印刷装置，例如步进器和扫描器。

7. 发明授权

US08705170B2 High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations 有权
标题翻译：高NA反射折射成像光学器件用于将掩模版成像到一对成像位置
公开(公告)号：US08705170B2
公开(公告)日：2014-04-22
申请号：US12547086
申请日：2009-08-25
申请人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
发明人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B27/1066 , G02B27/143 , G03F7/70225 , G03F7/7025 , G03F7/70275 , G03F7/70833
摘要： New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
摘要翻译：提供了一种被配置为将掩模版同时成像到一对成像位置的成像光学系统的新的和有用的概念，其中成像光学器件包括一对臂，每个臂包括反射折射成像光学元件。此外，成像光学器件优选地设计成在至少为1.3的数值孔径同时成像成对位置的成对位置成像，并且不会由成像光学元件遮挡光。

8. 发明授权

US08767174B2 Temperature-controlled holding devices for planar articles 有权
标题翻译：用于平面物品的温度控制保持装置
公开(公告)号：US08767174B2
公开(公告)日：2014-07-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/42
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

9. 发明申请

US20140176931A1 INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS 审中-公开
标题翻译：可移动光学元件的间歇温度控制
公开(公告)号：US20140176931A1
公开(公告)日：2014-06-26
申请号：US14237821
申请日：2012-08-12
申请人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
发明人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
IPC分类号： G02B26/08 , G03F7/20
CPC分类号： G02B26/0816 , G03F7/70075 , G03F7/702 , G03F7/70825 , G03F7/70891 , G03F7/7095
摘要： An optical system including an optical element, a positioning mechanism configured to position the optical element into an operational position, and a temperature control mechanism configured to intermittently control the temperature of the optical element between operations. By alternatively positioning the optical element between an operational position and a position in thermal contact with the temperature control mechanism, the two mechanisms for positioning and controlling the temperature of the optical element are de-coupled from one another. As a result, the mechanism for each may be optimized In non-exclusive embodiments, the temperature control mechanism may be used to control the temperature of an individual optical element or a plurality of optical elements, such as for example, a fly's eye mirror used in an illumination unit of an EUV lithography tool.
摘要翻译：一种光学系统，包括光学元件，配置成将光学元件定位在操作位置的定位机构，以及配置为在操作之间间歇地控制光学元件的温度的温度控制机构。通过可选地将光学元件定位在与温度控制机构热接触的操作位置和位置之间，用于定位和控制光学元件的温度的两个机构彼此脱耦合。结果，可以优化每个的机构在非排他性的实施例中，温度控制机构可用于控制单个光学元件或多个光学元件的温度，例如使用的飞眼镜在EUV光刻工具的照明单元中。

10. 发明申请

US20110211178A1 TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES 有权
标题翻译：用于平面文章的温度控制保持装置
公开(公告)号：US20110211178A1
公开(公告)日：2011-09-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

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