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1. 发明授权

US07477358B2 EUV reticle handling system and method 失效
标题翻译： EUV掩模版处理系统和方法
公开(公告)号：US07477358B2
公开(公告)日：2009-01-13
申请号：US11238237
申请日：2005-09-28
申请人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
发明人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
IPC分类号： G03B27/62 , B65D85/38
CPC分类号： G03F7/70741
摘要： An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. The enclosure in conjunction with a heater and heat sink provides thermophoretic protection of an enclosed reticle.
摘要翻译：公开了用于保护掩模版的至少一个图案侧和相对侧的外壳。外壳包括第一和第二部分，其在处理，检查，存储和运输期间形成围绕保护的掩模版的外壳。外壳与加热器和散热器一起提供封闭的掩模版的热泳保护。

2. 发明申请

US20090027639A1 EUV Reticle Handling System and Method 有权
标题翻译： EUV光栅处理系统和方法
公开(公告)号：US20090027639A1
公开(公告)日：2009-01-29
申请号：US12242050
申请日：2008-09-30
申请人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
发明人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： G03F7/70741
摘要： An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. The enclosure in conjunction with a heater and heat sink provides thermophoretic protection of an enclosed reticle.
摘要翻译：公开了用于保护掩模版的至少一个图案侧和相对侧的外壳。外壳包括第一和第二部分，其在处理，检查，存储和运输期间形成围绕保护的掩模版的外壳。外壳与加热器和散热器一起提供封闭的掩模版的热泳保护。

3. 发明授权

US08767174B2 Temperature-controlled holding devices for planar articles 有权
标题翻译：用于平面物品的温度控制保持装置
公开(公告)号：US08767174B2
公开(公告)日：2014-07-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/42
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

4. 发明申请

US20110211178A1 TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES 有权
标题翻译：用于平面文章的温度控制保持装置
公开(公告)号：US20110211178A1
公开(公告)日：2011-09-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

5. 发明授权

US07804583B2 EUV reticle handling system and method 有权
标题翻译： EUV掩模版处理系统和方法
公开(公告)号：US07804583B2
公开(公告)日：2010-09-28
申请号：US12242050
申请日：2008-09-30
申请人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
发明人： Alton H. Phillips , Michael R. Sogard , Douglas C. Watson
IPC分类号： G03B27/62 , G03B27/52
CPC分类号： G03F7/70741
摘要： An enclosure for protecting at least a pattern side and an opposing side of a reticle is disclosed. The enclosure includes a first and second part that form an enclosure around a reticle to be protected during handling, inspection, storage, and transport. A method for transporting the reticle to an exposure position from a position outside an exposure chamber is disclosed, including a method for use of a load-lock chamber.
摘要翻译：公开了用于保护掩模版的至少一个图案侧和相对侧的外壳。外壳包括第一和第二部分，其在处理，检查，存储和运输期间形成围绕保护的掩模版的外壳。公开了一种用于将掩模版从暴露室外的位置传送到曝光位置的方法，包括使用负载锁定室的方法。

6. 发明授权

US06903346B2 Stage assembly having a follower assembly 失效
标题翻译：具有从动组件的台架组件
公开(公告)号：US06903346B2
公开(公告)日：2005-06-07
申请号：US09903307
申请日：2001-07-11
申请人： Michael R. Sogard , Michael Kovalerchik , Douglas C. Watson
发明人： Michael R. Sogard , Michael Kovalerchik , Douglas C. Watson
IPC分类号： G03F7/20 , H01J37/20 , G21K5/10
CPC分类号： G03F7/70708 , G03F7/707 , G03F7/70716 , G03F7/70816 , H01J37/20
摘要： A stage assembly (10) for moving and positioning a device (26) includes a device stage (14), a stage mover assembly (16), and a follower assembly (18). The stage mover assembly (16) moves the device stage (14) along an X axis, along a Y axis and about a Z axis. The follower assembly (18) includes a first follower guide (76) and a first follower frame (80). The first follower guide (76) supports the first follower frame (80) and allows the first follower frame (80) to move along the Y axis. Further, the first follower frame (80) supports the device stage (14) and allows the device stage (14) to move along the Y axis, along the X axis, and about the Z axis. Importantly, the first follower frame (80) is moved along the Y axis with a first follower mover (84). With this design, the device stage (14) can be made relatively thin vertically and the control lines (20) to the device stage (14) can be relatively short.
摘要翻译：用于移动和定位装置（26）的台架组件（10）包括装置台（14），平台移动器组件（16）和从动组件（18）。台架动子组件（16）沿Y轴和Z轴沿X轴移动装置台（14）。从动组件（18）包括第一从动引导件（76）和第一从动件框架（80）。第一从动引导件（76）支撑第一从动件框架（80）并允许第一从动件框架（80）沿着Y轴移动。此外，第一跟随框架（80）支撑装置台（14），并允许装置台（14）沿着Y轴沿着X轴和Z轴移动。重要的是，第一跟随器框架（80）通过第一跟随器移动器（84）沿着Y轴移动。通过这种设计，装置台（14）可以做成相对薄的垂直方向，并且到装置台（14）的控制线（20）可以相对较短。

7. 发明申请

US20090147386A1 Temperature-regulating devices for reflective optical elements 审中-公开
标题翻译：用于反射光学元件的温度调节装置
公开(公告)号：US20090147386A1
公开(公告)日：2009-06-11
申请号：US12001529
申请日：2007-12-11
申请人： Michael R. Sogard , Douglas C. Watson
发明人： Michael R. Sogard , Douglas C. Watson
IPC分类号： G02B7/195
CPC分类号： G02B7/1815 , G03F7/70891
摘要： Thermal-transfer devices (e.g., cooling devices) are disclosed for optical elements. An exemplary device includes a thermally conductive substrate having a surface. At least one mounting element extends from the surface to a reverse face of the optical element. The mounting element positions the optical element relative to the substrate with a gap between the surface and the reverse face. At least one gas-introduction port is situated relative to the gap. Also included is a gaseous thermal-conduction pathway across the gap between the optical element and the substrate. The thermal-conduction pathway includes flowing gas introduced (e.g., as a thin layer) into the gap by the gas-introduction port.
摘要翻译：公开了用于光学元件的热传递装置（例如，冷却装置）。示例性装置包括具有表面的导热基板。至少一个安装元件从光学元件的表面延伸到反面。安装元件将光学元件相对于基板定位在表面和反面之间的间隙。至少一个气体导入口相对于间隙设置。还包括穿过光学元件和基板之间的间隙的气体热传导路径。热传导路径包括通过气体导入口将引入（例如，作为薄层）的气体流入间隙。

8. 发明授权

US6127749A Two-dimensional electric motor 失效
公开(公告)号：US6127749A
公开(公告)日：2000-10-03
申请号：US247450
申请日：1999-02-10
申请人： Michael R. Sogard
发明人： Michael R. Sogard
IPC分类号： H01L21/68 , G03F7/20 , H01L21/027 , H02K41/03 , H02K41/02
CPC分类号： G03F7/70758 , H02K41/031 , H02K2201/18
摘要： The invention includes a two-dimensional electric motor having two arrays of permanent magnets and at least two coils. The arrays of permanent magnets each have north and south poles distributed in both longitudinal and latitudinal directions along a plane. North poles in the first array are aligned with south poles in the second array, and south poles in the first array are aligned with north poles in the second array. The coil has a portion between the two arrays of permanent magnets. In another embodiment, the two-dimensional electric motor has an array of permanent magnets and two sets of two coils. The two sets of two coils are positioned on two different sides of the array. The invention permits simpler control methods, more stable motion, increased efficiency, and reduced stray magnetic fields. The invention should be particularly useful in semiconductor processing equipment.

9. 发明授权

US5870197A Precision stage interferometer system with local single air duct 失效
标题翻译：具有本地单风道的精密级干涉仪系统
公开(公告)号：US5870197A
公开(公告)日：1999-02-09
申请号：US738962
申请日：1996-10-24
申请人： Michael R. Sogard , John K. Eaton , Kyoichi Suwa , Naoyuki Kobayashi
发明人： Michael R. Sogard , John K. Eaton , Kyoichi Suwa , Naoyuki Kobayashi
IPC分类号： H01L21/027 , G03F7/20 , G03F7/207 , G01B9/02
CPC分类号： G03F7/70875 , G03F7/70716 , G03F7/70866
摘要： A local air duct directs a temperature-controlled stream of air across two perpendicular sets of interferometer beams which are used to measure the two dimension (X-Y) position of a precision stage in e.g. an optical lithography stepper or step and scan system, or in any other precision coordinate measuring machine. By thereby providing an additional single air flow which is azimuthally directed across both the X and Y direction interferometer beams, the precision of the interferometric measurement is maximized. In addition, a second flow of air is directed downwards from the local air duct, thus providing sufficient air circulation onto the stage when the stage is directly beneath the local duct, even though in that location the stage is otherwise blocked from receiving the main air flow through the chamber.
摘要翻译：局部空气管道引导温度控制的空气流穿过两个垂直的干涉仪光束组，这些干涉仪光束用于测量例如精密级的二维（X-Y）位置。光刻步进或步进扫描系统，或任何其他精密坐标测量机。通过这样提供方位角定向穿过X和Y方向干涉仪光束的另外的单一空气流，干涉测量的精度最大化。此外，空气的第二流动从局部空气管道向下引导，从而当台架直接位于局部管道下方时，能够在舞台上提供足够的空气循环，即使在该位置，台架被阻挡以免接收主空气流过腔室。

10. 发明授权

US5866935A Tunneling device 失效
标题翻译：隧道装置
公开(公告)号：US5866935A
公开(公告)日：1999-02-02
申请号：US756295
申请日：1996-11-25
申请人： Michael R. Sogard
发明人： Michael R. Sogard
IPC分类号： G02B27/58 , G01J1/42 , G01J3/04 , G01J4/00 , G01Q60/18 , G03F7/20 , H01L21/027 , H01L31/0232
CPC分类号： G01J1/4257 , B82Y20/00 , B82Y35/00 , G01J3/04 , G01J4/00 , G01Q60/22 , G03F7/70358 , G03F7/70566 , G03F7/706
摘要： A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.
摘要翻译：使用亚波长狭缝分析光学系统的空间图像的方法和装置。狭缝配置产生比通过圆形孔径可获得的信噪比更高的信噪比。狭缝还允许分析航空图像的极化。在替代实施例中，使用隧道狭缝。隧道狭缝包括安装到基底的光学透明的脊状结构，由薄的平面金属膜覆盖的组合结构。

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